JPS63128288U - - Google Patents
Info
- Publication number
- JPS63128288U JPS63128288U JP2108787U JP2108787U JPS63128288U JP S63128288 U JPS63128288 U JP S63128288U JP 2108787 U JP2108787 U JP 2108787U JP 2108787 U JP2108787 U JP 2108787U JP S63128288 U JPS63128288 U JP S63128288U
- Authority
- JP
- Japan
- Prior art keywords
- circuit
- power outage
- control circuit
- rotor
- electromagnet
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001514 detection method Methods 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
Landscapes
- Non-Positive Displacement Air Blowers (AREA)
- Magnetic Bearings And Hydrostatic Bearings (AREA)
- Control Of Positive-Displacement Air Blowers (AREA)
Description
図面は本考案に係る装置の好適な実施例を示す
ブロツク図である。
１０……磁気軸受式ターボ分子ポンプの本体、
１２―１，１２―２，１２―３，１２―４，１２
―５……電磁石、１４……電磁石駆動回路、１６
……磁気軸受制御回路、１８……モータ、２０…
…インバータ、２２……ＤＣ―ＤＣコンバータ、
２４……モータ制御回路、２６……外部の交流電
源、２８……直流電源回路、３０……電源切替器
、３２……バツテリ、３６……電気制動回路、３
８……センサ、４０……回転数検出回路、４２…
…管路、４４……電磁バルブ、４６……バルブ駆
動回路、４８……主回路電流監視回路。
The drawing is a block diagram showing a preferred embodiment of the device according to the present invention. 10...Main body of magnetic bearing type turbomolecular pump,
12-1, 12-2, 12-3, 12-4, 12
-5... Electromagnet, 14... Electromagnet drive circuit, 16
...Magnetic bearing control circuit, 18...Motor, 20...
...Inverter, 22...DC-DC converter,
24...Motor control circuit, 26...External AC power supply, 28...DC power supply circuit, 30...Power switch, 32...Battery, 36...Electric braking circuit, 3
8...sensor, 40...rotation speed detection circuit, 42...
... Pipe line, 44 ... Solenoid valve, 46 ... Valve drive circuit, 48 ... Main circuit current monitoring circuit.
Claims (1)
させる電磁石駆動回路と、 停電時にロータ駆動用モータを制動する電気制
動回路と、 ロータ駆動用モータの回転数を検出する回転数
検出回路と、 停電時において検出回転数が設定の回転数まで
低下したときに、前記電磁石の通電を停止制御す
る磁気軸受制御回路と、 ポンプ内部へ外部からロータ制動用のガスを導
入する管路に設けられた電磁バルブと、 停電時に電気制動回路の故障を検知したときに
、電磁バルブを開き制御する停電制御回路と、 電磁石駆動回路、磁気軸受制御回路、停電制御
回路、電磁バルブの駆動回路へ動作電流を停電時
に供給するバツテリと、 を有する、ことを特徴とする磁気軸受式ターボ分
子ポンプのロータ制動装置。[Scope of claim for utility model registration] An electromagnet drive circuit that magnetically levitates the rotor by energizing the electromagnet of the magnetic bearing, an electric braking circuit that brakes the rotor drive motor in the event of a power outage, and a system that detects the rotational speed of the rotor drive motor. a rotation speed detection circuit; a magnetic bearing control circuit that controls the electromagnet to stop energizing when the detected rotation speed drops to a set rotation speed during a power outage; and a rotor braking gas introduced into the pump from the outside. The electromagnetic valve installed in the pipeline, the power outage control circuit that opens and controls the electromagnetic valve when a failure of the electric braking circuit is detected during a power outage, the electromagnet drive circuit, the magnetic bearing control circuit, the power outage control circuit, and the electromagnetic valve control circuit. A rotor braking device for a magnetic bearing type turbomolecular pump, comprising: a battery that supplies operating current to a drive circuit during a power outage.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987021087U JPH0729278Y2 (en) | 1987-02-16 | 1987-02-16 | Rotor braking device for magnetic bearing type turbo molecular pump |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987021087U JPH0729278Y2 (en) | 1987-02-16 | 1987-02-16 | Rotor braking device for magnetic bearing type turbo molecular pump |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63128288U true JPS63128288U (en) | 1988-08-22 |
| JPH0729278Y2 JPH0729278Y2 (en) | 1995-07-05 |
Family
ID=30817206
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987021087U Expired - Lifetime JPH0729278Y2 (en) | 1987-02-16 | 1987-02-16 | Rotor braking device for magnetic bearing type turbo molecular pump |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0729278Y2 (en) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5017687A (en) * | 1973-06-13 | 1975-02-25 | ||
| JPS57202890A (en) * | 1981-06-05 | 1982-12-11 | Toshiba Corp | Controller for stop of device |
| JPS6117715A (en) * | 1984-07-04 | 1986-01-25 | Hitachi Ltd | Control method and device for electro-magnetic bearing |
-
1987
- 1987-02-16 JP JP1987021087U patent/JPH0729278Y2/en not_active Expired - Lifetime
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5017687A (en) * | 1973-06-13 | 1975-02-25 | ||
| JPS57202890A (en) * | 1981-06-05 | 1982-12-11 | Toshiba Corp | Controller for stop of device |
| JPS6117715A (en) * | 1984-07-04 | 1986-01-25 | Hitachi Ltd | Control method and device for electro-magnetic bearing |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0729278Y2 (en) | 1995-07-05 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP3791375B2 (en) | Control method and apparatus for electric vehicle | |
| JPS63128288U (en) | ||
| JPH08169653A (en) | Energy-saving system for elevator | |
| GB2225679B (en) | Elevator control apparatus | |
| JP2010024043A (en) | Hybrid type working machine | |
| EP0795952A3 (en) | Method of and apparatus for stopping a motor having magnetic bearings | |
| JPH1023781A (en) | Power unit for magnetic bearing | |
| JPS6055838A (en) | Brake controller of magnetic bearing using vacuum rotary machine | |
| JPH0278878U (en) | ||
| JPH06165548A (en) | Motor brake unit | |
| CN1039468C (en) | Electric wheel | |
| JPH0251049U (en) | ||
| JPS6022252Y2 (en) | ventilation fan | |
| JPH04109970U (en) | Elevator car power supply device | |
| JPH037692U (en) | ||
| JPH0250514U (en) | ||
| KR100387832B1 (en) | an assistant charging equipment of hybrid electric vehicle | |
| JPS643769U (en) | ||
| JPH0313501Y2 (en) | ||
| CN2130979Y (en) | Small-flow normal-pressure electromagnetic valve | |
| JP2562427Y2 (en) | Emergency stop device for magnetic levitation slider | |
| JPS5943761Y2 (en) | Vehicle electric generator | |
| JPS5913424B2 (en) | Elevator emergency power supply | |
| JPH0111654Y2 (en) | ||
| JPS6196702U (en) |