JPS6420723U - - Google Patents
Info
- Publication number
- JPS6420723U JPS6420723U JP11491287U JP11491287U JPS6420723U JP S6420723 U JPS6420723 U JP S6420723U JP 11491287 U JP11491287 U JP 11491287U JP 11491287 U JP11491287 U JP 11491287U JP S6420723 U JPS6420723 U JP S6420723U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- width
- support jig
- groove
- groove located
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000037431 insertion Effects 0.000 claims 1
- 238000003780 insertion Methods 0.000 claims 1
- 239000000463 material Substances 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
Landscapes
- Packaging Frangible Articles (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11491287U JPH0644102Y2 (ja) | 1987-07-27 | 1987-07-27 | ウエハ−の支持治具 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11491287U JPH0644102Y2 (ja) | 1987-07-27 | 1987-07-27 | ウエハ−の支持治具 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6420723U true JPS6420723U (en, 2012) | 1989-02-01 |
| JPH0644102Y2 JPH0644102Y2 (ja) | 1994-11-14 |
Family
ID=31356087
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11491287U Expired - Lifetime JPH0644102Y2 (ja) | 1987-07-27 | 1987-07-27 | ウエハ−の支持治具 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0644102Y2 (en, 2012) |
-
1987
- 1987-07-27 JP JP11491287U patent/JPH0644102Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0644102Y2 (ja) | 1994-11-14 |