JPS63128288U - - Google Patents

Info

Publication number
JPS63128288U
JPS63128288U JP2108787U JP2108787U JPS63128288U JP S63128288 U JPS63128288 U JP S63128288U JP 2108787 U JP2108787 U JP 2108787U JP 2108787 U JP2108787 U JP 2108787U JP S63128288 U JPS63128288 U JP S63128288U
Authority
JP
Japan
Prior art keywords
circuit
power outage
control circuit
rotor
electromagnet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2108787U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0729278Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987021087U priority Critical patent/JPH0729278Y2/ja
Publication of JPS63128288U publication Critical patent/JPS63128288U/ja
Application granted granted Critical
Publication of JPH0729278Y2 publication Critical patent/JPH0729278Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Control Of Positive-Displacement Air Blowers (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Magnetic Bearings And Hydrostatic Bearings (AREA)
JP1987021087U 1987-02-16 1987-02-16 磁気軸受式タ−ボ分子ポンプのロ−タ制動装置 Expired - Lifetime JPH0729278Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987021087U JPH0729278Y2 (ja) 1987-02-16 1987-02-16 磁気軸受式タ−ボ分子ポンプのロ−タ制動装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987021087U JPH0729278Y2 (ja) 1987-02-16 1987-02-16 磁気軸受式タ−ボ分子ポンプのロ−タ制動装置

Publications (2)

Publication Number Publication Date
JPS63128288U true JPS63128288U (enExample) 1988-08-22
JPH0729278Y2 JPH0729278Y2 (ja) 1995-07-05

Family

ID=30817206

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987021087U Expired - Lifetime JPH0729278Y2 (ja) 1987-02-16 1987-02-16 磁気軸受式タ−ボ分子ポンプのロ−タ制動装置

Country Status (1)

Country Link
JP (1) JPH0729278Y2 (enExample)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5017687A (enExample) * 1973-06-13 1975-02-25
JPS57202890A (en) * 1981-06-05 1982-12-11 Toshiba Corp Controller for stop of device
JPS6117715A (ja) * 1984-07-04 1986-01-25 Hitachi Ltd 電磁軸受制御方法および装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5017687A (enExample) * 1973-06-13 1975-02-25
JPS57202890A (en) * 1981-06-05 1982-12-11 Toshiba Corp Controller for stop of device
JPS6117715A (ja) * 1984-07-04 1986-01-25 Hitachi Ltd 電磁軸受制御方法および装置

Also Published As

Publication number Publication date
JPH0729278Y2 (ja) 1995-07-05

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