JPH0262715A - Magnetic recording medium - Google Patents

Magnetic recording medium

Info

Publication number
JPH0262715A
JPH0262715A JP21544088A JP21544088A JPH0262715A JP H0262715 A JPH0262715 A JP H0262715A JP 21544088 A JP21544088 A JP 21544088A JP 21544088 A JP21544088 A JP 21544088A JP H0262715 A JPH0262715 A JP H0262715A
Authority
JP
Japan
Prior art keywords
layer
durability
constitution
magnetic recording
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP21544088A
Other languages
Japanese (ja)
Inventor
Koichi Shinohara
紘一 篠原
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP21544088A priority Critical patent/JPH0262715A/en
Publication of JPH0262715A publication Critical patent/JPH0262715A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To improve both a high density recording characteristic and durability by providing projections consisting of implanted layers selected from C, N, B, and O on a nonmagnetic layer positioned on the uppermost part of a smooth high-polymer film. CONSTITUTION:The nonmagnetic layer 8 positioned on the uppermost part laminated with the nonmagnetic layers 6, 8 and the ferromagnetic layer 7 is so constituted on the smooth high-polymer film 5 as to have the implanted layers selected from the C, N, B, and O. The ferromagnetic layer 7 is made into the fine particle layer according to this constitution, by which the noises are decreased and the improved durability is resulted from the decrease in the contact area by the formation of the projections. On the other hand, the adverse influence of the increased noises by the converse generation of magnetic unequalness is minimized. Since the uniform constitution of the hard projections by the implanted layer is possible, the durability is improved by lowering the projection height and the degradation in the output of the short wavelength region is minimized. The high reliability is assured in this way in high-density digital recording.

Description

【発明の詳細な説明】 産業上の利用分野 本発明は、高密度磁気記録に適する強磁性金属薄膜を磁
気記録層とする磁気記録媒体に関する。
DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention relates to a magnetic recording medium whose magnetic recording layer is a ferromagnetic metal thin film suitable for high-density magnetic recording.

従来の技術 最近の記録技術の進歩により単位面積当りはもとよシ単
位体積当シの記録密度が著しく向上し、磁気記録媒体は
、表面が極めて平滑で高密度化に適した強磁性金属薄膜
を磁気記録層とする蒸着テープ等の実用化が強く望まれ
ている。従って最近では摺動界面で起る摩擦、摩耗等に
対する理解を深めるトライポロジーに関する研究の重要
性が認識され各方面で開発が進められている〔テレビジ
ョン学会誌、 Vow、 40 、五6(1986)4
72頁〕。
Conventional technology Recent advances in recording technology have significantly improved the recording density not only per unit area but also per unit volume. There is a strong desire for the practical application of vapor-deposited tapes and the like that have magnetic recording layers as magnetic recording layers. Therefore, recently, the importance of research on tribology to deepen our understanding of friction, wear, etc. that occurs at sliding interfaces has been recognized, and development is progressing in various fields [Journal of the Society of Television Engineers, Vow, 40, 56 (1986)] 4
72 pages].

第2図は従来の磁気記録媒体の拡大断面図である。第2
図に於て、1はポリエチレンテレフタレート、ポリイミ
ド等の高分子フィルムで必要に応じて、微粒子化した表
面を付与したもの等〔特開昭59−207422号公報
、特開昭69−121631号公号公報用いられる。2
はCo −N1−0斜め蒸着膜、 Co−0r 、 G
o−Or−Wb等の垂直磁化膜等の磁気記録層で、3は
保護層で4はバックコート層で、炭素粉末、炭化カルシ
ウム粉末等の粒子を含んだ樹脂層で主として走行性を改
善するために保護層だけで不十分な場合にはよく設けら
れている。
FIG. 2 is an enlarged sectional view of a conventional magnetic recording medium. Second
In the figure, 1 is a polymer film made of polyethylene terephthalate, polyimide, etc., which is provided with a finely divided surface if necessary [JP-A-59-207422, JP-A-69-121631] Publication is used. 2
is Co-N1-0 obliquely deposited film, Co-0r, G
A magnetic recording layer such as a perpendicular magnetization film such as o-Or-Wb, 3 is a protective layer, and 4 is a back coat layer, which is a resin layer containing particles such as carbon powder and calcium carbide powder, which mainly improves running properties. Therefore, it is often provided when a protective layer alone is insufficient.

従来保護層は特開昭54−113303号公報に開示さ
れている脂肪酸金属塩の蒸着膜による耐摩耗性の改善、
特開昭57−116771号公報に開示されているイミ
ド基を有する高分子のスパッタ膜、ダイアモンド状硬質
炭素膜を用いる例(日本応用磁気学会、第46回研究会
資料)等が知られている。又潤滑目的の層として、蒸着
法。
Conventionally, the protective layer has been improved in wear resistance by a vapor-deposited film of a fatty acid metal salt disclosed in JP-A-54-113303;
Known examples include the sputtered film of a polymer having imide groups disclosed in JP-A-57-116771, and an example using a diamond-like hard carbon film (Japan Society of Applied Magnetics, 46th Research Meeting Materials). . Also, as a layer for lubricating purposes, vapor deposition method.

湿式塗布法等で脂肪酸、脂肪酸アミド等を被着するもの
(例えば特公昭56−30609号公報)は数多く試み
られている。
Many attempts have been made to coat fatty acids, fatty acid amides, etc. by wet coating methods (for example, Japanese Patent Publication No. 30609/1983).

しかしながら上記した例では、使用環境条件の拡大、合
金系磁気ヘッドに対する実用性の要求の高度化に対処し
きれないことから、組み合わせによる改善が検討されて
いて、脂肪酸金属塩の吸着層上にフルオロカーボン系の
潤滑層を設けたもの(特開昭61−120331号公報
)、硬質カーボン層の上に含フツ素潤滑油層を配したも
の(特開昭61−126627号公報)、5i−N−0
系薄膜上に潤滑層を形成したもの(特開昭61−131
231号公報)等があげられる。
However, in the above example, it is not possible to fully cope with the expansion of usage environmental conditions and the sophistication of practical requirements for alloy-based magnetic heads, so improvements are being considered by combining fluorocarbons on the adsorption layer of fatty acid metal salts. (Japanese Unexamined Patent Publication No. 61-120331), a hard carbon layer with a fluorine-containing lubricating oil layer (Japanese Unexamined Patent Application No. 61-126627), 5i-N-0
A lubricating layer is formed on a thin film of the JP-A-61-131
Publication No. 231), etc.

発明が解決しようとする課題 しかしながら、上記した構成では、高密度ディジタル記
録を合金系ヘッドで行った場合、信頼性を重視すると、
記録特性が低下するといった課題があり改善が望まれて
いた。本発明は上記した事情に鑑みなされたもので、高
密度記録特性と耐久性を共に改善した磁気記録媒体を提
供するものである。
Problems to be Solved by the Invention However, with the above configuration, when high-density digital recording is performed with an alloy head, if reliability is emphasized,
There was a problem that recording characteristics deteriorated, and improvements were desired. The present invention has been made in view of the above-mentioned circumstances, and it is an object of the present invention to provide a magnetic recording medium that has improved both high-density recording characteristics and durability.

課題を解決するだめの手段 上記した課題を解決するため本発明の磁気記録媒体は、
平滑な高分子フィルム上に、非磁性層と強磁性層を積層
したもので最上部に位置する非磁性層がC,N、B、0
から選ばれた注入層による突起を有するようにしたもの
である。
Means for Solving the Problems In order to solve the above problems, the magnetic recording medium of the present invention comprises:
A non-magnetic layer and a ferromagnetic layer are laminated on a smooth polymer film, and the top non-magnetic layer is C, N, B, 0.
The protrusion is formed by an injection layer selected from the following.

作用 本発明の磁気記録媒体は上記した構成により、強磁性層
が微粒子化され雑音が改良され、突起形成により接触面
積が小さくなることで耐久性が改善される一方、逆に磁
気的なムラが生じ雑音が増える悪影響は最小にすること
ができる。かつ、注入層による硬い突起を均一に構成で
きるので、突起高さを低くしても耐久性を改善できるの
で短波長域の出力低下も極小にできる。
Effect The magnetic recording medium of the present invention has the above-described structure, which improves noise by making the ferromagnetic layer finer, and improves durability by reducing the contact area by forming protrusions, but conversely reduces magnetic unevenness. The negative effects of increased noise can be minimized. Furthermore, since the hard protrusions formed by the injection layer can be formed uniformly, durability can be improved even if the protrusion height is lowered, and the drop in output in the short wavelength range can also be minimized.

実施例 以下、図面を8照しながら本発明の一実施例について詳
しく説明する。第1図は本発明の一実施例の磁気記録媒
体の拡大断面図で、第1図で、6はポリエチレンナフタ
レート、ポリフェニレンサルファイド、ポリエーテルエ
ーテルケトン、ポリアミド、ポリイミド等の高分子フィ
ルムで、表面性の良好な平均粗さは20人〜50人、最
大粗さ40入〜1oO人の範囲の平滑なものが好ましい
EXAMPLE Hereinafter, an example of the present invention will be described in detail with reference to the drawings. FIG. 1 is an enlarged cross-sectional view of a magnetic recording medium according to an embodiment of the present invention. In FIG. It is preferable to have a smooth material with a good average roughness of 20 to 50 grains and a maximum roughness of 40 to 10 grains.

6はAJ 、 Si 、 Ti 、 Or等の非磁性層
で、電子ビーム蒸着法、イオンブレーティング法、高周
波スパッタリング法等で形成した160人から500人
の範囲の膜厚のものが好ましい。
Reference numeral 6 denotes a nonmagnetic layer of AJ, Si, Ti, Or, etc., which is preferably formed by an electron beam evaporation method, an ion blating method, a high frequency sputtering method, etc. and has a thickness in the range of 160 to 500 layers.

7は強磁性層でGo 、 Go−Ti 、 Go−Cr
 、 G。
7 is a ferromagnetic layer of Go, Go-Ti, Go-Cr
, G.

−O、Go−W 、 Go−Or−Nb 、 Co −
Ni−0等で垂直磁化膜、面内磁化膜いずれでもよく、
同一の構成としても、異なる構成としてもよく、層数に
ついては2層から5層の範囲が好ましい。
-O, Go-W, Go-Or-Nb, Co-
Either a perpendicular magnetization film or an in-plane magnetization film of Ni-0 etc. may be used.
The structure may be the same or different, and the number of layers is preferably in the range of 2 to 5 layers.

8は非磁性層の最上部のもので、この層にはC1B、N
、Oのいずれかの元素のイオン注入層から成る突起9を
もち、その突起の高さは60人から200人で、密度は
106〜3X10’個/−が好ましい。107個/、−
イ以下ではC/Nは良いが合金系ヘッドの材料の種項に
よっては耐久性が悪化し、3×109個/、4以上では
雑音が増加しC/yを記録波長Q、611m以下では3
dB以上の低下を引き起すことで好ましい範囲が存在す
る。10はプラズマ重合膜、ダイヤモンド状炭素膜、脂
肪酸、パーフルオロカルボン酸等の保護潤滑層である。
8 is the topmost nonmagnetic layer, and this layer contains C1B, N
, O, the height of the projections is preferably 60 to 200, and the density is preferably 10 6 to 3×10′/−. 107 pieces/, -
The C/N is good below 1, but the durability deteriorates depending on the material of the alloy head. Above 4, the noise increases.
There is a preferred range that causes a reduction of dB or more. 10 is a protective lubricating layer made of plasma polymerized film, diamond-like carbon film, fatty acid, perfluorocarboxylic acid, or the like.

本発明はテープ状で実施する場合は、バックコート層の
配役、ディスク状の場合は上記した構成をもう一方の面
にも配設する等は適宜選択すればよい。以下更に具体的
な例について比較例との対比で説明する。
When the present invention is carried out in the form of a tape, the arrangement of the back coat layer, and in the case of the form of a disk, the above-mentioned structure may be arranged on the other side as well, etc. may be selected as appropriate. More specific examples will be described below in comparison with comparative examples.

実施例−1 厚み9B7z!11.平均粗さ25人、最大粗さ60人
の平滑なポリエチレンテレフタレートフィルム上に、ム
gを30OA電子ビ一ム蒸着し、更にその上に直径1m
の円筒キャンに沿わせ、最小入射角48度、酸素分圧5
 X 105(Torr)で、Go−Ni(Co:ao
wt%)を50OA電子ビ一ム蒸着した。以下同様にA
J5を30OA 、 Go −Niを500人、 AI
を3ooAM着し、Nイオンを13 sxvに加速し6
5μA/l’!iで直径0.7μの突起を5×106ケ
/、−4の密度で形成した。突起高さは70人である。
Example-1 Thickness 9B7z! 11. On a smooth polyethylene terephthalate film with an average roughness of 25 mm and a maximum roughness of 60 mm, 30 OA of mug was deposited using an electron beam, and then a 1 m diameter layer was deposited on top of it.
along the cylindrical can, minimum angle of incidence 48 degrees, oxygen partial pressure 5
X 105 (Torr), Go-Ni (Co:ao
wt%) was deposited by 50OA electron beam evaporation. Similarly, A
30OA of J5, 500 people of Go-Ni, AI
Arrived at 3ooAM, N ions were accelerated to 13 sxv, and 6
5μA/l'! Protrusions with a diameter of 0.7μ were formed at a density of 5×10 6 /, -4. The height of the protrusion is 70 people.

この上に更にGo−NiをSOO人蒸着し、その上にラ
ウリルアミンのプラズマ重合膜を90人配シ、ポリエチ
レンテレフタレートのもう一方の面にQ、4μmのバッ
クコート層を配し、8ミリ幅の磁気テープを試作した。
On top of this, Go-Ni was further deposited by SOO, and on top of that, a plasma polymerized film of lauryl amine was placed on 90 layers, and on the other side of the polyethylene terephthalate, a back coat layer of Q, 4 μm was placed, and the width was 8 mm. A prototype magnetic tape was produced.

実施例−2 厚み12μmの平均粗さ20人、最大粗さ60人の平滑
ナポリエチレンナフタレートフイルム上に、Slを高周
波スパッタリング法により、360人配し、その上に高
周波スパッタリング法により、Co −Cr垂直磁化膜
(co7swt%)を500人形成し、更にSlを36
0人配しCイオンを15Kvニ加速し、60 pk/c
Aで直径0.7μmの突起を3×107ケ/−の密度で
形成した(突起高さ100人)その上にGo −Or垂
直磁化膜500人を配し、更にその上にメタンを放電加
速しダイヤモンド状炭素膜を86人配し、その上にパー
フルオロアラキン酸を6o人真空蒸着し、凭インチの磁
気テープを試作した。
Example 2 360 layers of Sl were deposited on a smooth napolyethylene naphthalate film with a thickness of 12 μm with an average roughness of 20 layers and a maximum roughness of 60 layers using a high frequency sputtering method, and Co − 500 layers of Cr perpendicular magnetization film (co7swt%) were formed, and 36 layers of Sl were further formed.
0 manned C ions accelerated to 15Kv, 60 pk/c
In A, protrusions with a diameter of 0.7 μm were formed at a density of 3 x 107/- (protrusion height 100), on which 500 Go-Or perpendicular magnetization films were placed, and methane was further discharge-accelerated on top of it. 86 diamond-like carbon films were placed on top of the diamond-like carbon film, and 6 layers of perfluoroarachidic acid were vacuum-deposited on top of the diamond-like carbon film, to produce a prototype magnetic tape with an inch diameter.

比較例−1 厚み98μmのポリエチレンテレフタレートフィルム上
に直径200人ので102微粒子を2X10’個/−配
し、その上に実施例−1と同様の条件でAlとGo −
Ni を交互に電子ビーム蒸着し、同様の保護潤滑剤層
、バックコート層を配した8ミリ幅の磁気テープを試作
した。
Comparative Example-1 On a polyethylene terephthalate film with a thickness of 98 μm, 2×10′/- of 102 particles with a diameter of 200 particles were placed, and on top of that, Al and Go − were placed under the same conditions as in Example-1.
An 8 mm wide magnetic tape was experimentally produced by alternately depositing Ni with electron beams and disposing a similar protective lubricant layer and back coat layer.

比較例−2 実施例−2と同一のフィルムを用い、その上に直径16
0人のCr2O5微粒子を3×107個/−配し、その
上にSlとGo −Or 垂直磁化膜、ダイヤモンド状
炭素膜、パーフルオロアラキン酸を同じ条件で配し、A
インチの磁気テープを試作した。
Comparative Example-2 Using the same film as Example-2, a film with a diameter of 16
0 Cr2O5 fine particles were placed at 3 x 107/-, and on top of that, Sl and Go-Or perpendicular magnetization films, diamond-like carbon films, and perfluoroarachidic acid were placed under the same conditions.
Prototype of inch magnetic tape was produced.

上記したテープを用い合金系ヘッドを変えてディジタル
記録を行い、エラー率の評価を行った。
Digital recording was performed using the above-mentioned tape with different alloy heads, and the error rate was evaluated.

改造した8ミリビデオを用い、トラックピッチ10μm
、ピット長0.23μmのディジタル記録を行い、エラ
ー率を測定した結果と、改造した机下[VTRAU−6
50型を用いトラックピッチ14μm、ビット長0.2
μmのディジタル記録を行いエラー率を測定した結果を
表にまとめて示した。
Using a modified 8mm video, track pitch 10μm
, digital recording was performed with a pit length of 0.23 μm, and the error rate was measured.
50 type, track pitch 14 μm, bit length 0.2
The results of digital recording in μm and measurement of error rates are summarized in a table.

(以下余 白) 発明の効果 以上のように本発明によれば、高密度ディジタル記録に
於て高信頼性を確保できるといったすぐれた効果がある
(Hereinafter referred to as blank spaces) Effects of the Invention As described above, the present invention has the excellent effect of ensuring high reliability in high-density digital recording.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明の一実施例の磁気記録媒体の拡大断面図
、第2図は従来の磁気記録媒体の拡大断面図である。 5・・・・・・高分子フィルム、6・・・・・・非磁性
層、7・・・・・・強磁性層、8・・・・・・非磁性層
、9・・・・・・イオン注入突起、10・・・・・・保
護潤滑層。 代理人の氏名 弁理士 粟 野 重 孝 ほか1名方−
−−所分3フイルム
FIG. 1 is an enlarged sectional view of a magnetic recording medium according to an embodiment of the present invention, and FIG. 2 is an enlarged sectional view of a conventional magnetic recording medium. 5...Polymer film, 6...Nonmagnetic layer, 7...Ferromagnetic layer, 8...Nonmagnetic layer, 9... - Ion implantation protrusion, 10...protective lubricant layer. Name of agent: Patent attorney Shigetaka Awano and one other person
---3 films

Claims (1)

【特許請求の範囲】[Claims] 平滑な高分子フィルム上に、非磁性層と強磁性層を積層
したもので、最上部に位置する非磁性層がC、N、B、
Oから選ばれた注入層による突起を有することを特徴と
する磁気記録媒体。
A non-magnetic layer and a ferromagnetic layer are laminated on a smooth polymer film, and the top non-magnetic layer is C, N, B,
A magnetic recording medium characterized by having protrusions formed by an injection layer selected from O.
JP21544088A 1988-08-30 1988-08-30 Magnetic recording medium Pending JPH0262715A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP21544088A JPH0262715A (en) 1988-08-30 1988-08-30 Magnetic recording medium

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP21544088A JPH0262715A (en) 1988-08-30 1988-08-30 Magnetic recording medium

Publications (1)

Publication Number Publication Date
JPH0262715A true JPH0262715A (en) 1990-03-02

Family

ID=16672385

Family Applications (1)

Application Number Title Priority Date Filing Date
JP21544088A Pending JPH0262715A (en) 1988-08-30 1988-08-30 Magnetic recording medium

Country Status (1)

Country Link
JP (1) JPH0262715A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7967586B2 (en) 2007-10-21 2011-06-28 Yamada Manufacturing Co., Ltd. Method for manufacturing trochoid pump and trochoid pump obtained
US7967585B2 (en) 2007-10-21 2011-06-28 Yamada Manufacturing Co., Ltd. Method for manufacturing trochoid pump and trochoid pump obtained

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7967586B2 (en) 2007-10-21 2011-06-28 Yamada Manufacturing Co., Ltd. Method for manufacturing trochoid pump and trochoid pump obtained
US7967585B2 (en) 2007-10-21 2011-06-28 Yamada Manufacturing Co., Ltd. Method for manufacturing trochoid pump and trochoid pump obtained

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