JPS63106508A - Method and apparatus for inspecting mounting state - Google Patents

Method and apparatus for inspecting mounting state

Info

Publication number
JPS63106508A
JPS63106508A JP25181186A JP25181186A JPS63106508A JP S63106508 A JPS63106508 A JP S63106508A JP 25181186 A JP25181186 A JP 25181186A JP 25181186 A JP25181186 A JP 25181186A JP S63106508 A JPS63106508 A JP S63106508A
Authority
JP
Japan
Prior art keywords
detected
shadow
image
circuit
pattern
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP25181186A
Other languages
Japanese (ja)
Inventor
Shinichi Uno
宇野 伸一
Mitsuji Inoue
井上 三津二
Junzo Uchida
内田 順三
Hiroshi Tsukada
弘志 塚田
Tadanori Komatsu
小松 忠紀
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP25181186A priority Critical patent/JPS63106508A/en
Publication of JPS63106508A publication Critical patent/JPS63106508A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To certainly inspect the mounting state of an object to be detected, by a method wherein the predetermined object containing the object to be detected is irradiated with light from a diagonally upward side and the side opposite to the object to be detected to generate shades on the side surface of the object to be detected and the side surface thereof on the opposite side thereof and unnecessary information is removed from the image informations obtained by said irradiation to perform the matching of shaded patterns with a standard pattern. CONSTITUTION:A plurality of circuit parts 3a-3d are mounted to the required places of a circuit substrate 1 having a required pattern 2 formed thereon. An image pickup camera 6 is arranged above the board 1 and the predetermined region of the board 1 present within the visual field of the camera 6 is separately irradiated with the lights from light irradiation devices 7a, 7b arranged at diagonally upward parts on both sides of the camera 6. The image informations picked up by the camera 6 are converted by an A/D converter circuit 9 to be respectively recorded on the first and second image memories 10a, 10b. The difference between the image informations of the memories 10a, 10b on the same coordinates is calculated by a subtractor circuit 11 and the matching of the shaded patterns of the image informations with a preset standard pattern is taken by a pattern matching circuit 13 inputting the output from a binarization circuit 12 to inspect the mounting state of the parts 3a-3d.

Description

【発明の詳細な説明】 〔発明の目的〕 (産業上の利用分野) 本発明は、回路基板に装着された電子部品々どの検出物
体の有無や位置ずれ表どの装着状態を検出する装着状態
検査方法及びその装置に関する。
[Detailed Description of the Invention] [Object of the Invention] (Industrial Application Field) The present invention is a mounting state inspection that detects the presence or absence of detection objects such as electronic components mounted on a circuit board, and the mounting state such as a positional deviation chart. The present invention relates to a method and an apparatus thereof.

(従来の技術) 近時、電子機器の紅薄短小化にともない、回路部品の実
装も高密度化の方向にある。また、電子部品の実装の自
動化、高速化は、かなり進んできたが、実装後の検査は
、いぜん人に依存している。これは、被検出物が複雑な
背景下(例えば、回路基板でいえば、配線パターン、印
刷、文字の中に混在)にあり、従来の考え方、やり方で
は、検出できないことによる。また、高密度化により、
従来の人間の検査の信頼性の低下、疲労の増大も問題化
している。
(Prior Art) In recent years, as electronic devices have become thinner, thinner, and smaller, the mounting density of circuit components has also become higher. Further, although considerable progress has been made in automating and speeding up the mounting of electronic components, post-mounting inspections still rely on humans. This is because the object to be detected is in a complex background (for example, in the case of a circuit board, it is mixed in wiring patterns, prints, and characters) and cannot be detected using conventional thinking and methods. In addition, due to high density,
Decreased reliability and increased fatigue in conventional human testing are also becoming problems.

(発明が解決しようとする間m点) 本発明は、近時ますます高密度化している回路部品の実
装状態の検査精度及び検査能率に問題があることを顧慮
してなされたもので、所要の被検出物体の装着状態を確
実に検査することのできる装着状態検査方法及びその装
置を提供することを目的とする。
(Point m during which the invention attempts to solve the problem) The present invention was made in consideration of the problems with the inspection accuracy and inspection efficiency of the mounting state of circuit components, which are becoming increasingly dense in recent years. An object of the present invention is to provide a mounting state inspection method and apparatus that can reliably inspect the mounting state of a detected object.

〔発明の構成〕[Structure of the invention]

(問題点を解決するための手段と作用)被検出物を含む
所定領域を撮像して得られる画像情報を処理して、上記
被検出物体を認識する方法および装置において、上記所
定領域に斜め上方から光を照射して上記被検出物体の側
方にその影を発生させて所定領域を撮像したのち、上記
光照射とは反対の斜め上方から、上記所定領域に、光を
照射して、上記形とは逆方向に上記被検出物体の側方に
その影を発生させて所定領域を撮像し、これらの撮像に
より、得られる画像情報を処理して、各画像情報中の影
部分の画像情報を得、さらにこの影部分の画像情報を投
影処理して得られる投影情報に基づいて、あらかじめ設
定されている標準画像データとのパターンマツチングを
行うことによ抄上上被検出物体を認識することにより、
所要の被検出物体の装着状態を確実に検食できるように
したものである。
(Means and effects for solving the problem) In the method and apparatus for recognizing the detected object by processing image information obtained by imaging a predetermined area including the detected object, After irradiating light from above to generate a shadow on the side of the object to be detected to image a predetermined area, irradiating light onto the predetermined area from diagonally above, opposite to the above-mentioned light irradiation, to A shadow is generated on the side of the object to be detected in the opposite direction to the shape, and a predetermined area is imaged, and the image information obtained from these images is processed to obtain image information of the shadow part in each image information. Then, based on the projection information obtained by projecting the image information of this shadow area, pattern matching is performed with preset standard image data to recognize the detected object on the abstract. By this,
It is possible to reliably inspect the attachment state of the required object to be detected.

(発明の実施例) 以下、図面を参照してこの発明の一実施例の装着状態検
査装置に基づいて説明する0第1図にこの発明の一実施
例である回路基板に取付けられた部品を認識する装着状
態検査装置の構成を示す。この図面に示すように、回路
基板(1)は、その板面上に所要の配線パターン(2)
が形成され、その所要部分に複数種類の回路部品(3a
) −(3d)が取付けられている。しかして、との装
置は、上記回路基板(1)上に配置されて、この回路基
板(1)と対向する前面部に光学レンズ(5)が取付け
られた撮像カメラ(6)を有17、その両側方に、この
撮像カメラ(6)の視野内にある回路基板(1)の所定
領域に斜め上方から各別に光を照射する一対の光照射装
置(7a)、 (7b)が設けられている。上記撮像カ
メラ(6)には、上記光照射装置(7a)または(7b
)の光照射のもとで、上記所定領域を撮像して得られる
画像情報をその輝度レベルに応じてA/D変換する人/
D変換回路(9)が接続され、この人/D変換回路(9
)には、人/D変換された画像情報を記憶する第1.第
2画像メモリ(10a)、 (10b)が接続されてい
る。この一対の画像メモリ(10a)、 (10b)の
うち、第1画像メモリ(10a)は、光照射装置(7a
)の光照射のもとで撮像された画像情報を記憶するメモ
リでちゃ、第2画像メモリ(10b)は、光照射装置(
7b)の光照射のもとで撮像された画像情報を記憶する
メモリである。これら第1.第2画像メモリ(ioa)
、 (tab)には、これら画像メモリ(ioa)、 
(iob)に記憶された画像情報について、同一座標上
の信号の差を算出する減算回路(11)が接続され、さ
らにこの減算回路(11)には、順次、2値化回路(1
3およびとの2値化回路α2により2値化された信号と
予め設定された部品の標準画像データとのマツチングを
行なうパターンマツチング回路(13が接続されている
。そして、このパターンマツチング回路0謙には、この
パターンマツチング回路α■から得られるマツチング量
を演算処理するとともに、前記光照射装置(7a)、 
(7b)の光照射切換えを照明切換え回動作のタイミン
グを、タイミング回路(1つを介して制御する演算制御
回路1eが接続されている。なお、上記パターンマツチ
ングの演算処理結果は、この演算制御回路+if9に接
続されたプリンタなどからなる表示装置へηに表示され
るようになっている。
(Embodiments of the Invention) Hereinafter, an explanation will be given based on a mounting condition inspection device according to an embodiment of the present invention with reference to the drawings. Fig. 1 shows parts attached to a circuit board which is an embodiment of the present invention. The configuration of the recognition wearing state inspection device is shown. As shown in this drawing, a circuit board (1) has a required wiring pattern (2) on its board surface.
is formed, and multiple types of circuit components (3a
) -(3d) is attached. Accordingly, the device includes an imaging camera (6) placed on the circuit board (1) and having an optical lens (5) attached to the front face facing the circuit board (1) 17; A pair of light irradiation devices (7a) and (7b) are provided on both sides of the camera to separately irradiate light from diagonally above to predetermined areas of the circuit board (1) within the field of view of the imaging camera (6). There is. The imaging camera (6) is equipped with the light irradiation device (7a) or (7b).
) A/
The D conversion circuit (9) is connected, and this person/D conversion circuit (9)
) stores the human/D-converted image information. Second image memories (10a) and (10b) are connected. Of the pair of image memories (10a) and (10b), the first image memory (10a) is the light irradiation device (7a).
), the second image memory (10b) is a memory that stores image information captured under light irradiation of the light irradiation device (
7b) is a memory that stores image information captured under the light irradiation. These first. 2nd image memory (ioa)
, (tab) contains these image memories (ioa),
A subtraction circuit (11) that calculates the difference between signals on the same coordinates is connected to the image information stored in the (iob), and this subtraction circuit (11) is sequentially connected to a binarization circuit (1
A pattern matching circuit (to which 13 is connected) performs matching of the signal binarized by the binarization circuit α2 of 3 and 2 with preset standard image data of the component. In addition to calculating the matching amount obtained from the pattern matching circuit α■, the light irradiation device (7a),
An arithmetic control circuit 1e is connected which controls the timing of the light irradiation switching operation (7b) through a timing circuit (one).The arithmetic processing result of the pattern matching described above is The information is displayed at η on a display device such as a printer connected to the control circuit +if9.

つぎに、上記構成の装着状態検査装置によるこの実施例
の装着状態検査方法について述べる。
Next, a method for inspecting the wearing condition of this embodiment using the wearing condition inspection apparatus having the above-mentioned configuration will be described.

まず、回路基板(1)または撮像カメラ(6)と一対の
光照射装e (7a)、 (7b)を一体的に移動して
、撮像カメラ(6)を回路基板(1)の所定領域上、す
カわち、たとえば第1図に示したように、回路基板(1
)のほぼ中央部に位置する回路部品(3a)を含む領域
上に位置決めする。しかるのち、演算制御回路(1eか
らの指令により、まず光照射装置(7a)を点灯して上
記所定領域を光照射し、その照射領域を撮像カメラ(6
)により撮像する。そしてこの撮像により得られた画像
情報を人/D変換回路(9)を介して第1画像メモIJ
 (10a)に記憶する0つぎに、上記演算制御回路(
leかららの指令により、光照射装置(7a)。
First, the circuit board (1) or the imaging camera (6) and the pair of light irradiation devices e (7a), (7b) are moved together, and the imaging camera (6) is placed over a predetermined area of the circuit board (1). , that is, for example, as shown in FIG.
) is positioned on the area including the circuit component (3a) located approximately in the center of the area. Then, in response to a command from the arithmetic and control circuit (1e), the light irradiation device (7a) is first turned on to irradiate the predetermined area with light, and the irradiation area is illuminated by the imaging camera (6).
). The image information obtained by this imaging is sent to the first image memo IJ via the human/D conversion circuit (9).
(10a) Next, the arithmetic control circuit (
Light irradiation device (7a) according to instructions from le.

(7b)の点灯を切換えて、光照射装置(7b)により
上記光照射装置(7a)の照射領域と同一領域を照射し
て、上記同様にこの照射領域を撮像する0そしてこの撮
像により得られた画像情報をλ/D変換回路(9)を介
して第1画像メモリJ (10b)に記憶する。
(7b), the light irradiation device (7b) irradiates the same area as the irradiation area of the light irradiation device (7a), and images this irradiation area in the same manner as above. The obtained image information is stored in the first image memory J (10b) via the λ/D conversion circuit (9).

ところで、上記のように所定領域の斜め上方に位置する
光照射装置(7a)から照射すると、第2図(A)図に
示すように、回路基板(1)に突出している回路部品(
3a)は、光照射の反対側の側面に、その突出高さに応
じた影(20a)を生ずる。したがって撮像カメラ(6
)は、この影(20a)を含む画像を撮像するので、第
1画像メモリ(10a)には、この影(20a)を含む
画像情報が記憶される。同様に、光照射装置(7b)か
ら同一領域を光照射すると、光照射装置(7a)の反対
側に配設されているこの光照射装置(7b)に対しては
、第2図(ト))図に示すように、反対方向側面に同様
の影(20b)を生じ、撮像カメラ(6)を介して第2
画像メモリ(iob)には、この影(20b)を含む画
像情報が記憶される。そこで、この第1.第2画像メモ
リ(10a)、 (10b)に記憶された画像情報を減
算回路(11)に呼出して、同一座標の信号ごとにそれ
らの差を算出し、さらに2値化回路LDで適当ましきい
値で2値化すると、第3図(A)図に示すように、回路
部品(3a) 、基板素地、配線パターン(2)などの
画像データを「0」、影(20a) 、 (20b)部
分の画像データを「1」とする画像情報(財)が得られ
る0しかして、パターンマツチング回路0階にては、あ
らかじめ、準備していた部品の影に相当する標準パター
ン+23 (第3図(B)参照)と、画像情報C2υと
のパターンマツチング、す々わち、画像情報Cυ内の定
められたエリア内を、XYそれぞれの方向に1画素ずつ
標準パターン@を移動し、もつとも両者が一致する場所
のX、Y座標を求める。かくしてこのパターンマツチン
グで求められたXY座標を演算制御回路C1eにおいて
演算処理することにより、被検出物体である回路部品(
3a)の有無2位置ずれ、傾き2部品ちがいなどを認識
することができる。
By the way, when the light is irradiated from the light irradiation device (7a) located diagonally above the predetermined area as described above, as shown in FIG.
3a) produces a shadow (20a) on the side opposite to the light irradiation according to its protruding height. Therefore, the imaging camera (6
) captures an image including this shadow (20a), so image information including this shadow (20a) is stored in the first image memory (10a). Similarly, when the same area is irradiated with light from the light irradiation device (7b), the light irradiation device (7b) disposed on the opposite side of the light irradiation device (7a) will be affected as shown in FIG. ) As shown in the figure, a similar shadow (20b) is produced on the opposite side, and a second
Image information including this shadow (20b) is stored in the image memory (iob). So, this first one. The image information stored in the second image memories (10a) and (10b) is called to the subtraction circuit (11), and the difference between them is calculated for each signal at the same coordinates. When the values are binarized, as shown in Figure 3 (A), the image data of the circuit component (3a), the substrate material, the wiring pattern (2), etc. are converted to "0", the shadows (20a), (20b), etc. However, on the 0th floor of the pattern matching circuit, the standard pattern corresponding to the shadow of the part prepared in advance + 23 (3rd (see figure (B)) and image information C2υ, that is, the standard pattern @ is moved one pixel in each of the X and Y directions within a predetermined area within the image information Cυ. Find the X and Y coordinates of the location where both match. By processing the XY coordinates obtained by this pattern matching in the arithmetic control circuit C1e, the circuit component (
It is possible to recognize the presence or absence of 3a), the positional shift of two parts, the difference in the inclination of two parts, etc.

つぎに他の実施例について述べる。Next, other embodiments will be described.

上記実施例では、減算回路から得られる画像情報を処理
するに際し、これを2値化したが、これを濃淡レベルを
もつデジタル信号のまま処理することも可9目である。
In the above embodiment, when processing the image information obtained from the subtraction circuit, the image information is binarized, but it is also possible to process the image information as a digital signal having gray levels.

また、上記実施例では、一対の光照射装置を用いて所定
領域を切換え照射するようにしたが、この光照射装置は
、異なる方向に影を生ずるものであればよく、特に2個
に限定されるものでは々い。また、上記実施例では、撮
像カメラから得られる画像情報を一旦、第1および第2
画像メモリに記憶したが、特にあとから得られる画像情
報は、画像メモリに記憶することなく、これをリアルタ
イムで減算回路に送出して、画像メモリに記憶した先の
r!ii像情報との差を算出するようにしてもよい。ま
た、標準パターンは、影の一部だけ、あるいは部品の一
部だけ、または、影と部品を組合せたものを用いてもよ
い。あるいは、標準パターンとして、第3図(C)に示
すように部品そのものの形状を示す標準パターン時を使
用してもよい。
Further, in the above embodiment, a pair of light irradiation devices are used to selectively irradiate a predetermined area, but the number of light irradiation devices may be limited to two as long as they produce shadows in different directions. There are many things that can be done. Further, in the above embodiment, the image information obtained from the imaging camera is once transferred to the first and second cameras.
Although the image information was stored in the image memory, especially image information obtained later is not stored in the image memory, but is sent to the subtraction circuit in real time, and the r! ii image information may be calculated. Furthermore, the standard pattern may be a part of the shadow, a part of the part, or a combination of the shadow and the part. Alternatively, a standard pattern showing the shape of the component itself as shown in FIG. 3(C) may be used as the standard pattern.

なお、上記実施例は、回路基板における回路部品の認識
について説明したが、この発明は、それ以外の被検出物
体の認識にも適用できる。
Although the above embodiment describes recognition of circuit components on a circuit board, the present invention can also be applied to recognition of other detected objects.

〔発明の効果〕〔Effect of the invention〕

被検出物体を含む所定領域に缶め上方から光を照射して
被検出物体の側方に影を発生させるようにし、さらにこ
の光照射の反対側から光を照射して、被検出物体の反対
側の側方に影を発生させるようにして、これら2種類の
照明のもとに得られる2つの画像情報を用いて、不要な
情報を削除するようにしたのち標準パターンとのパター
ンマッチグを行うようにしたので、目的とする被検出物
体の装着状態を確実に検査することができる。
A predetermined area including the object to be detected is irradiated with light from above the can to generate a shadow on the side of the object to be detected, and then light is irradiated from the opposite side of the irradiation of light to create a shadow on the side of the object to be detected. After creating a shadow on the side of the image and using the two image information obtained under these two types of illumination to delete unnecessary information, pattern matching with the standard pattern was performed. Since this is done, it is possible to reliably inspect the attachment state of the target object to be detected.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図はこの発明の一実施例認識装着状態検査装置の構
成を示す図、第2図および第3図はこの発明の一実施例
の装着状態検査方法の説明図である0 (1)・・・回路基板、  (3a)〜(3d)・・・
回路部品(被検出物体)。 (6)・・・撮像カメラ(撮像手段) 、  (7a)
、 (7b)・・・光照射装置(照明手段)、αυ・・
・減算回路(影抽出手段)。 (13・・・パターンマツチング回路(手段)。 (20a)、 (20b) −・・回路部品の影。 四・・・影の標準パターン、@・・・部品の標準パター
ン。
FIG. 1 is a diagram showing the configuration of a recognition wearing state inspection device according to an embodiment of the present invention, and FIGS. 2 and 3 are explanatory diagrams of a mounting state inspection method according to an embodiment of the present invention. ...Circuit board, (3a) to (3d)...
Circuit components (object to be detected). (6)...Imaging camera (imaging means), (7a)
, (7b)...Light irradiation device (illumination means), αυ...
- Subtraction circuit (shadow extraction means). (13... Pattern matching circuit (means). (20a), (20b) -... Shadow of circuit component. 4... Standard pattern of shadow, @... Standard pattern of component.

Claims (2)

【特許請求の範囲】[Claims] (1)被検出物体が装着された所定領域に斜め上方から
光を照射して上記被検出物体の側方にこの被検出物体の
影を発生させて上記所定領域を撮像する第1工程と、上
記光照射とは反対の斜め上方から上記所定領域に光を照
射して上記影とは逆方向に上記被検出物体の側方にこの
被検出物体の影を発生させて上記所定領域を撮像する第
2工程と、これら第1及び第2工程にて得られる画像情
報について同一座標上での差を算出して上記被検出物体
の影情報を抽出する第3工程と、上記影情報が示す影パ
ターンとあらかじめ設定されている標準パターンとのパ
ターンマッチング処理を行うことにより上記被検出物体
の装着位置を求めこの求められた装着位置に基づいて上
記被検出物体の装着状態を検出する第4工程とを有する
ことを特徴とする装着状態検査方法。
(1) A first step of irradiating light from diagonally above onto a predetermined region on which a detected object is attached to generate a shadow of the detected object on the side of the detected object to image the predetermined region; The predetermined region is imaged by irradiating light onto the predetermined region from diagonally above, opposite to the light irradiation, to generate a shadow of the object to be detected on the side of the object to be detected in a direction opposite to the shadow. a second step; a third step of extracting shadow information of the detected object by calculating the difference on the same coordinates between the image information obtained in the first and second steps; and a third step of extracting shadow information of the detected object, and a shadow indicated by the shadow information. a fourth step of determining the mounting position of the object to be detected by performing pattern matching processing between the pattern and a standard pattern set in advance; and detecting the mounting state of the object to be detected based on the determined mounting position; A mounting state inspection method characterized by having the following.
(2)被検出物体が装着された所定領域を互に対向する
斜め上方位置から光を照射して上記被検出物体の影を発
生させる照明手段と、上記所定領域を上記各上方位置か
らの照明ごとに撮像して第1及び第2の画像信号を出力
する撮像手段と、上記第1及び第2の画像信号について
同一座標上での差を算出して上記被検出物体の影のみが
抽出された影抽出信号を出力する影抽出手段と、上記影
抽出信号が示す影パターンとあらかじめ設定されている
標準パターンとのパターンマッチングを行い上記被検出
物体の装着位置を求めるとともにこの求められた装着位
置に基づいて上記被検出物体の装着状態を検出するパタ
ーンマッチング手段とを具備することを特徴とする装着
状態検査装置。
(2) illumination means for generating a shadow of the object by irradiating a predetermined area on which the object to be detected is mounted from obliquely upper positions facing each other; and illumination means for illuminating the predetermined area from each of the above positions an imaging means that takes an image and outputs a first and second image signal; A shadow extraction means that outputs a shadow extraction signal performs pattern matching between the shadow pattern indicated by the shadow extraction signal and a preset standard pattern to determine the mounting position of the object to be detected, and detects the mounting position of the detected object. and pattern matching means for detecting the mounting state of the object to be detected based on the following.
JP25181186A 1986-10-24 1986-10-24 Method and apparatus for inspecting mounting state Pending JPS63106508A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP25181186A JPS63106508A (en) 1986-10-24 1986-10-24 Method and apparatus for inspecting mounting state

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP25181186A JPS63106508A (en) 1986-10-24 1986-10-24 Method and apparatus for inspecting mounting state

Publications (1)

Publication Number Publication Date
JPS63106508A true JPS63106508A (en) 1988-05-11

Family

ID=17228273

Family Applications (1)

Application Number Title Priority Date Filing Date
JP25181186A Pending JPS63106508A (en) 1986-10-24 1986-10-24 Method and apparatus for inspecting mounting state

Country Status (1)

Country Link
JP (1) JPS63106508A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8548224B2 (en) 2009-07-03 2013-10-01 Koh Young Technology Inc. Method for inspecting measurement object
WO2020008713A1 (en) * 2018-07-04 2020-01-09 Dmg森精機株式会社 Measurement device

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8548224B2 (en) 2009-07-03 2013-10-01 Koh Young Technology Inc. Method for inspecting measurement object
US20130294679A1 (en) * 2009-07-03 2013-11-07 Koh Young Technology Inc. Method for inspecting measurement object
US8724883B2 (en) * 2009-07-03 2014-05-13 Koh Young Technology Inc. Method for inspecting measurement object
WO2020008713A1 (en) * 2018-07-04 2020-01-09 Dmg森精機株式会社 Measurement device
JP2020008348A (en) * 2018-07-04 2020-01-16 Dmg森精機株式会社 Measuring apparatus

Similar Documents

Publication Publication Date Title
JP5256251B2 (en) Inspection method of measurement object
KR101129349B1 (en) Parts mount board inspection apparatus
JPH0572961B2 (en)
JPS63106508A (en) Method and apparatus for inspecting mounting state
KR101056995B1 (en) 3D shape inspection method
JPH0658731A (en) Pattern inspecting apparatus
JP3309420B2 (en) Inspection method of solder bridge
JPH05288527A (en) Appearance inspecting method for mounted board and its device
KR101133641B1 (en) Method of inspecting three-dimensional shape
JPH07119705B2 (en) Electronic component inspection device
JP2906454B2 (en) Object position detection method
JPS62175606A (en) Confirming method and apparatus
JPH0399250A (en) Mounting state recognizing apparatus
JP2556180B2 (en) Solder bridge inspection device
JP3721847B2 (en) How to detect solder balls
JPH01100409A (en) Apparatus for inspecting positional shift of chip component
JPS6329205A (en) Recognizing method
JPH0760459B2 (en) Corner detector
JP2765338B2 (en) Chip component mounting inspection equipment
JPH0241577A (en) Parts setting check device
JPS63100305A (en) Sensing device for body
JPH01284979A (en) Picture recognizing device
JPH04236316A (en) Inspecting apparatus of printed circuit board
JPS62219088A (en) Method and device for recognition
JPH0619252B2 (en) Soldering inspection device for printed wiring boards