JPH0543267B2 - - Google Patents

Info

Publication number
JPH0543267B2
JPH0543267B2 JP27742986A JP27742986A JPH0543267B2 JP H0543267 B2 JPH0543267 B2 JP H0543267B2 JP 27742986 A JP27742986 A JP 27742986A JP 27742986 A JP27742986 A JP 27742986A JP H0543267 B2 JPH0543267 B2 JP H0543267B2
Authority
JP
Japan
Prior art keywords
signal
sample
counting
light
pulse
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP27742986A
Other languages
English (en)
Japanese (ja)
Other versions
JPS63131053A (ja
Inventor
Tokio Oodo
Yasushi Zaitsu
Hiroshi Hoshikawa
Yasuaki Nanba
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fuji Electric Co Ltd
Original Assignee
Fuji Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fuji Electric Co Ltd filed Critical Fuji Electric Co Ltd
Priority to JP27742986A priority Critical patent/JPS63131053A/ja
Publication of JPS63131053A publication Critical patent/JPS63131053A/ja
Publication of JPH0543267B2 publication Critical patent/JPH0543267B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/94—Investigating contamination, e.g. dust

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP27742986A 1986-11-20 1986-11-20 光学的検査装置 Granted JPS63131053A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP27742986A JPS63131053A (ja) 1986-11-20 1986-11-20 光学的検査装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP27742986A JPS63131053A (ja) 1986-11-20 1986-11-20 光学的検査装置

Publications (2)

Publication Number Publication Date
JPS63131053A JPS63131053A (ja) 1988-06-03
JPH0543267B2 true JPH0543267B2 (enrdf_load_stackoverflow) 1993-07-01

Family

ID=17583435

Family Applications (1)

Application Number Title Priority Date Filing Date
JP27742986A Granted JPS63131053A (ja) 1986-11-20 1986-11-20 光学的検査装置

Country Status (1)

Country Link
JP (1) JPS63131053A (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2663955B2 (ja) * 1991-03-19 1997-10-15 富士通株式会社 半導体製造用インラインパーティクル検出装置及び半導体製造装置

Also Published As

Publication number Publication date
JPS63131053A (ja) 1988-06-03

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