JPS63116037A - クリーンルームシステム用ユニット - Google Patents

クリーンルームシステム用ユニット

Info

Publication number
JPS63116037A
JPS63116037A JP26119386A JP26119386A JPS63116037A JP S63116037 A JPS63116037 A JP S63116037A JP 26119386 A JP26119386 A JP 26119386A JP 26119386 A JP26119386 A JP 26119386A JP S63116037 A JPS63116037 A JP S63116037A
Authority
JP
Japan
Prior art keywords
cold water
unit
air conditioning
pipes
clean room
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP26119386A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0362977B2 (enrdf_load_stackoverflow
Inventor
Shoji Hirayama
捷二 平山
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hirayama Setsubi KK
Original Assignee
Hirayama Setsubi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hirayama Setsubi KK filed Critical Hirayama Setsubi KK
Priority to JP26119386A priority Critical patent/JPS63116037A/ja
Publication of JPS63116037A publication Critical patent/JPS63116037A/ja
Publication of JPH0362977B2 publication Critical patent/JPH0362977B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Ventilation (AREA)
JP26119386A 1986-11-03 1986-11-03 クリーンルームシステム用ユニット Granted JPS63116037A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP26119386A JPS63116037A (ja) 1986-11-03 1986-11-03 クリーンルームシステム用ユニット

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP26119386A JPS63116037A (ja) 1986-11-03 1986-11-03 クリーンルームシステム用ユニット

Publications (2)

Publication Number Publication Date
JPS63116037A true JPS63116037A (ja) 1988-05-20
JPH0362977B2 JPH0362977B2 (enrdf_load_stackoverflow) 1991-09-27

Family

ID=17358435

Family Applications (1)

Application Number Title Priority Date Filing Date
JP26119386A Granted JPS63116037A (ja) 1986-11-03 1986-11-03 クリーンルームシステム用ユニット

Country Status (1)

Country Link
JP (1) JPS63116037A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03117840A (ja) * 1989-09-29 1991-05-20 S B Plant:Kk クリーンルーム
WO2024166344A1 (ja) * 2023-02-10 2024-08-15 日立グローバルライフソリューションズ株式会社 クリーンルーム施設

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61243238A (ja) * 1985-04-18 1986-10-29 Matsushita Seiko Co Ltd 空気清浄装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61243238A (ja) * 1985-04-18 1986-10-29 Matsushita Seiko Co Ltd 空気清浄装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03117840A (ja) * 1989-09-29 1991-05-20 S B Plant:Kk クリーンルーム
WO2024166344A1 (ja) * 2023-02-10 2024-08-15 日立グローバルライフソリューションズ株式会社 クリーンルーム施設

Also Published As

Publication number Publication date
JPH0362977B2 (enrdf_load_stackoverflow) 1991-09-27

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees