JPS6420723U - - Google Patents
Info
- Publication number
- JPS6420723U JPS6420723U JP11491287U JP11491287U JPS6420723U JP S6420723 U JPS6420723 U JP S6420723U JP 11491287 U JP11491287 U JP 11491287U JP 11491287 U JP11491287 U JP 11491287U JP S6420723 U JPS6420723 U JP S6420723U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- width
- support jig
- groove
- groove located
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000037431 insertion Effects 0.000 claims 1
- 238000003780 insertion Methods 0.000 claims 1
- 239000000463 material Substances 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
Landscapes
- Packaging Frangible Articles (AREA)
Description
第１図は本考案に係る支持治具の斜視図、第２
図は第１図の―に沿つて見た部分拡大縦断面
図、第３図及び第４図は本考案の他の実施例を示
す第２図に対応した部分拡大縦断面図、第５図及
び第６図は従来の支持治具を示す第２図に対応し
た部分拡大縦断面図である。
符号の説明、１０…支持治具、１１…上方支持
棒材、１２…下方支持棒材、１３…凹溝、１３ａ
…底面部、１３ｂ，１３ｃ…側面部、１４…支持
台、２０，４０…（従来の）支持治具、３０…ウ
エハー。
Fig. 1 is a perspective view of the support jig according to the present invention;
The figure is a partially enlarged longitudinal sectional view taken along the line - in Fig. 1, Figs. 3 and 4 are partially enlarged longitudinal sectional views corresponding to Fig. 2 showing other embodiments of the present invention, and Fig. 5. and FIG. 6 is a partially enlarged vertical sectional view corresponding to FIG. 2 showing a conventional support jig. Explanation of symbols, 10... Support jig, 11... Upper support bar, 12... Lower support bar, 13... Concave groove, 13a
...bottom part, 13b, 13c...side part, 14...support stand, 20, 40...(conventional) support jig, 30...wafer.
Claims (1)
溝が多数形成されてなるウエハーの支持治具であ
つて、 下方側に位置する各凹溝は、前記ウエハーの端
面の巾より大きな開口を有し、かつ、その中央部
が順次最深部となる形状に形成されているととも
に、 上方側に位置する各凹溝の底面部の巾が、前記
ウエハーの挿入方向またはその反対方向のいずれ
か少なくとも一方側に拡がつていることを特徴と
するウエハーの支持治具。[Claims for Utility Model Registration] A wafer support jig in which a large number of grooves are formed to support a wafer that is a material for a semiconductor device, and each groove located on the lower side is formed on the edge of the wafer. The groove has an opening larger than its width, and is formed in such a shape that the central part thereof is the deepest part, and the width of the bottom part of each groove located on the upper side is in the direction of insertion of the wafer or the opposite direction. A wafer support jig characterized in that it extends in at least one direction.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11491287U JPH0644102Y2 (en) | 1987-07-27 | 1987-07-27 | Wafer support jig |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11491287U JPH0644102Y2 (en) | 1987-07-27 | 1987-07-27 | Wafer support jig |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6420723U true JPS6420723U (en) | 1989-02-01 |
| JPH0644102Y2 JPH0644102Y2 (en) | 1994-11-14 |
Family
ID=31356087
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11491287U Expired - Lifetime JPH0644102Y2 (en) | 1987-07-27 | 1987-07-27 | Wafer support jig |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0644102Y2 (en) |
-
1987
- 1987-07-27 JP JP11491287U patent/JPH0644102Y2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0644102Y2 (en) | 1994-11-14 |