JPS63105337U - - Google Patents
Info
- Publication number
- JPS63105337U JPS63105337U JP20281386U JP20281386U JPS63105337U JP S63105337 U JPS63105337 U JP S63105337U JP 20281386 U JP20281386 U JP 20281386U JP 20281386 U JP20281386 U JP 20281386U JP S63105337 U JPS63105337 U JP S63105337U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- width
- support
- groove
- support jig
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000037431 insertion Effects 0.000 claims 1
- 238000003780 insertion Methods 0.000 claims 1
- 239000000463 material Substances 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
Landscapes
- Warehouses Or Storage Devices (AREA)
- Packaging Frangible Articles (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986202813U JPH0533014Y2 (en, 2012) | 1986-12-25 | 1986-12-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986202813U JPH0533014Y2 (en, 2012) | 1986-12-25 | 1986-12-25 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63105337U true JPS63105337U (en, 2012) | 1988-07-08 |
| JPH0533014Y2 JPH0533014Y2 (en, 2012) | 1993-08-23 |
Family
ID=31167548
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986202813U Expired - Lifetime JPH0533014Y2 (en, 2012) | 1986-12-25 | 1986-12-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0533014Y2 (en, 2012) |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5970334U (ja) * | 1982-11-01 | 1984-05-12 | 株式会社テクニスコ | 拡散治具 |
| JPS59111040U (ja) * | 1983-01-17 | 1984-07-26 | 日本電気ホームエレクトロニクス株式会社 | 半導体製造用治具 |
| JPS59149631U (ja) * | 1983-03-24 | 1984-10-06 | 富士電機株式会社 | シリコンウエ−ハの保持具 |
| JPS61251144A (ja) * | 1985-04-30 | 1986-11-08 | Toshiba Corp | ウエハ載置用ボ−ト |
-
1986
- 1986-12-25 JP JP1986202813U patent/JPH0533014Y2/ja not_active Expired - Lifetime
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5970334U (ja) * | 1982-11-01 | 1984-05-12 | 株式会社テクニスコ | 拡散治具 |
| JPS59111040U (ja) * | 1983-01-17 | 1984-07-26 | 日本電気ホームエレクトロニクス株式会社 | 半導体製造用治具 |
| JPS59149631U (ja) * | 1983-03-24 | 1984-10-06 | 富士電機株式会社 | シリコンウエ−ハの保持具 |
| JPS61251144A (ja) * | 1985-04-30 | 1986-11-08 | Toshiba Corp | ウエハ載置用ボ−ト |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0533014Y2 (en, 2012) | 1993-08-23 |