JPS5580243A - Method for manufacturing storage mesh target of storage tube - Google Patents

Method for manufacturing storage mesh target of storage tube

Info

Publication number
JPS5580243A
JPS5580243A JP15439378A JP15439378A JPS5580243A JP S5580243 A JPS5580243 A JP S5580243A JP 15439378 A JP15439378 A JP 15439378A JP 15439378 A JP15439378 A JP 15439378A JP S5580243 A JPS5580243 A JP S5580243A
Authority
JP
Japan
Prior art keywords
storage
mesh electrode
mesh
manufacturing
metallic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15439378A
Other languages
Japanese (ja)
Inventor
Yasuo Iwasaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP15439378A priority Critical patent/JPS5580243A/en
Publication of JPS5580243A publication Critical patent/JPS5580243A/en
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)

Abstract

PURPOSE: To form a uniform film of a insulating material over the surface of a metallic mesh by the vacuum evaporation by turning either the mesh electrode or an evaporating heater or both of them.
CONSTITUTION: A mesh electrode is formed by expanding a metallic mesh 32 and welding the same to an annular metallic holder 31 and set on a rotary mesh electrode holder 38 having an axis of turning coincident with the center line of a heating and evaporating port 36. The rotary mesh electrode holder 38 is turned by a motor 4 provided inside or outside of a vacuum vessel through a pulley 39.
COPYRIGHT: (C)1980,JPO&Japio
JP15439378A 1978-12-13 1978-12-13 Method for manufacturing storage mesh target of storage tube Pending JPS5580243A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15439378A JPS5580243A (en) 1978-12-13 1978-12-13 Method for manufacturing storage mesh target of storage tube

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15439378A JPS5580243A (en) 1978-12-13 1978-12-13 Method for manufacturing storage mesh target of storage tube

Publications (1)

Publication Number Publication Date
JPS5580243A true JPS5580243A (en) 1980-06-17

Family

ID=15583150

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15439378A Pending JPS5580243A (en) 1978-12-13 1978-12-13 Method for manufacturing storage mesh target of storage tube

Country Status (1)

Country Link
JP (1) JPS5580243A (en)

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