JPS63117049U - - Google Patents

Info

Publication number
JPS63117049U
JPS63117049U JP725787U JP725787U JPS63117049U JP S63117049 U JPS63117049 U JP S63117049U JP 725787 U JP725787 U JP 725787U JP 725787 U JP725787 U JP 725787U JP S63117049 U JPS63117049 U JP S63117049U
Authority
JP
Japan
Prior art keywords
magnetic pole
pole piece
cylindrical member
electron beam
movable
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP725787U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0518840Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP725787U priority Critical patent/JPH0518840Y2/ja
Publication of JPS63117049U publication Critical patent/JPS63117049U/ja
Application granted granted Critical
Publication of JPH0518840Y2 publication Critical patent/JPH0518840Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP725787U 1987-01-21 1987-01-21 Expired - Lifetime JPH0518840Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP725787U JPH0518840Y2 (enrdf_load_stackoverflow) 1987-01-21 1987-01-21

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP725787U JPH0518840Y2 (enrdf_load_stackoverflow) 1987-01-21 1987-01-21

Publications (2)

Publication Number Publication Date
JPS63117049U true JPS63117049U (enrdf_load_stackoverflow) 1988-07-28
JPH0518840Y2 JPH0518840Y2 (enrdf_load_stackoverflow) 1993-05-19

Family

ID=30790544

Family Applications (1)

Application Number Title Priority Date Filing Date
JP725787U Expired - Lifetime JPH0518840Y2 (enrdf_load_stackoverflow) 1987-01-21 1987-01-21

Country Status (1)

Country Link
JP (1) JPH0518840Y2 (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2018179115A1 (ja) * 2017-03-29 2018-10-04 株式会社 日立ハイテクノロジーズ 荷電粒子線装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2018179115A1 (ja) * 2017-03-29 2018-10-04 株式会社 日立ハイテクノロジーズ 荷電粒子線装置
JPWO2018179115A1 (ja) * 2017-03-29 2020-01-16 株式会社日立ハイテクノロジーズ 荷電粒子線装置
US10886101B2 (en) 2017-03-29 2021-01-05 Hitachi High-Tech Corporation Charged particle beam device

Also Published As

Publication number Publication date
JPH0518840Y2 (enrdf_load_stackoverflow) 1993-05-19

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