JPS6311741B2 - - Google Patents

Info

Publication number
JPS6311741B2
JPS6311741B2 JP55063889A JP6388980A JPS6311741B2 JP S6311741 B2 JPS6311741 B2 JP S6311741B2 JP 55063889 A JP55063889 A JP 55063889A JP 6388980 A JP6388980 A JP 6388980A JP S6311741 B2 JPS6311741 B2 JP S6311741B2
Authority
JP
Japan
Prior art keywords
permanent magnet
magnetic
ion
polarity
ion source
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP55063889A
Other languages
English (en)
Japanese (ja)
Other versions
JPS56160743A (en
Inventor
Mitsuharu Uo
Tokuhiro Oobiki
Akihiko Sasaki
Hidetomo Nishimura
Tadashi Sato
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP6388980A priority Critical patent/JPS56160743A/ja
Publication of JPS56160743A publication Critical patent/JPS56160743A/ja
Publication of JPS6311741B2 publication Critical patent/JPS6311741B2/ja
Granted legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00Ion beam tubes
    • H01J27/02Ion sources; Ion guns

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Plasma Technology (AREA)
  • Electron Sources, Ion Sources (AREA)
JP6388980A 1980-05-16 1980-05-16 Ion source Granted JPS56160743A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6388980A JPS56160743A (en) 1980-05-16 1980-05-16 Ion source

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6388980A JPS56160743A (en) 1980-05-16 1980-05-16 Ion source

Publications (2)

Publication Number Publication Date
JPS56160743A JPS56160743A (en) 1981-12-10
JPS6311741B2 true JPS6311741B2 (ko) 1988-03-15

Family

ID=13242304

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6388980A Granted JPS56160743A (en) 1980-05-16 1980-05-16 Ion source

Country Status (1)

Country Link
JP (1) JPS56160743A (ko)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6166869A (ja) * 1984-09-11 1986-04-05 Toshiba Corp Rf型イオン・エンジン

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS539993A (en) * 1976-07-15 1978-01-28 Toshiba Corp Ion producing device

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS539993A (en) * 1976-07-15 1978-01-28 Toshiba Corp Ion producing device

Also Published As

Publication number Publication date
JPS56160743A (en) 1981-12-10

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