JPS5580243A - Method for manufacturing storage mesh target of storage tube - Google Patents
Method for manufacturing storage mesh target of storage tubeInfo
- Publication number
- JPS5580243A JPS5580243A JP15439378A JP15439378A JPS5580243A JP S5580243 A JPS5580243 A JP S5580243A JP 15439378 A JP15439378 A JP 15439378A JP 15439378 A JP15439378 A JP 15439378A JP S5580243 A JPS5580243 A JP S5580243A
- Authority
- JP
- Japan
- Prior art keywords
- storage
- mesh electrode
- mesh
- manufacturing
- metallic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Physical Vapour Deposition (AREA)
Abstract
PURPOSE: To form a uniform film of a insulating material over the surface of a metallic mesh by the vacuum evaporation by turning either the mesh electrode or an evaporating heater or both of them.
CONSTITUTION: A mesh electrode is formed by expanding a metallic mesh 32 and welding the same to an annular metallic holder 31 and set on a rotary mesh electrode holder 38 having an axis of turning coincident with the center line of a heating and evaporating port 36. The rotary mesh electrode holder 38 is turned by a motor 4 provided inside or outside of a vacuum vessel through a pulley 39.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15439378A JPS5580243A (en) | 1978-12-13 | 1978-12-13 | Method for manufacturing storage mesh target of storage tube |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15439378A JPS5580243A (en) | 1978-12-13 | 1978-12-13 | Method for manufacturing storage mesh target of storage tube |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5580243A true JPS5580243A (en) | 1980-06-17 |
Family
ID=15583150
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP15439378A Pending JPS5580243A (en) | 1978-12-13 | 1978-12-13 | Method for manufacturing storage mesh target of storage tube |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5580243A (en) |
-
1978
- 1978-12-13 JP JP15439378A patent/JPS5580243A/en active Pending
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