JPS63118941U - - Google Patents
Info
- Publication number
- JPS63118941U JPS63118941U JP1987009300U JP930087U JPS63118941U JP S63118941 U JPS63118941 U JP S63118941U JP 1987009300 U JP1987009300 U JP 1987009300U JP 930087 U JP930087 U JP 930087U JP S63118941 U JPS63118941 U JP S63118941U
- Authority
- JP
- Japan
- Prior art keywords
- gas
- ultrafine powder
- reaction vessel
- vessel
- generated
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000843 powder Substances 0.000 claims description 8
- 238000005192 partition Methods 0.000 claims description 5
- 238000004519 manufacturing process Methods 0.000 claims description 4
- 239000011148 porous material Substances 0.000 claims description 2
- 239000007789 gas Substances 0.000 claims 8
- 239000000126 substance Substances 0.000 claims 2
- 239000000919 ceramic Substances 0.000 claims 1
- 238000005229 chemical vapour deposition Methods 0.000 claims 1
- 238000010894 electron beam technology Methods 0.000 claims 1
- 238000001704 evaporation Methods 0.000 claims 1
- 230000008020 evaporation Effects 0.000 claims 1
- 239000007788 liquid Substances 0.000 claims 1
- 239000000463 material Substances 0.000 claims 1
- 239000002184 metal Substances 0.000 claims 1
- 238000000034 method Methods 0.000 claims 1
- 239000000203 mixture Substances 0.000 claims 1
- 239000002245 particle Substances 0.000 claims 1
- 239000002994 raw material Substances 0.000 claims 1
- 238000010992 reflux Methods 0.000 claims 1
- 239000007787 solid Substances 0.000 claims 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F9/00—Making metallic powder or suspensions thereof
- B22F9/02—Making metallic powder or suspensions thereof using physical processes
- B22F9/12—Making metallic powder or suspensions thereof using physical processes starting from gaseous material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J19/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
- B01J19/087—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy
- B01J19/088—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy giving rise to electric discharges
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B21/00—Nitrogen; Compounds thereof
- C01B21/06—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron
- C01B21/072—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron with aluminium
- C01B21/0722—Preparation by direct nitridation of aluminium
- C01B21/0724—Preparation by direct nitridation of aluminium using a plasma
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J2219/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
- B01J2219/0894—Processes carried out in the presence of a plasma
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Health & Medical Sciences (AREA)
- General Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Inorganic Chemistry (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
- Manufacture Of Metal Powder And Suspensions Thereof (AREA)
Description
第1図は本考案を適用した高周波プラズマを用
いる超微粉末連続製造装置の一部断面正面図、第
2図a〜dはそれぞれ従来超微粉末製造装置の一
部断面正面図である。 1……反応容器、5……隔壁、51……細孔、
G4……所定成分のガス。
いる超微粉末連続製造装置の一部断面正面図、第
2図a〜dはそれぞれ従来超微粉末製造装置の一
部断面正面図である。 1……反応容器、5……隔壁、51……細孔、
G4……所定成分のガス。
Claims (1)
- 【実用新案登録請求の範囲】 (1) ガス中蒸発法、アークプラズマまたは高周
波プラズマを用いるPVD法あるいはCVD法、
レーザまたは電子ビームを用いるPVD法あるい
はCVD法等により、密閉した反応容器内で固相
、液相または気相の原材料から金属物質もしくは
セラミツク等の無機物質の超微粉末を生成させて
容器内ガス中に分散・浮遊せしめて捕集・回収す
る装置において、上記反応容器の内壁面に近接し
て生成超微粉末と反応せず、かつ耐熱性を備えた
材質製で多数の細孔が孔設された隔壁を配設する
とともに、内壁面・隔壁間に所定成分のガスを導
入可能に構成してなる超微粉末製造装置。 (2) 反応容器内壁面・隔壁間に導入されるガス
が反応促進成分または不活性成分、ないし両者の
混合した成分のガスである実用新案登録請求の範
囲第1項記載の超微粉末製造装置。 (3) 反応容器内壁面・隔壁間に導入されるガス
が超微粉末を捕集・回収後の容器内ガスの還流で
ある実用新案登録請求の範囲第1項記載の超微粉
末製造装置。
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1987009300U JPH059075Y2 (ja) | 1987-01-27 | 1987-01-27 | |
US07/336,560 US4881722A (en) | 1987-01-27 | 1989-04-11 | Apparatus for producing superfine particle |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1987009300U JPH059075Y2 (ja) | 1987-01-27 | 1987-01-27 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS63118941U true JPS63118941U (ja) | 1988-08-01 |
JPH059075Y2 JPH059075Y2 (ja) | 1993-03-05 |
Family
ID=11716621
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1987009300U Expired - Lifetime JPH059075Y2 (ja) | 1987-01-27 | 1987-01-27 |
Country Status (2)
Country | Link |
---|---|
US (1) | US4881722A (ja) |
JP (1) | JPH059075Y2 (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2011157257A (ja) * | 2010-02-01 | 2011-08-18 | Samsung Electro-Mechanics Co Ltd | ナノ粒子合成装置及びこれを用いたナノ粒子合成方法 |
US10562797B2 (en) | 2017-03-08 | 2020-02-18 | Panasonic Intellectual Property Management Co., Ltd. | Liquid treatment apparatus including flow channel, first and second electrodes, insulator surrounding lateral surface of first electrode, gas supply device, and power supply source |
Families Citing this family (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5272718A (en) * | 1990-04-09 | 1993-12-21 | Leybold Aktiengesellschaft | Method and apparatus for forming a stream of molten material |
DE4102101C2 (de) * | 1991-01-25 | 2003-12-18 | Ald Vacuum Techn Ag | Einrichtung zum Herstellen von Pulvern aus Metallen |
US5460701A (en) * | 1993-07-27 | 1995-10-24 | Nanophase Technologies Corporation | Method of making nanostructured materials |
JPH0758036A (ja) * | 1993-08-16 | 1995-03-03 | Ebara Corp | 薄膜形成装置 |
US5958348A (en) * | 1997-02-28 | 1999-09-28 | Nanogram Corporation | Efficient production of particles by chemical reaction |
US6919054B2 (en) * | 2002-04-10 | 2005-07-19 | Neophotonics Corporation | Reactant nozzles within flowing reactors |
US6849334B2 (en) * | 2001-08-17 | 2005-02-01 | Neophotonics Corporation | Optical materials and optical devices |
US5958329A (en) * | 1997-11-06 | 1999-09-28 | United States Enrichment Corporation | Method and apparatus for producing nanoparticles at a high rate |
US6270732B1 (en) | 1998-06-30 | 2001-08-07 | Nanogram Corporation | Particle collection apparatus and associated methods |
US8013269B2 (en) * | 2005-01-28 | 2011-09-06 | Tekna Plasma Systems Inc. | Induction plasma synthesis of nanopowders |
US20100095806A1 (en) * | 2006-11-02 | 2010-04-22 | Ed Robinson | Method and apparatus for collecting nano-particles |
JP5824906B2 (ja) * | 2011-06-24 | 2015-12-02 | 昭栄化学工業株式会社 | 金属粉末製造用プラズマ装置及び金属粉末製造方法 |
US8778181B1 (en) | 2013-03-14 | 2014-07-15 | Crititech, Inc. | Equipment assembly for and method of processing particles |
US9925512B2 (en) | 2013-03-14 | 2018-03-27 | Crititech, Inc. | Equipment assembly for and method of processing particles |
JP6590203B2 (ja) * | 2015-11-12 | 2019-10-16 | パナソニックIpマネジメント株式会社 | 微粒子製造装置及び微粒子製造方法 |
CN116133743A (zh) * | 2020-09-18 | 2023-05-16 | 黑达乐格瑞菲工业有限公司 | 输送等离子体处理原料的方法和装置 |
GB2598934B (en) * | 2020-09-18 | 2023-10-18 | Haydale Graphene Ind Plc | Method and apparatus for plasma processing |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US706475A (en) * | 1901-10-23 | 1902-08-05 | Eduard Pohl | Method of producing metals in a finely-divided state. |
US2885201A (en) * | 1956-08-14 | 1959-05-05 | Sydney T Evenstad | Cooled sinter grate |
US4423303A (en) * | 1980-05-06 | 1983-12-27 | Tokyo Shibaura Denki Kabushiki Kaisha | Apparatus for treating powdery materials utilizing microwave plasma |
US4734551A (en) * | 1986-01-10 | 1988-03-29 | Plasma Energy Corporation | Method and apparatus for heating molten steel utilizing a plasma arc torch |
-
1987
- 1987-01-27 JP JP1987009300U patent/JPH059075Y2/ja not_active Expired - Lifetime
-
1989
- 1989-04-11 US US07/336,560 patent/US4881722A/en not_active Expired - Fee Related
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2011157257A (ja) * | 2010-02-01 | 2011-08-18 | Samsung Electro-Mechanics Co Ltd | ナノ粒子合成装置及びこれを用いたナノ粒子合成方法 |
US10562797B2 (en) | 2017-03-08 | 2020-02-18 | Panasonic Intellectual Property Management Co., Ltd. | Liquid treatment apparatus including flow channel, first and second electrodes, insulator surrounding lateral surface of first electrode, gas supply device, and power supply source |
Also Published As
Publication number | Publication date |
---|---|
JPH059075Y2 (ja) | 1993-03-05 |
US4881722A (en) | 1989-11-21 |
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