JPS63131053A - 光学的検査装置 - Google Patents

光学的検査装置

Info

Publication number
JPS63131053A
JPS63131053A JP27742986A JP27742986A JPS63131053A JP S63131053 A JPS63131053 A JP S63131053A JP 27742986 A JP27742986 A JP 27742986A JP 27742986 A JP27742986 A JP 27742986A JP S63131053 A JPS63131053 A JP S63131053A
Authority
JP
Japan
Prior art keywords
signal
sample
counting
light
pulse
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP27742986A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0543267B2 (enrdf_load_stackoverflow
Inventor
Tokio Oodo
大戸　時喜雄
Yasushi Zaitsu
財津　靖史
Hiroshi Hoshikawa
星川　寛
Yasuaki Nanba
難波　泰明
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fuji Electric Co Ltd
Original Assignee
Fuji Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fuji Electric Co Ltd filed Critical Fuji Electric Co Ltd
Priority to JP27742986A priority Critical patent/JPS63131053A/ja
Publication of JPS63131053A publication Critical patent/JPS63131053A/ja
Publication of JPH0543267B2 publication Critical patent/JPH0543267B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/94—Investigating contamination, e.g. dust

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP27742986A 1986-11-20 1986-11-20 光学的検査装置 Granted JPS63131053A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP27742986A JPS63131053A (ja) 1986-11-20 1986-11-20 光学的検査装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP27742986A JPS63131053A (ja) 1986-11-20 1986-11-20 光学的検査装置

Publications (2)

Publication Number Publication Date
JPS63131053A true JPS63131053A (ja) 1988-06-03
JPH0543267B2 JPH0543267B2 (enrdf_load_stackoverflow) 1993-07-01

Family

ID=17583435

Family Applications (1)

Application Number Title Priority Date Filing Date
JP27742986A Granted JPS63131053A (ja) 1986-11-20 1986-11-20 光学的検査装置

Country Status (1)

Country Link
JP (1) JPS63131053A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04331356A (ja) * 1991-03-19 1992-11-19 Fujitsu Ltd 半導体製造用インラインパーティクル検出装置及び半導体製造装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04331356A (ja) * 1991-03-19 1992-11-19 Fujitsu Ltd 半導体製造用インラインパーティクル検出装置及び半導体製造装置

Also Published As

Publication number Publication date
JPH0543267B2 (enrdf_load_stackoverflow) 1993-07-01

Similar Documents

Publication Publication Date Title
US5159412A (en) Optical measurement device with enhanced sensitivity
US5076692A (en) Particle detection on a patterned or bare wafer surface
JP4979246B2 (ja) 欠陥観察方法および装置
US4669875A (en) Foreign particle detecting method and apparatus
US4402607A (en) Automatic detector for microscopic dust on large-area, optically unpolished surfaces
US5153428A (en) Confocal laser scanning microscope having relay lens and a slit for removing stray light
US7205518B2 (en) Method and arrangement for focusing in an optical measurement
JPH0474662B2 (enrdf_load_stackoverflow)
JP3978528B2 (ja) パターン欠陥検査装置及びレーザ顕微鏡
USRE33991E (en) Foreign particle detecting method and apparatus
JPS6365904B2 (enrdf_load_stackoverflow)
JPS63131053A (ja) 光学的検査装置
JPS6129453B2 (enrdf_load_stackoverflow)
JP2539182B2 (ja) 半導体ウエハ上の異物検査方法
JP3106521B2 (ja) 透明基板の光学的検査装置
JPH11271231A (ja) 表面異物検査装置
JPH03115844A (ja) 表面欠点検出方法
KR0154559B1 (ko) 결함 레티클 검사장치 및 방법
JP4406873B2 (ja) スキャン測定検査装置
JPH05312510A (ja) 位置検出装置
JP4996116B2 (ja) 欠陥検査装置
JPH0334577B2 (enrdf_load_stackoverflow)
EP0162973A1 (en) Distance measuring device
JPH04307358A (ja) 表面検査装置
JPH0641923B2 (ja) 表面検査装置