JPS63129094A - 気相エピタキシヤル成長方法 - Google Patents

気相エピタキシヤル成長方法

Info

Publication number
JPS63129094A
JPS63129094A JP26975986A JP26975986A JPS63129094A JP S63129094 A JPS63129094 A JP S63129094A JP 26975986 A JP26975986 A JP 26975986A JP 26975986 A JP26975986 A JP 26975986A JP S63129094 A JPS63129094 A JP S63129094A
Authority
JP
Japan
Prior art keywords
preheating
diffraction grating
growth
gas
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP26975986A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0510319B2 (enrdf_load_stackoverflow
Inventor
Masatoshi Suzuki
正敏 鈴木
Yukitoshi Kushiro
久代　行俊
Shigeyuki Akiba
重幸 秋葉
Hideaki Tanaka
英明 田中
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
KDDI Corp
Original Assignee
Kokusai Denshin Denwa KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kokusai Denshin Denwa KK filed Critical Kokusai Denshin Denwa KK
Priority to JP26975986A priority Critical patent/JPS63129094A/ja
Publication of JPS63129094A publication Critical patent/JPS63129094A/ja
Publication of JPH0510319B2 publication Critical patent/JPH0510319B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
JP26975986A 1986-11-14 1986-11-14 気相エピタキシヤル成長方法 Granted JPS63129094A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP26975986A JPS63129094A (ja) 1986-11-14 1986-11-14 気相エピタキシヤル成長方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP26975986A JPS63129094A (ja) 1986-11-14 1986-11-14 気相エピタキシヤル成長方法

Publications (2)

Publication Number Publication Date
JPS63129094A true JPS63129094A (ja) 1988-06-01
JPH0510319B2 JPH0510319B2 (enrdf_load_stackoverflow) 1993-02-09

Family

ID=17476754

Family Applications (1)

Application Number Title Priority Date Filing Date
JP26975986A Granted JPS63129094A (ja) 1986-11-14 1986-11-14 気相エピタキシヤル成長方法

Country Status (1)

Country Link
JP (1) JPS63129094A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0510319B2 (enrdf_load_stackoverflow) 1993-02-09

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