JPS6310249Y2 - - Google Patents
Info
- Publication number
- JPS6310249Y2 JPS6310249Y2 JP3065383U JP3065383U JPS6310249Y2 JP S6310249 Y2 JPS6310249 Y2 JP S6310249Y2 JP 3065383 U JP3065383 U JP 3065383U JP 3065383 U JP3065383 U JP 3065383U JP S6310249 Y2 JPS6310249 Y2 JP S6310249Y2
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- cutter
- scribing
- stage
- present
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000005453 pelletization Methods 0.000 claims description 8
- 239000004065 semiconductor Substances 0.000 claims description 4
- 235000012431 wafers Nutrition 0.000 description 27
- 238000000034 method Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 2
- 239000012634 fragment Substances 0.000 description 2
- 230000003749 cleanliness Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000008188 pellet Substances 0.000 description 1
Landscapes
- Processing Of Stones Or Stones Resemblance Materials (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3065383U JPS59137012U (ja) | 1983-03-03 | 1983-03-03 | 半導体ペレツタイズ装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3065383U JPS59137012U (ja) | 1983-03-03 | 1983-03-03 | 半導体ペレツタイズ装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59137012U JPS59137012U (ja) | 1984-09-12 |
| JPS6310249Y2 true JPS6310249Y2 (enExample) | 1988-03-28 |
Family
ID=30161530
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3065383U Granted JPS59137012U (ja) | 1983-03-03 | 1983-03-03 | 半導体ペレツタイズ装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59137012U (enExample) |
-
1983
- 1983-03-03 JP JP3065383U patent/JPS59137012U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS59137012U (ja) | 1984-09-12 |
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