JPS63102019A - Magnetic recording medium - Google Patents
Magnetic recording mediumInfo
- Publication number
- JPS63102019A JPS63102019A JP24687686A JP24687686A JPS63102019A JP S63102019 A JPS63102019 A JP S63102019A JP 24687686 A JP24687686 A JP 24687686A JP 24687686 A JP24687686 A JP 24687686A JP S63102019 A JPS63102019 A JP S63102019A
- Authority
- JP
- Japan
- Prior art keywords
- film
- magnetic
- protective film
- magnetic recording
- sulfide
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000005291 magnetic effect Effects 0.000 title claims abstract description 36
- 239000010408 film Substances 0.000 claims abstract description 26
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 20
- 229910052799 carbon Inorganic materials 0.000 claims abstract description 20
- 230000001681 protective effect Effects 0.000 claims abstract description 18
- 229910052751 metal Inorganic materials 0.000 claims abstract description 14
- 239000002184 metal Substances 0.000 claims abstract description 12
- 239000010409 thin film Substances 0.000 claims abstract description 12
- 239000000758 substrate Substances 0.000 claims abstract description 8
- 229910052782 aluminium Inorganic materials 0.000 claims abstract description 4
- 229910052788 barium Inorganic materials 0.000 claims abstract description 4
- 229910052791 calcium Inorganic materials 0.000 claims abstract description 4
- 229910052749 magnesium Inorganic materials 0.000 claims abstract description 4
- 229910052748 manganese Inorganic materials 0.000 claims abstract description 4
- 229910052712 strontium Inorganic materials 0.000 claims abstract description 4
- 229910052718 tin Inorganic materials 0.000 claims abstract description 4
- 229910052804 chromium Inorganic materials 0.000 claims abstract 3
- 150000003568 thioethers Chemical class 0.000 claims description 4
- UCKMPCXJQFINFW-UHFFFAOYSA-N Sulphide Chemical compound [S-2] UCKMPCXJQFINFW-UHFFFAOYSA-N 0.000 abstract description 6
- 230000005294 ferromagnetic effect Effects 0.000 abstract description 5
- 229910045601 alloy Inorganic materials 0.000 abstract description 4
- 239000000956 alloy Substances 0.000 abstract description 4
- 229910052742 iron Inorganic materials 0.000 abstract description 2
- 229910052759 nickel Inorganic materials 0.000 abstract description 2
- 229910017061 Fe Co Inorganic materials 0.000 abstract 1
- 229910001030 Iron–nickel alloy Inorganic materials 0.000 abstract 1
- 230000015572 biosynthetic process Effects 0.000 abstract 1
- 238000000151 deposition Methods 0.000 abstract 1
- 239000010410 layer Substances 0.000 description 5
- 238000004544 sputter deposition Methods 0.000 description 5
- 229910000684 Cobalt-chrome Inorganic materials 0.000 description 3
- 239000010952 cobalt-chrome Substances 0.000 description 3
- 229910002804 graphite Inorganic materials 0.000 description 3
- 239000010439 graphite Substances 0.000 description 3
- 239000011241 protective layer Substances 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- 239000000314 lubricant Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 229920001721 polyimide Polymers 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 238000007738 vacuum evaporation Methods 0.000 description 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- 229910020516 Co—V Inorganic materials 0.000 description 1
- 229910000599 Cr alloy Inorganic materials 0.000 description 1
- 229910017110 Fe—Cr—Co Inorganic materials 0.000 description 1
- 239000004952 Polyamide Substances 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 238000002441 X-ray diffraction Methods 0.000 description 1
- 239000003082 abrasive agent Substances 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 238000005422 blasting Methods 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000001941 electron spectroscopy Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 229910052745 lead Inorganic materials 0.000 description 1
- 239000010687 lubricating oil Substances 0.000 description 1
- 239000000696 magnetic material Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- FPVKHBSQESCIEP-JQCXWYLXSA-N pentostatin Chemical compound C1[C@H](O)[C@@H](CO)O[C@H]1N1C(N=CNC[C@H]2O)=C2N=C1 FPVKHBSQESCIEP-JQCXWYLXSA-N 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 229920003229 poly(methyl methacrylate) Polymers 0.000 description 1
- 229920002647 polyamide Polymers 0.000 description 1
- 239000004417 polycarbonate Substances 0.000 description 1
- 229920000515 polycarbonate Polymers 0.000 description 1
- -1 polyethylene terephthalate Polymers 0.000 description 1
- 229920000139 polyethylene terephthalate Polymers 0.000 description 1
- 239000005020 polyethylene terephthalate Substances 0.000 description 1
- 239000004926 polymethyl methacrylate Substances 0.000 description 1
- 238000000682 scanning probe acoustic microscopy Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
- 229910052723 transition metal Inorganic materials 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
Landscapes
- Magnetic Record Carriers (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は磁気記録媒体、さらに詳しくは走行耐久性にす
ぐれる金属薄膜型磁気記録媒体に関する。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a magnetic recording medium, and more particularly to a metal thin film type magnetic recording medium that has excellent running durability.
近年、記録媒体の高密度化に伴い、従来の塗布型磁気記
録媒体に替わって、いわゆる金属薄膜型磁気記録媒体が
注目されるようになってきている。In recent years, as the density of recording media has increased, so-called metal thin film magnetic recording media have been attracting attention in place of conventional coated magnetic recording media.
しかし、金属薄膜型磁気記録媒体は、従来の塗布型磁気
記録媒体のように潤滑剤や研磨剤を磁性nL中に混入さ
せることが困難なので、一般に走行耐久性に劣シ、例え
ばCo−Cr合金膜を設けた垂直磁気記録ディスクの場
合ioo回程度の走行パスで表面の合金a先とヘッドと
の間で凝着等が生じて走行不能になることが多い。However, since it is difficult to mix lubricants and abrasives into the magnetic nL like in conventional coated magnetic recording media, metal thin film magnetic recording media generally have poor running durability, such as Co-Cr alloys. In the case of a perpendicular magnetic recording disk provided with a film, adhesion occurs between the alloy a tip on the surface and the head after about 100 running passes, and the disk often becomes unable to run.
そこで、このような問題を解決するために、液体潤滑剤
を磁性層表面に塗布したシ、固体保護fluを磁性線2
表面に設けることが提案されている。この中では、固体
潤滑剤であるカーボンを主成分とする保護tを磁性層表
面に設けることが特に走行耐久性向上に効果があること
が知られている。Therefore, in order to solve this problem, a liquid lubricant was applied to the surface of the magnetic layer, and a solid protective fluor was applied to the magnetic wire 2.
It has been proposed to provide it on the surface. Among these, it is known that providing a protective layer mainly composed of carbon, which is a solid lubricant, on the surface of the magnetic layer is particularly effective in improving running durability.
しかしながら、このようなカーボンを主成分とする保護
層を磁性層表面に設けてもなお走行耐久性が充分でない
。これは主にヘッドに生じた付着物が保護層との摩擦係
数を増大させることに原因するものと考えられる。However, even if such a protective layer containing carbon as a main component is provided on the surface of the magnetic layer, running durability is still insufficient. This is thought to be mainly due to the fact that the deposits formed on the head increase the coefficient of friction with the protective layer.
さらに、はう素、ケイ素、遷移金属元素等をダイアモン
ド状カーボン保護膜に含有させることが提案されている
が(特開昭to−λタタ36号)、潤滑性が劣シ、した
がって十分な耐久性が得られない。Furthermore, it has been proposed to incorporate boron, silicon, transition metal elements, etc. into the diamond-like carbon protective film (Japanese Patent Application Laid-Open No. 1997-111036), but the lubricity is poor and therefore the durability is insufficient. I can't get sex.
本発明は、磁気ヘッドに付着物を生ぜしめない;かつ走
行耐久性の著しく改良された金属薄膜型磁気記録媒体を
提供するにある。SUMMARY OF THE INVENTION The present invention provides a metal thin film type magnetic recording medium that does not cause deposits on a magnetic head; and has significantly improved running durability.
本発明は、非磁性基板上に磁性金属薄膜を設けて力る磁
気記録媒体において、該薄膜上にAl、Cr、T i%
Pb、Mn、Sn、Mg、Ca、Sr、Baの酸化物お
よび硫化物から選ばれる少なくとも1種を含有するグラ
ファイト状カーボンを主成分とする保護膜が設けられて
いることを特徴とする磁気記録媒体、に関する。The present invention provides a magnetic recording medium in which a magnetic metal thin film is provided on a non-magnetic substrate.
Magnetic recording characterized by being provided with a protective film mainly composed of graphitic carbon containing at least one selected from oxides and sulfides of Pb, Mn, Sn, Mg, Ca, Sr, and Ba. Regarding media.
上記グラファイト状カーボンを主成分とする保護膜とは
、真空蒸着法、スパッタリング法等で作成されるグラフ
ァイト様のアモルファス膜を意味する。すなわち、X線
回折によっては明確なピークが見られず、かつX線電子
分光法(xps)によシ求められる炭素のプラズモン損
失エネルギー値がグラファイトのそれを示すような膜で
ある。The above-mentioned protective film containing graphite-like carbon as a main component means a graphite-like amorphous film created by a vacuum evaporation method, a sputtering method, or the like. In other words, it is a film in which no clear peak is observed by X-ray diffraction, and the plasmon loss energy value of carbon determined by X-ray electron spectroscopy (XPS) shows that of graphite.
上記グラファイト状カーボンを主成分とする保護膜中に
含有される上記の酸化物、および硫化物の重量は10%
以下であシ、0.3−t%であることが好ましい。The weight of the above-mentioned oxides and sulfides contained in the above-mentioned protective film mainly composed of graphitic carbon is 10%.
The content is preferably 0.3-t% or less.
本発明の磁性金属薄膜には、Fe、C□、Ni等の強磁
性金属、あるいはpe−co、F’e−N i、Co−
N I、Fe−31、Co−Cr。The magnetic metal thin film of the present invention may include ferromagnetic metals such as Fe, C□, Ni, or pe-co, F'e-Ni, Co-
N I, Fe-31, Co-Cr.
Co−V、C□ −S m、 C□ −p t 、 C
O−p、Co−N1−P、Fe−Cr−Co等の強磁性
合金、あるいまだこれらに微量の金属元素等が添加され
たものが使用される。Co-V, C□ -S m, C□ -pt, C
Ferromagnetic alloys such as Op, Co-N1-P, and Fe-Cr-Co are used, or ferromagnetic alloys such as those to which trace amounts of metal elements are added are used.
非磁性基板としてはポリエチレンテレフタレート、ポリ
イミド、ポリアミド等のフィルム状の高分子材料、ポリ
カーボネイト、ポリメチルメタクリレート等のディスク
状の高分子材料、ガラス等のセラミック、アルミニウム
等の金属等が使用可能である。基板の形状はシート、カ
ード、ディスク、ドラム、テープ等のいずれでも良い。As the non-magnetic substrate, it is possible to use film-like polymeric materials such as polyethylene terephthalate, polyimide, polyamide, etc., disc-shaped polymeric materials such as polycarbonate, polymethyl methacrylate, ceramics such as glass, metals such as aluminum, etc. The shape of the substrate may be a sheet, card, disk, drum, tape, or the like.
本発明の磁気記録媒体を作成するには、まず非磁性基板
上に磁性金属薄膜を真空蒸着、スパッタリング、イオン
ブレーティング、メッキ等の方法で被着せしめて形成し
、更にその上に前記酸化物、硫化物のうち少なくとも一
種を含有するグラファイト状カーボンを主成分とする保
護膜を真空蒸着、スパッタリング等で形成すれば良い。To create the magnetic recording medium of the present invention, first, a magnetic metal thin film is deposited on a non-magnetic substrate by a method such as vacuum evaporation, sputtering, ion blasting, plating, etc. A protective film whose main component is graphitic carbon containing at least one kind of sulfide may be formed by vacuum evaporation, sputtering, or the like.
この場合、磁性膜は2種の異なる磁性体を用いて積層
しても良いし、下地層を設けた単層型にしても良い。In this case, the magnetic film is laminated using two different magnetic materials.
Alternatively, it may be a single layer type with a base layer provided.
また、中間層を設けた積層型にしても良い。なお磁性膜
の厚さはいずれの場合でも0、/〜2μm程度が適当で
ある。Alternatively, a laminated type having an intermediate layer may be used. In any case, the appropriate thickness of the magnetic film is about 0 to 2 μm.
また、保護膜の厚さは厚すぎると記録、再生時に充分な
出力が得られず、−力落すぎると走行耐久性の向上が見
られないので、/θ〜1000A、好ましくは!10−
200大程度である。In addition, if the thickness of the protective film is too thick, sufficient output will not be obtained during recording and reproduction, and if the force is too low, no improvement in running durability will be seen, so it is preferably /θ~1000A! 10-
It is about 200 large.
以下、本発明の実施例について説明する。 Examples of the present invention will be described below.
非磁性基板として厚さ50μmのポリイミドフィルムを
用いた。A polyimide film with a thickness of 50 μm was used as a nonmagnetic substrate.
まず、この基板上にCoCrをターゲットとしたArガ
ス中のスパッタリングによシ厚さ2!0QλのCoCr
薄膜を形成した。First, CoCr with a thickness of 2!0Qλ was deposited on this substrate by sputtering in Ar gas using CoCr as a target.
A thin film was formed.
次に、グラファイトターゲットと所望の酸化物、硫化物
のターゲットを用いてArガス中で2元同時スパッタリ
ングを行い、上記CoCr薄膜上に上記物質のうち少な
くとも一種を含有するグラファイト状カーボンを主成分
とする厚さ、200大の保護膜を各種作成した。Next, binary simultaneous sputtering is performed in Ar gas using a graphite target and a desired oxide or sulfide target, and a graphite-like carbon containing at least one of the above substances is deposited on the CoCr thin film as a main component. Various protective films with a thickness of 200 mm were prepared.
これらを直径3.3インチのディスクの形状に加工し、
市販のディスクジャケットに組み込んだ。Process these into a disc shape with a diameter of 3.3 inches,
It was incorporated into a commercially available disc jacket.
市販のフロッピーディスクドライブにより記録を行った
後、再生信号と摩擦係数をモニターしなからA 00
r、p、m、で回転させ、摩擦係数が急激に大きくなる
までのパス数を測定することにより走行耐久性のテスト
を行った。After recording with a commercially available floppy disk drive, monitor the playback signal and friction coefficient.
The running durability was tested by rotating it at r, p, and m and measuring the number of passes until the friction coefficient suddenly increased.
上記物質の含有量はオージェ電子分光法を用いて測定し
た各々の元素と炭素との微分スペクトルのピーク比より
求めた。なお、膜厚方向で保護膜の構成元素の組成に変
化がないことも同様にして確認した。The content of the above substances was determined from the peak ratio of the differential spectrum of each element and carbon measured using Auger electron spectroscopy. It was also similarly confirmed that there was no change in the composition of the constituent elements of the protective film in the film thickness direction.
比較の為、上記物質を含有しないグラファイト6一
状カーボンを主成分とする厚さ200大の保護膜を設け
た媒体も作成し、これを比較例とした。For comparison, a medium was also prepared in which a protective film with a thickness of 200 mm was provided, the main component of which was graphite 6 monolithic carbon, which did not contain the above-mentioned substances, and this was used as a comparative example.
得られた結果を第1表〜第1+表に示した。表から明ら
かなように、本発明の酸化物および/″!たは硫化物を
適量含有したカーボンを主成分とする保護膜を設けた媒
体は、これらを含有しないカーボンを主成分とする保護
膜を設けた媒体と比較して走行耐久性に優れている。ヘ
ッドを顕微鏡観察した結果、含有した金属の量が多く走
行耐久性が悪かった媒体には付着物はないものの傷が入
り、走行耐久性の優れた媒体には付着物も傷もなく、金
属を含有しない媒体は傷はないものの付着物が発生して
いることを確認した。The results obtained are shown in Tables 1 to 1+. As is clear from the table, the medium provided with the protective film mainly composed of carbon containing appropriate amounts of oxides and /''! or sulfides of the present invention is different from the protective film mainly composed of carbon that does not contain these. It has superior running durability compared to media with a . It was confirmed that the media with excellent properties had no deposits or scratches, and the media containing no metal had no scratches but had deposits.
第1表
第1表
第3表
第μ表
−ター
第5表
第6表
第7表
第♂表
第り表
第io表
一/ l−
第1I表
第12表
l 3−
第13表
第1≠表
−/+−
〔発明の効果〕
本発明の磁気記録媒体は、走行時磁気ヘッドに付着物を
生ぜしめないと同時に、走行耐久性に顕著にすぐれるも
のである。Table 1 Table 1 Table 3 Table μ Table 5 Table 6 Table 7 Table ♂ Table io Table 1/l- Table 1I Table 12 Table l 3- Table 13 Table 1 ≠Table -/+- [Effects of the Invention] The magnetic recording medium of the present invention does not produce deposits on the magnetic head during running, and at the same time has significantly excellent running durability.
Claims (1)
において、該薄膜上にAl、Cr、Ti、Pb、Mn、
Sn、Mg、Ca、Sr、Baの酸化物および硫化物か
ら選ばれる少なくとも1種を10重量%以下含有するグ
ラファイト状カーボンを主成分とする保護膜が設けられ
ていることを特徴とする磁気記録媒体。In a magnetic recording medium in which a magnetic metal thin film is provided on a nonmagnetic substrate, Al, Cr, Ti, Pb, Mn,
Magnetic recording characterized by being provided with a protective film mainly composed of graphitic carbon containing 10% by weight or less of at least one selected from oxides and sulfides of Sn, Mg, Ca, Sr, and Ba. Medium.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP24687686A JPS63102019A (en) | 1986-10-17 | 1986-10-17 | Magnetic recording medium |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP24687686A JPS63102019A (en) | 1986-10-17 | 1986-10-17 | Magnetic recording medium |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS63102019A true JPS63102019A (en) | 1988-05-06 |
Family
ID=17155050
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP24687686A Pending JPS63102019A (en) | 1986-10-17 | 1986-10-17 | Magnetic recording medium |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS63102019A (en) |
-
1986
- 1986-10-17 JP JP24687686A patent/JPS63102019A/en active Pending
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US5252367A (en) | Method of manufacturing a magnetic recording medium | |
JPS63102019A (en) | Magnetic recording medium | |
JPS63102014A (en) | Magnetic recording medium | |
JPS63102017A (en) | Magnetic recording medium | |
JPS63102018A (en) | Magnetic recording medium | |
JPS63102022A (en) | Magnetic recording medium | |
JPS63102023A (en) | Magnetic recording medium | |
JPS63102015A (en) | Magnetic recording medium | |
JPS63102016A (en) | Magnetic recording medium | |
JP2527616B2 (en) | Metal thin film magnetic recording medium | |
JP2596072B2 (en) | Magnetic recording media | |
JP3962962B2 (en) | Magnetic recording medium | |
JPH0668455A (en) | Lubricant and magnetic recording medium holding this lubricant | |
JPH052737A (en) | Magnetic recording medium | |
JP3627298B2 (en) | Magnetic recording medium | |
JPS634419A (en) | Magnetic recording medium provided with protective layer having carbon-containing composition | |
JPH065574B2 (en) | Magnetic recording medium | |
JPH07111775B2 (en) | Magnetic recording medium | |
JPH0268712A (en) | Thin film magnetic recording medium | |
JPS60140535A (en) | Magnetic recording medium | |
JPH06124832A (en) | Magnetic recording media | |
JPH0312814A (en) | Thin metallic film type magnetic recording medium | |
JPS61204832A (en) | Magnetic recording medium | |
JPS63263626A (en) | Magnetic disk | |
JPH01232517A (en) | Thin metallic film type magnetic recording medium |