JPS6312252B2 - - Google Patents

Info

Publication number
JPS6312252B2
JPS6312252B2 JP55082257A JP8225780A JPS6312252B2 JP S6312252 B2 JPS6312252 B2 JP S6312252B2 JP 55082257 A JP55082257 A JP 55082257A JP 8225780 A JP8225780 A JP 8225780A JP S6312252 B2 JPS6312252 B2 JP S6312252B2
Authority
JP
Japan
Prior art keywords
gas
gate electrode
diffusion layer
gate
sensitive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP55082257A
Other languages
English (en)
Japanese (ja)
Other versions
JPS577549A (en
Inventor
Makoto Yano
Kyoo Shimada
Kyoichiro Shibatani
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kuraray Co Ltd
Original Assignee
Kuraray Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kuraray Co Ltd filed Critical Kuraray Co Ltd
Priority to JP8225780A priority Critical patent/JPS577549A/ja
Publication of JPS577549A publication Critical patent/JPS577549A/ja
Publication of JPS6312252B2 publication Critical patent/JPS6312252B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
    • G01N27/403—Cells and electrode assemblies
    • G01N27/414—Ion-sensitive or chemical field-effect transistors, i.e. ISFETS or CHEMFETS
    • G01N27/4141—Ion-sensitive or chemical field-effect transistors, i.e. ISFETS or CHEMFETS specially adapted for gases

Landscapes

  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Molecular Biology (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
JP8225780A 1980-06-17 1980-06-17 Fet gas sensor Granted JPS577549A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8225780A JPS577549A (en) 1980-06-17 1980-06-17 Fet gas sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8225780A JPS577549A (en) 1980-06-17 1980-06-17 Fet gas sensor

Publications (2)

Publication Number Publication Date
JPS577549A JPS577549A (en) 1982-01-14
JPS6312252B2 true JPS6312252B2 (en, 2012) 1988-03-18

Family

ID=13769389

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8225780A Granted JPS577549A (en) 1980-06-17 1980-06-17 Fet gas sensor

Country Status (1)

Country Link
JP (1) JPS577549A (en, 2012)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5949767A (ja) * 1982-09-16 1984-03-22 松下電工株式会社 治療器
JPS6133267A (ja) * 1984-07-25 1986-02-17 Hitachi Ltd 非球面体の製造方法
EP1434281A3 (en) * 2002-12-26 2007-10-24 Konica Minolta Holdings, Inc. Manufacturing method of thin-film transistor, thin-film transistor sheet, and electric circuit
JP4860980B2 (ja) 2005-10-20 2012-01-25 ローム株式会社 モータ駆動回路およびそれを用いたディスク装置
DE102007039567A1 (de) * 2007-08-22 2009-02-26 Robert Bosch Gmbh Gassensor
DE102008042859A1 (de) * 2008-10-15 2010-04-22 Robert Bosch Gmbh Elektronisches Bauelement

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5314935A (en) * 1976-07-27 1978-02-10 Kubota Ltd Shrinkable upset work material
JPS6045368B2 (ja) * 1977-12-08 1985-10-09 セイコーエプソン株式会社 半導体ガスセンサ

Also Published As

Publication number Publication date
JPS577549A (en) 1982-01-14

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