JPS6295712U - - Google Patents
Info
- Publication number
- JPS6295712U JPS6295712U JP18713885U JP18713885U JPS6295712U JP S6295712 U JPS6295712 U JP S6295712U JP 18713885 U JP18713885 U JP 18713885U JP 18713885 U JP18713885 U JP 18713885U JP S6295712 U JPS6295712 U JP S6295712U
- Authority
- JP
- Japan
- Prior art keywords
- hood
- manufacturing equipment
- semiconductor manufacturing
- blower fan
- platform
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004140 cleaning Methods 0.000 claims description 5
- 239000004065 semiconductor Substances 0.000 claims description 5
- 238000004519 manufacturing process Methods 0.000 claims 3
- 230000032258 transport Effects 0.000 claims 1
- 235000012431 wafers Nutrition 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Cleaning In General (AREA)
- Prevention Of Fouling (AREA)
- Warehouses Or Storage Devices (AREA)
- Filtering Of Dispersed Particles In Gases (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18713885U JPS6295712U (de) | 1985-12-04 | 1985-12-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18713885U JPS6295712U (de) | 1985-12-04 | 1985-12-04 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6295712U true JPS6295712U (de) | 1987-06-18 |
Family
ID=31137334
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18713885U Pending JPS6295712U (de) | 1985-12-04 | 1985-12-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6295712U (de) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111664106A (zh) * | 2019-03-08 | 2020-09-15 | 北京北方华创微电子装备有限公司 | 风机控制方法及风机控制装置 |
-
1985
- 1985-12-04 JP JP18713885U patent/JPS6295712U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111664106A (zh) * | 2019-03-08 | 2020-09-15 | 北京北方华创微电子装备有限公司 | 风机控制方法及风机控制装置 |