JPS63115221U - - Google Patents
Info
- Publication number
- JPS63115221U JPS63115221U JP726787U JP726787U JPS63115221U JP S63115221 U JPS63115221 U JP S63115221U JP 726787 U JP726787 U JP 726787U JP 726787 U JP726787 U JP 726787U JP S63115221 U JPS63115221 U JP S63115221U
- Authority
- JP
- Japan
- Prior art keywords
- section
- wafer
- test
- carrier
- processing chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001514 detection method Methods 0.000 claims description 7
- 239000000428 dust Substances 0.000 claims description 4
- 238000004140 cleaning Methods 0.000 claims description 3
- 230000003749 cleanliness Effects 0.000 claims description 3
- 238000004519 manufacturing process Methods 0.000 claims description 2
- 239000004065 semiconductor Substances 0.000 claims description 2
- 235000012431 wafers Nutrition 0.000 claims 6
- 238000005406 washing Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 4
Landscapes
- Sampling And Sample Adjustment (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP726787U JPS63115221U (de) | 1987-01-20 | 1987-01-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP726787U JPS63115221U (de) | 1987-01-20 | 1987-01-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63115221U true JPS63115221U (de) | 1988-07-25 |
Family
ID=30790559
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP726787U Pending JPS63115221U (de) | 1987-01-20 | 1987-01-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63115221U (de) |
-
1987
- 1987-01-20 JP JP726787U patent/JPS63115221U/ja active Pending
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