JPS63115062U - - Google Patents
Info
- Publication number
- JPS63115062U JPS63115062U JP529187U JP529187U JPS63115062U JP S63115062 U JPS63115062 U JP S63115062U JP 529187 U JP529187 U JP 529187U JP 529187 U JP529187 U JP 529187U JP S63115062 U JPS63115062 U JP S63115062U
- Authority
- JP
- Japan
- Prior art keywords
- vacuum chamber
- inner tube
- tube
- shaped
- material supplied
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000008020 evaporation Effects 0.000 claims description 3
- 238000001704 evaporation Methods 0.000 claims description 3
- 239000002994 raw material Substances 0.000 claims description 3
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 claims description 2
- 229910052753 mercury Inorganic materials 0.000 claims description 2
- 239000003507 refrigerant Substances 0.000 claims description 2
- 239000000758 substrate Substances 0.000 claims description 2
- 239000010409 thin film Substances 0.000 claims description 2
- 230000008021 deposition Effects 0.000 claims 2
- 238000010438 heat treatment Methods 0.000 claims 1
- 239000000463 material Substances 0.000 claims 1
- 230000008018 melting Effects 0.000 claims 1
- 238000002844 melting Methods 0.000 claims 1
- 238000007740 vapor deposition Methods 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Description
第１図は本考案に係る真空薄膜装置の一部を切
り欠いて示す模式的正面図である。
１１……蒸着ボート、１４……サブストレート
、２０……Ｕ字管、２１……内管、２２……外管
、２３……水銀、２５……冷媒、３１……原料巻
リール、３２……針金状蒸着原料。
FIG. 1 is a schematic front view showing a partially cut away vacuum thin film apparatus according to the present invention. 11... Evaporation boat, 14... Substrate, 20... U-shaped tube, 21... Inner tube, 22... Outer tube, 23... Mercury, 25... Refrigerant, 31... Raw material winding reel, 32... ...Wire-like vapor deposition raw material.
Claims (1)
原料を加熱溶融して発生する蒸気をサブストレー
トに蒸着させる装置において、両端が開口された
内管と、両端が閉塞された外管とを二重構造に形
成してなり真空室の側壁を挟むようにして設けて
あるＵ字管と、前記内管に充填してある水銀と、
この内管を通して真空室外から前記蒸着ボートに
供給される針金状蒸着原料と、前記外管内に供給
される冷媒とを具備したことを特徴とする真空薄
膜装置。 In a device that evaporates vapor generated by heating and melting the evaporation raw material supplied to a evaporation boat installed in a vacuum chamber onto a substrate, an inner tube with both ends open and an outer tube with both ends closed are used. A U-shaped tube formed into a structure and provided so as to sandwich the side wall of the vacuum chamber, and mercury filled in the inner tube,
A vacuum thin film apparatus comprising: a wire-shaped deposition material supplied to the deposition boat from outside the vacuum chamber through the inner tube; and a refrigerant supplied into the outer tube.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP529187U JPS63115062U (en) | 1987-01-16 | 1987-01-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP529187U JPS63115062U (en) | 1987-01-16 | 1987-01-16 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63115062U true JPS63115062U (en) | 1988-07-25 |
Family
ID=30786736
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP529187U Pending JPS63115062U (en) | 1987-01-16 | 1987-01-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63115062U (en) |
-
1987
- 1987-01-16 JP JP529187U patent/JPS63115062U/ja active Pending
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