JPS6312348Y2 - - Google Patents

Info

Publication number
JPS6312348Y2
JPS6312348Y2 JP1984149960U JP14996084U JPS6312348Y2 JP S6312348 Y2 JPS6312348 Y2 JP S6312348Y2 JP 1984149960 U JP1984149960 U JP 1984149960U JP 14996084 U JP14996084 U JP 14996084U JP S6312348 Y2 JPS6312348 Y2 JP S6312348Y2
Authority
JP
Japan
Prior art keywords
vram
ion
etching
signal
secondary ion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1984149960U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6166355U (OSRAM
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1984149960U priority Critical patent/JPS6312348Y2/ja
Publication of JPS6166355U publication Critical patent/JPS6166355U/ja
Application granted granted Critical
Publication of JPS6312348Y2 publication Critical patent/JPS6312348Y2/ja
Expired legal-status Critical Current

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  • ing And Chemical Polishing (AREA)
JP1984149960U 1984-10-03 1984-10-03 Expired JPS6312348Y2 (OSRAM)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1984149960U JPS6312348Y2 (OSRAM) 1984-10-03 1984-10-03

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1984149960U JPS6312348Y2 (OSRAM) 1984-10-03 1984-10-03

Publications (2)

Publication Number Publication Date
JPS6166355U JPS6166355U (OSRAM) 1986-05-07
JPS6312348Y2 true JPS6312348Y2 (OSRAM) 1988-04-08

Family

ID=30708124

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1984149960U Expired JPS6312348Y2 (OSRAM) 1984-10-03 1984-10-03

Country Status (1)

Country Link
JP (1) JPS6312348Y2 (OSRAM)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101971091B (zh) * 2008-02-28 2013-06-19 卡尔蔡司Sms有限责任公司 具有微型化结构的物体的加工方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5856332A (ja) * 1981-09-30 1983-04-04 Hitachi Ltd マスクの欠陥修正方法
JPS58196020A (ja) * 1982-05-12 1983-11-15 Hitachi Ltd マスクの欠陥検査・修正方法およびその装置

Also Published As

Publication number Publication date
JPS6166355U (OSRAM) 1986-05-07

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