JP2596072B2 - Magnetic recording media - Google Patents

Magnetic recording media

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Publication number
JP2596072B2
JP2596072B2 JP17782388A JP17782388A JP2596072B2 JP 2596072 B2 JP2596072 B2 JP 2596072B2 JP 17782388 A JP17782388 A JP 17782388A JP 17782388 A JP17782388 A JP 17782388A JP 2596072 B2 JP2596072 B2 JP 2596072B2
Authority
JP
Japan
Prior art keywords
magnetic recording
thin film
magnetic
film
layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP17782388A
Other languages
Japanese (ja)
Other versions
JPH0227517A (en
Inventor
紘一 篠原
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP17782388A priority Critical patent/JP2596072B2/en
Publication of JPH0227517A publication Critical patent/JPH0227517A/en
Application granted granted Critical
Publication of JP2596072B2 publication Critical patent/JP2596072B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Description

【発明の詳細な説明】 産業上の利用分野 本発明は、高密度磁気記録に適する強磁性金属薄膜を
磁気記録層とする磁気記録媒体に関する。
Description: TECHNICAL FIELD The present invention relates to a magnetic recording medium using a ferromagnetic metal thin film suitable for high-density magnetic recording as a magnetic recording layer.

従来の技術 最近の記録技術の進歩により単位面積当りはもとより
単位体積当りの記録密度が著しく向上し、磁気記録媒体
は、表面が極めて平滑で、高密度化に適した強磁性金属
薄膜を磁気記録層とする蒸着テープ等の実用化が強く望
まれている。従って最近では摺動界面で起こる摩擦,摩
耗等に対する理解を深めるトライボロジーに関する研究
の重要性が認識され各方面で開発が進められている〔テ
レビジョン学会誌Vol.40,No.6(1986)472頁〕。
2. Description of the Related Art Recent advances in recording technology have significantly improved not only the recording density per unit area but also the unit density, and magnetic recording media have a very smooth surface and magnetic recording of ferromagnetic metal thin films suitable for high density. Practical application of a vapor deposition tape or the like as a layer is strongly desired. Therefore, recently, the importance of research on tribology for deepening understanding of friction, wear, etc. occurring at the sliding interface has been recognized, and development has been promoted in various fields [Television Society of Japan Vol.40, No.6 (1986) 472]. page〕.

第2図は従来の磁気記録媒体の拡大断面図である。第
2図に於て、1はポリエチレンテレフタレート,ポリイ
ミド等の高分子フィルムで必要に応じて、微粒子化した
表面を付与したもの等〔特開昭59−207422号公報,特開
昭59−121631号公報〕が用いられる。2はCo−Ni−O斜
め蒸着膜,Co−Cr,Co−Cr−Nb等の垂直磁化膜等の磁気記
録層で、3は保護層で、4はバックコート層で、炭素粉
末,炭化カルシウム粉末等の粒子を含んだ樹脂層で主と
して走行性を改善するために保護層だけで不十分な場合
にはよく設けられている。
FIG. 2 is an enlarged sectional view of a conventional magnetic recording medium. In FIG. 2, reference numeral 1 denotes a polymer film such as polyethylene terephthalate, polyimide or the like, which is provided with a finely divided surface as required [Japanese Patent Application Laid-Open Nos. 59-207422 and 59-121631] Gazette] is used. Reference numeral 2 denotes a magnetic recording layer such as a Co—Ni—O obliquely deposited film, a perpendicular magnetization film such as Co—Cr or Co—Cr—Nb, 3 denotes a protective layer, 4 denotes a back coat layer, and carbon powder and calcium carbide. A resin layer containing particles such as powder is often provided when a protective layer alone is not sufficient to mainly improve running properties.

従来保護層は特開昭54−113303号公報に開示されてい
る脂肪酸金属塩の蒸着膜による耐摩耗性の改善,特開昭
57−116771号公報に開示されているイミド基を有する高
分子のスパッタ膜,ダイアモンド状硬質炭素膜を用いる
例(日本応用磁気学会、第46回研究会資料)等が知られ
ている。又潤滑目的の層として、蒸着法,湿式塗布法等
で脂肪酸,脂肪酸アミド等を被着するもの(例えば特公
昭56−30609号公報)は、数多く試みられている。しか
しながら上記した例では、使用環境条件の拡大,合金系
磁気ヘッドに対する実用性の要求の高度化に対処しきれ
ないことから、組み合わせによる改善が検討されてい
て、脂肪酸金属塩の吸着層上にフルオロカーボン系の潤
滑層を設けたもの(特開昭61−120331号公報),硬質カ
ーボン層の上に含フッ素潤滑油層を配したもの(特開昭
61−126627号公報),Si−N−O系薄膜上に潤滑層を形
成したもの(特開昭61−131231号公報)等があげられ
る。
Conventionally, the protective layer has been improved in abrasion resistance by a deposited film of a fatty acid metal salt disclosed in JP-A-54-113303.
Examples of using a sputtered film of a polymer having an imide group and a diamond-like hard carbon film disclosed in Japanese Patent Application Laid-Open No. 57-11671 (Japan Society of Applied Magnetics, 46th meeting) are known. As a layer for lubricating purposes, there have been many attempts to coat a fatty acid, a fatty acid amide, or the like with a vapor deposition method, a wet coating method, or the like (for example, Japanese Patent Publication No. 56-30609). However, in the above-mentioned example, the improvement by the combination is being studied because it is not possible to cope with the expansion of the use environment conditions and the sophistication of the demand for practical use of the alloy-based magnetic head. (Japanese Patent Application Laid-Open No. 61-120331), a type in which a fluorine-containing lubricating oil layer is disposed on a hard carbon layer (Japanese Patent Application Laid-Open No.
No. 61-126627), and a lubrication layer formed on a Si-NO-based thin film (Japanese Patent Application Laid-Open No. 61-131231).

発明が解決しようとする課題 しかしながら、近年急激に需要が増大しているカメラ
一体型のビデオは小型軽量化が進み、使用条件範囲も広
くなり、磁気テープ全厚を薄型化し、長時間記録を維持
しようとすると、くり返し記録再生で画質が低下すると
いった課題があり改善が望まれていた。
Problems to be Solved by the Invention However, camera-integrated video, which has been rapidly increasing in demand in recent years, has been reduced in size and weight, the range of use conditions has been widened, the overall thickness of magnetic tape has been reduced, and recording has been maintained for a long time. If this is attempted, there is a problem that the image quality is reduced by repeated recording and reproduction, and improvement has been desired.

本発明は上記した事情に鑑みなされたもので、画質の
確保を可能にする磁気記録媒体を提供するものである。
The present invention has been made in view of the above circumstances, and provides a magnetic recording medium that can ensure image quality.

課題を解決するための手段 上記した課題を解決するため本発明の磁気記録媒体
は、非磁性薄膜と強磁性金属薄膜をくり返し積層した上
に保護膜を配したものであって、非磁性薄膜と保護膜が
ヌープ硬度2500〔Kg/mm2〕以上の薄膜で構成されるよう
にしたものである。
Means for Solving the Problems To solve the above-mentioned problems, the magnetic recording medium of the present invention has a protective film disposed on a non-magnetic thin film and a ferromagnetic metal thin film repeatedly laminated, and a non-magnetic thin film and The protective film is made of a thin film having a Knoop hardness of 2500 [Kg / mm 2 ] or more.

作用 本発明の磁気記録媒体は、機器の小型化により、回転
磁気ヘッドとの高速摺動時の負荷が増しても、磁気記録
層が実効的に硬くなることで、磁気記録層の局部的な破
壊が妨げることになりくり返し記録再生を行っても画質
を確保できるようになる。
The magnetic recording medium according to the present invention has a small local size of the magnetic recording layer by effectively hardening the magnetic recording layer even when the load at the time of high-speed sliding with the rotating magnetic head is increased due to the downsizing of the device. Destruction is hindered, and image quality can be secured even if recording and reproduction are repeatedly performed.

実 施 例 以下図面を参照しながら本発明の一実施例について詳
しく説明する。第1図は、本発明の磁気記録媒体の拡大
断面図である。第1図で5は5μmから10μmの範囲の
ポリエチレンテヘフタレート,ポリエーテルケトン,ポ
リフェニレンサルファイド,ポリイミド等の高分子フィ
ルムで、水溶性高分子のミミズ状の下塗り層や、TiO2,C
r3O3,ポリエステル球等の微粒子を配した塗布層をあら
かじめ配したものを用いてもよい。6,8は非磁性薄膜でB
NX,SiNX,ダイアモンド薄膜等でヌープ硬度2500〔Kg/m
m2〕以上の薄膜で、7,9は強磁性金属薄膜で、Co,Co−F
e,Co−Ni,Co−O,Co−Ta,Co−Mo,Co−Cr,Co−Ni−O,Co−
Ni−Cr,Co−Cr−Nb等で電子ビーム蒸着法,イオンプレ
ーティング法,スパッタリング法等で形成し、層数は2
層から5層が好ましい。7と9は同じ材質でもよいし、
異なる材質でかつ磁化容易軸の方向の異なるものでもよ
い。10は保護膜であるが6,8と同じ群の中から構成材料
を選び、スペーシング損失の面から50Åから200Åの範
囲で構成するのが望ましい。11は潤滑剤層で、脂肪酸,
脂肪酸アミド,パーフルオロポリエーテル等から適宜選
ぶことができる。12は走行性を改善する目的で配される
いわゆるバックコート層で公知の技術0.3μ〜0.7μmの
範囲で構成し、最大粗さ3000Å以下とするのが望まし
い。
Embodiment An embodiment of the present invention will be described below in detail with reference to the drawings. FIG. 1 is an enlarged sectional view of the magnetic recording medium of the present invention. In FIG. 1, reference numeral 5 denotes a polymer film of polyethylene terephthalate, polyether ketone, polyphenylene sulfide, polyimide or the like in the range of 5 μm to 10 μm, and an earthworm-like undercoat layer of a water-soluble polymer, TiO 2 , C
A coating layer on which fine particles such as r 3 O 3 and polyester spheres are previously disposed may be used. 6 and 8 are nonmagnetic thin films and B
N X, SiN X, Knoop hardness 2500 diamond thin film or the like [Kg / m
m 2 ) or more, 7, 9 are ferromagnetic metal thin films, Co, Co-F
e, Co-Ni, Co-O, Co-Ta, Co-Mo, Co-Cr, Co-Ni-O, Co-
Ni-Cr, Co-Cr-Nb, etc. are formed by electron beam evaporation, ion plating, sputtering, etc.
Five to five layers are preferred. 7 and 9 may be the same material,
Different materials and different directions of the axis of easy magnetization may be used. Reference numeral 10 denotes a protective film, but it is desirable to select a constituent material from the same group as 6, 8 and to form a protective film in the range of 50 to 200 mm in terms of spacing loss. 11 is a lubricant layer, fatty acid,
It can be appropriately selected from fatty acid amide, perfluoropolyether and the like. Reference numeral 12 denotes a so-called backcoat layer provided for the purpose of improving running properties, which is constituted by a known technique in a range of 0.3 μm to 0.7 μm, and desirably has a maximum roughness of 3000 mm or less.

以下、更に具体的な実施例について比較例との対比で
説明する。厚み7μmのポリエチレンナフタレートフィ
ルム上に直径150ÅのCr2O3微粒子を10ケ/(μm)
し、反応性蒸着法(RE),スパッタリング法(SP),プ
ラズマCVD法(PCVD)のいずれかで、BNX,SiNX,TiNX,BCX
等やダイアモンド薄膜等から選んで、ヌープ硬度を調整
し、非磁性薄膜を配し、強磁性金属薄膜は、直径1mの円
筒キヤンに沿わせて、最小入射角46度,酸素分圧4×10
-5(Torr)で、Co−Ni(Co:80wt%)を700Å電子ビーム
蒸着することで配した。保護膜は、非磁性薄膜と同じや
り方で構成し、潤滑剤層は真空蒸着法でパーフルオロア
ラキン酸を45Å配し、CaCO3とカーボンを1:1でポリエス
テル脂肪に対し30重量%含むバックコート層を0.4μ配
し8ミリ幅の磁気テープにした。夫々のテープを8ミリ
ビデオを改造し、シリンダ径を25mmに小型化し、キャリ
ア周波数を7MHzにして再生画質をS/Nメーターで測定し
比較した。環境条件を変化させて、再生画室が2dB低下
するまでのくり返し再生回数と初期の相対S/Nを表にま
とめてテープ構成条件と対比させて示した。
Hereinafter, more specific examples will be described in comparison with comparative examples. 10 / (μm) 2 Cr 2 O 3 fine particles with a diameter of 150 mm are arranged on a 7 μm-thick polyethylene naphthalate film, and any of reactive evaporation (RE), sputtering (SP), and plasma CVD (PCVD) is used. BN X , SiN X , TiN X , BC X
Or a diamond thin film, adjust Knoop hardness, arrange a non-magnetic thin film, and place a ferromagnetic metal thin film along a 1 m diameter cylindrical can at a minimum incident angle of 46 degrees and an oxygen partial pressure of 4 × 10
At -5 (Torr), Co-Ni (Co: 80wt%) was deposited by 700 ° electron beam evaporation. The protective film is composed in the same way as the non-magnetic thin film, and the lubricant layer is a back coat containing 45% of perfluoroarachidic acid by vacuum evaporation and a 1: 1 ratio of CaCO 3 and carbon to 30% by weight of polyester fat. The layers were arranged in 0.4 μm to form an 8 mm wide magnetic tape. Each tape was converted to an 8 mm video, the cylinder diameter was reduced to 25 mm, the carrier frequency was set to 7 MHz, and the playback image quality was measured with an S / N meter and compared. By changing the environmental conditions, the number of repetitive playbacks and the initial relative S / N until the playback room decreased by 2 dB are summarized in the table and shown in comparison with the tape construction conditions.

上表以外にも非磁性薄膜を1層目と2層目で異なる条
件としても検討を行った結果を含め、Co−Ni等の強磁性
金属薄膜のヌープ硬度は1000〔Kg/mm2〕以下が多いこと
と、磁束量から必要な膜厚は500Åから3000Åぐらいの
強磁性金属薄膜で、S/Nの低下量を2dB以下になるパス回
数が−25℃〜+50℃,5%RH〜90%RHで60回以上になるよ
うに構成するには非磁性薄膜と保護膜のヌープ硬度は25
00〔Kg/mm2〕以上となるよう構成するのが望ましい。3
層〜5層に強磁性金属薄膜を多層化する場合は2200〔Kg
/mm2〕程度でも目標を達成できるがその場合でも2500
〔Kg/mm2〕以上とすればより画質の劣化を妨げることに
なるのは勿論である。
The Knoop hardness of ferromagnetic metal thin films such as Co-Ni is 1000 [Kg / mm 2 ] or less, including the results of investigations on non-magnetic thin films under different conditions for the first and second layers in addition to the above table. The required film thickness is about 500 to 3000 mm based on the amount of magnetic flux and the number of passes to reduce the S / N reduction to 2 dB or less is -25 ° C to + 50 ° C, 5% RH to 90%. In order to make it more than 60 times at% RH, the Knoop hardness of the non-magnetic thin film and the protective film is 25
It is desirable that the composition is not less than 00 [Kg / mm 2 ]. 3
When the ferromagnetic metal thin film is multilayered into two to five layers, 2200 [Kg
/ mm 2 ] can achieve the target, but even in that case 2500
Of course, if it is set to [Kg / mm 2 ] or more, the deterioration of the image quality is further prevented.

発明の効果 以上のように本発明によれば、くり返し使用でも再生
画質の低下の小さい高密度磁気記録媒体がえられるとい
ったすぐれた効果がある。
Effects of the Invention As described above, according to the present invention, there is an excellent effect that a high-density magnetic recording medium with a small reduction in reproduced image quality even when used repeatedly is obtained.

【図面の簡単な説明】[Brief description of the drawings]

第1図は本発明の一実施例の磁気記録媒体の拡大断面
図、第2図は従来の磁気記録媒体の拡大断面図である。 5……高分子フィルム、6,8……非磁性薄膜、 7,9……強磁性金属薄膜、10……保護膜。
FIG. 1 is an enlarged sectional view of a magnetic recording medium according to one embodiment of the present invention, and FIG. 2 is an enlarged sectional view of a conventional magnetic recording medium. 5 ... Polymer film, 6,8 ... Non-magnetic thin film, 7,9 ... Ferromagnetic metal thin film, 10 ... Protective film.

Claims (1)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】非磁性薄膜と強磁性金属薄膜をくり返し積
層した上に保護膜を配した磁気記録媒体にあって、非磁
性薄膜と保護膜がヌープ硬度2500〔Kg/mm2〕以上の薄膜
であることを特徴とする磁気記録媒体。
1. A magnetic recording medium comprising a non-magnetic thin film and a ferromagnetic metal thin film repeatedly laminated and provided with a protective film, wherein the non-magnetic thin film and the protective film have a Knoop hardness of 2500 [Kg / mm 2 ] or more. A magnetic recording medium characterized by the following.
JP17782388A 1988-07-15 1988-07-15 Magnetic recording media Expired - Fee Related JP2596072B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17782388A JP2596072B2 (en) 1988-07-15 1988-07-15 Magnetic recording media

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17782388A JP2596072B2 (en) 1988-07-15 1988-07-15 Magnetic recording media

Publications (2)

Publication Number Publication Date
JPH0227517A JPH0227517A (en) 1990-01-30
JP2596072B2 true JP2596072B2 (en) 1997-04-02

Family

ID=16037727

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17782388A Expired - Fee Related JP2596072B2 (en) 1988-07-15 1988-07-15 Magnetic recording media

Country Status (1)

Country Link
JP (1) JP2596072B2 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5637373A (en) 1992-11-19 1997-06-10 Semiconductor Energy Laboratory Co., Ltd. Magnetic recording medium
US6805941B1 (en) 1992-11-19 2004-10-19 Semiconductor Energy Laboratory Co., Ltd. Magnetic recording medium

Also Published As

Publication number Publication date
JPH0227517A (en) 1990-01-30

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