JPS6312862U - - Google Patents
Info
- Publication number
- JPS6312862U JPS6312862U JP10491186U JP10491186U JPS6312862U JP S6312862 U JPS6312862 U JP S6312862U JP 10491186 U JP10491186 U JP 10491186U JP 10491186 U JP10491186 U JP 10491186U JP S6312862 U JPS6312862 U JP S6312862U
- Authority
- JP
- Japan
- Prior art keywords
- polycrystalline silicon
- film
- gate oxide
- region
- drain region
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010408 film Substances 0.000 claims description 11
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims description 5
- 230000003647 oxidation Effects 0.000 claims description 4
- 238000007254 oxidation reaction Methods 0.000 claims description 4
- 239000000758 substrate Substances 0.000 claims description 3
- 239000010409 thin film Substances 0.000 claims description 3
- 239000012535 impurity Substances 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Thin Film Transistor (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10491186U JPS6312862U (enExample) | 1986-07-10 | 1986-07-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10491186U JPS6312862U (enExample) | 1986-07-10 | 1986-07-10 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6312862U true JPS6312862U (enExample) | 1988-01-27 |
Family
ID=30978843
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10491186U Pending JPS6312862U (enExample) | 1986-07-10 | 1986-07-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6312862U (enExample) |
-
1986
- 1986-07-10 JP JP10491186U patent/JPS6312862U/ja active Pending
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