JPS63200326U - - Google Patents
Info
- Publication number
- JPS63200326U JPS63200326U JP9056487U JP9056487U JPS63200326U JP S63200326 U JPS63200326 U JP S63200326U JP 9056487 U JP9056487 U JP 9056487U JP 9056487 U JP9056487 U JP 9056487U JP S63200326 U JPS63200326 U JP S63200326U
- Authority
- JP
- Japan
- Prior art keywords
- sensor
- semiconductor device
- device manufacturing
- wafer
- vapor deposition
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001505 atmospheric-pressure chemical vapour deposition Methods 0.000 claims description 3
- 238000004519 manufacturing process Methods 0.000 claims 2
- 239000004065 semiconductor Substances 0.000 claims 2
- 230000032258 transport Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9056487U JPS63200326U (de) | 1987-06-12 | 1987-06-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9056487U JPS63200326U (de) | 1987-06-12 | 1987-06-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63200326U true JPS63200326U (de) | 1988-12-23 |
Family
ID=30950545
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9056487U Pending JPS63200326U (de) | 1987-06-12 | 1987-06-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63200326U (de) |
-
1987
- 1987-06-12 JP JP9056487U patent/JPS63200326U/ja active Pending