JPS63114021U - - Google Patents
Info
- Publication number
- JPS63114021U JPS63114021U JP654787U JP654787U JPS63114021U JP S63114021 U JPS63114021 U JP S63114021U JP 654787 U JP654787 U JP 654787U JP 654787 U JP654787 U JP 654787U JP S63114021 U JPS63114021 U JP S63114021U
- Authority
- JP
- Japan
- Prior art keywords
- mask
- semiconductor layer
- depositing
- amorphous semiconductor
- thin portion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 3
- 238000000151 deposition Methods 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 230000008021 deposition Effects 0.000 description 1
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
Landscapes
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Description
第１図は本考案の一実施例のアモルフアス半導
体層堆積用マスクを基板にセツトした状態を示す
図、第２図は従来技術を説明するための図である
。 １……基板、２……一体型マスク、３……マス
ク開口部、２１……マスク開口部周縁薄肉部分、
２２……厚肉部分。
体層堆積用マスクを基板にセツトした状態を示す
図、第２図は従来技術を説明するための図である
。 １……基板、２……一体型マスク、３……マス
ク開口部、２１……マスク開口部周縁薄肉部分、
２２……厚肉部分。
Claims (1)
- 【実用新案登録請求の範囲】 アモルフアス半導体層を堆積する際に用いるマ
スクであつて、 比較的板厚の薄く形成されたマスク開口部周縁
薄肉部分と、 上記板厚より厚く、かつ上記薄い部分と一体に
形成された厚肉部分とを備えてなることを特徴と
するアモルフアス半導体層堆積用マスク。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP654787U JPS63114021U (ja) | 1987-01-19 | 1987-01-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP654787U JPS63114021U (ja) | 1987-01-19 | 1987-01-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63114021U true JPS63114021U (ja) | 1988-07-22 |
Family
ID=30789166
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP654787U Pending JPS63114021U (ja) | 1987-01-19 | 1987-01-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63114021U (ja) |
-
1987
- 1987-01-19 JP JP654787U patent/JPS63114021U/ja active Pending