JPS6214923U - - Google Patents
Info
- Publication number
- JPS6214923U JPS6214923U JP10613185U JP10613185U JPS6214923U JP S6214923 U JPS6214923 U JP S6214923U JP 10613185 U JP10613185 U JP 10613185U JP 10613185 U JP10613185 U JP 10613185U JP S6214923 U JPS6214923 U JP S6214923U
- Authority
- JP
- Japan
- Prior art keywords
- conductor
- notch
- side walls
- groove
- insulating material
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004020 conductor Substances 0.000 claims description 3
- 239000011810 insulating material Substances 0.000 claims 1
Landscapes
- Installation Of Bus-Bars (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10613185U JPS6214923U (en, 2012) | 1985-07-11 | 1985-07-11 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10613185U JPS6214923U (en, 2012) | 1985-07-11 | 1985-07-11 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6214923U true JPS6214923U (en, 2012) | 1987-01-29 |
Family
ID=30981211
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10613185U Pending JPS6214923U (en, 2012) | 1985-07-11 | 1985-07-11 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6214923U (en, 2012) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN111742401A (zh) * | 2018-02-20 | 2020-10-02 | 应用材料公司 | 用于原子层沉积(ald)温度均匀性的热解氮化硼(pbn)加热器 |
-
1985
- 1985-07-11 JP JP10613185U patent/JPS6214923U/ja active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN111742401A (zh) * | 2018-02-20 | 2020-10-02 | 应用材料公司 | 用于原子层沉积(ald)温度均匀性的热解氮化硼(pbn)加热器 |
JP2021514110A (ja) * | 2018-02-20 | 2021-06-03 | アプライド マテリアルズ インコーポレイテッドApplied Materials,Incorporated | Ald温度均一性のためのpbnヒータ |