JPS63110672A - 半導体圧力センサの測定方法 - Google Patents

半導体圧力センサの測定方法

Info

Publication number
JPS63110672A
JPS63110672A JP61257977A JP25797786A JPS63110672A JP S63110672 A JPS63110672 A JP S63110672A JP 61257977 A JP61257977 A JP 61257977A JP 25797786 A JP25797786 A JP 25797786A JP S63110672 A JPS63110672 A JP S63110672A
Authority
JP
Japan
Prior art keywords
pressure sensor
semiconductor pressure
diaphragm
wafer
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP61257977A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0413868B2 (enrdf_load_stackoverflow
Inventor
Katsunori Nishiguchi
勝規 西口
Ichiro Sogawa
伊知郎 祖川
Katsuyoshi Sunago
砂子　勝好
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Electric Industries Ltd
Original Assignee
Sumitomo Electric Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Electric Industries Ltd filed Critical Sumitomo Electric Industries Ltd
Priority to JP61257977A priority Critical patent/JPS63110672A/ja
Priority to EP87115355A priority patent/EP0265816B1/en
Priority to DE8787115355T priority patent/DE3772514D1/de
Priority to US07/110,863 priority patent/US4825684A/en
Priority to KR1019870011773A priority patent/KR910001249B1/ko
Priority to CA000550325A priority patent/CA1308933C/en
Priority to AU80186/87A priority patent/AU595945B2/en
Publication of JPS63110672A publication Critical patent/JPS63110672A/ja
Publication of JPH0413868B2 publication Critical patent/JPH0413868B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Measuring Fluid Pressure (AREA)
  • Pressure Sensors (AREA)
JP61257977A 1986-10-28 1986-10-28 半導体圧力センサの測定方法 Granted JPS63110672A (ja)

Priority Applications (7)

Application Number Priority Date Filing Date Title
JP61257977A JPS63110672A (ja) 1986-10-28 1986-10-28 半導体圧力センサの測定方法
EP87115355A EP0265816B1 (en) 1986-10-28 1987-10-20 Method of measuring semiconductor pressure sensor
DE8787115355T DE3772514D1 (de) 1986-10-28 1987-10-20 Messverfahren fuer einen halbleiter-druckmessfuehler.
US07/110,863 US4825684A (en) 1986-10-28 1987-10-21 Method of testing semiconductor pressure sensor
KR1019870011773A KR910001249B1 (ko) 1986-10-28 1987-10-23 반도체압력센서의 측정방법
CA000550325A CA1308933C (en) 1986-10-28 1987-10-27 Method of measuring semiconductor pressure sensor
AU80186/87A AU595945B2 (en) 1986-10-28 1987-10-27 Method of testing semiconductor pressure sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61257977A JPS63110672A (ja) 1986-10-28 1986-10-28 半導体圧力センサの測定方法

Publications (2)

Publication Number Publication Date
JPS63110672A true JPS63110672A (ja) 1988-05-16
JPH0413868B2 JPH0413868B2 (enrdf_load_stackoverflow) 1992-03-11

Family

ID=17313833

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61257977A Granted JPS63110672A (ja) 1986-10-28 1986-10-28 半導体圧力センサの測定方法

Country Status (1)

Country Link
JP (1) JPS63110672A (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5083534A (en) * 1989-04-05 1992-01-28 Mitsubishi Jukogyo Kabushiki Kaisha Spiral spring type starter apparatus for an internal combustion engine
US7525287B2 (en) 2004-10-08 2009-04-28 Husqvarna Zenoah Co., Ltd. Battery pack for driving electric motor of compact engine starting device, engine starting device driven by the battery pack, and manual working machine having the engine starting device
US7849831B2 (en) 2006-02-01 2010-12-14 Husqvarna Zenoah Co., Ltd. Engine start device for manual work machine, having small-sized electric motor, and manual work machine having the start device mounted thereon

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57155742A (en) * 1981-03-23 1982-09-25 Hitachi Ltd Wafer prober
JPS61149316A (ja) * 1984-12-24 1986-07-08 株式会社豊田中央研究所 圧力センサウエハの切断方法

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57155742A (en) * 1981-03-23 1982-09-25 Hitachi Ltd Wafer prober
JPS61149316A (ja) * 1984-12-24 1986-07-08 株式会社豊田中央研究所 圧力センサウエハの切断方法

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5083534A (en) * 1989-04-05 1992-01-28 Mitsubishi Jukogyo Kabushiki Kaisha Spiral spring type starter apparatus for an internal combustion engine
US5113816A (en) * 1989-04-05 1992-05-19 Mitsubishi Jukogyo Kabushiki Kaisha Spiral spring type starter apparatus for an internal combustion engine
US5115773A (en) * 1989-04-05 1992-05-26 Mitsubishi Jukogyo Kabushiki Kaisha Spiral spring type starter apparatus for an internal combustion engine
US5163392A (en) * 1989-04-05 1992-11-17 Mitsubishi Jukogyo Kabushiki Kaisha Spiral spring type starter apparatus for an internal combustion engine
US5186134A (en) * 1989-04-05 1993-02-16 Mitsubishi Jukogyo Kabushiki Kaisha Spiral spring type starter apparatus for an internal combustion engine
US7525287B2 (en) 2004-10-08 2009-04-28 Husqvarna Zenoah Co., Ltd. Battery pack for driving electric motor of compact engine starting device, engine starting device driven by the battery pack, and manual working machine having the engine starting device
US7849831B2 (en) 2006-02-01 2010-12-14 Husqvarna Zenoah Co., Ltd. Engine start device for manual work machine, having small-sized electric motor, and manual work machine having the start device mounted thereon

Also Published As

Publication number Publication date
JPH0413868B2 (enrdf_load_stackoverflow) 1992-03-11

Similar Documents

Publication Publication Date Title
KR910001249B1 (ko) 반도체압력센서의 측정방법
US3918019A (en) Miniature absolute pressure transducer assembly and method
US3909924A (en) Method of fabrication of silicon pressure transducer sensor units
KR20040079323A (ko) 다이어프램을 갖는 반도체 압력 센서
JPH02291838A (ja) ディスポーザブル血圧トランスデューサ
US4809536A (en) Method of adjusting bridge circuit of semiconductor pressure sensor
JPS63110672A (ja) 半導体圧力センサの測定方法
WO1996022515A1 (en) Apparatus for detection of a diaphragm rupture in a pressure sensor
TW200411155A (en) Isolated micro pressure sensor
JPS63110671A (ja) 半導体圧力センサの測定方法
JPS63118629A (ja) 半導体圧力センサのブリツジ回路調整方法
JPH02196938A (ja) 圧力センサ
JPS63118628A (ja) 半導体圧力センサのブリツジ回路調整方法
JPH06323939A (ja) 静電容量式センサ
JPS6156465A (ja) 半導体圧力変換器
JPH01169303A (ja) 歪検出器の製作方法
JPH11237292A (ja) 圧力検出素子及び圧力センサ
JPH0554053B2 (enrdf_load_stackoverflow)
SPOTTS et al. A disposable blood pressure transducer system
JPH11160346A (ja) 半導体加速度センサ及びその製造方法並びに検査方法
Melin et al. Development of a micromachined pressure transducer for biomedical device/tissue interfaces
JPH09250962A (ja) 半導体装置
JPS5655831A (en) Mounting method for pressure-sensor assembly
JPS629243A (ja) 半導体触覚センサ
JPH0394475A (ja) 半導体圧力センサ