JPS63112331U - - Google Patents
Info
- Publication number
- JPS63112331U JPS63112331U JP370287U JP370287U JPS63112331U JP S63112331 U JPS63112331 U JP S63112331U JP 370287 U JP370287 U JP 370287U JP 370287 U JP370287 U JP 370287U JP S63112331 U JPS63112331 U JP S63112331U
- Authority
- JP
- Japan
- Prior art keywords
- nozzle
- susceptor
- base plate
- varying
- distance
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010438 heat treatment Methods 0.000 claims description 3
- 230000006698 induction Effects 0.000 claims description 2
- 239000012495 reaction gas Substances 0.000 claims description 2
- 238000001947 vapour-phase growth Methods 0.000 claims description 2
- 125000006850 spacer group Chemical group 0.000 description 2
- 239000007789 gas Substances 0.000 description 1
- 238000010926 purge Methods 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 230000002787 reinforcement Effects 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP370287U JPS63112331U (es) | 1987-01-13 | 1987-01-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP370287U JPS63112331U (es) | 1987-01-13 | 1987-01-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63112331U true JPS63112331U (es) | 1988-07-19 |
Family
ID=30783702
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP370287U Pending JPS63112331U (es) | 1987-01-13 | 1987-01-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63112331U (es) |
-
1987
- 1987-01-13 JP JP370287U patent/JPS63112331U/ja active Pending
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