JPH02110829A - Production of magnetic recording medium - Google Patents
Production of magnetic recording mediumInfo
- Publication number
- JPH02110829A JPH02110829A JP26453188A JP26453188A JPH02110829A JP H02110829 A JPH02110829 A JP H02110829A JP 26453188 A JP26453188 A JP 26453188A JP 26453188 A JP26453188 A JP 26453188A JP H02110829 A JPH02110829 A JP H02110829A
- Authority
- JP
- Japan
- Prior art keywords
- magnetic recording
- recording layer
- recording medium
- lubricating agent
- layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000005291 magnetic effect Effects 0.000 title claims abstract description 36
- 238000004519 manufacturing process Methods 0.000 title claims description 8
- 239000000314 lubricant Substances 0.000 claims abstract description 19
- 238000010884 ion-beam technique Methods 0.000 claims abstract description 10
- 230000005294 ferromagnetic effect Effects 0.000 claims abstract description 9
- 239000002184 metal Substances 0.000 claims description 8
- 239000010409 thin film Substances 0.000 claims description 8
- 239000000470 constituent Substances 0.000 claims description 2
- 230000008021 deposition Effects 0.000 claims 2
- 238000007740 vapor deposition Methods 0.000 abstract description 3
- 238000006243 chemical reaction Methods 0.000 abstract description 2
- 239000010408 film Substances 0.000 description 14
- 238000000034 method Methods 0.000 description 12
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 6
- 229910052799 carbon Inorganic materials 0.000 description 6
- 230000000694 effects Effects 0.000 description 4
- 239000010419 fine particle Substances 0.000 description 4
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 3
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 3
- -1 polyethylene terephthalate Polymers 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- 230000000052 comparative effect Effects 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 2
- 235000014113 dietary fatty acids Nutrition 0.000 description 2
- 229930195729 fatty acid Natural products 0.000 description 2
- 239000000194 fatty acid Substances 0.000 description 2
- 150000004665 fatty acids Chemical class 0.000 description 2
- SZVJSHCCFOBDDC-UHFFFAOYSA-N ferrosoferric oxide Chemical compound O=[Fe]O[Fe]O[Fe]=O SZVJSHCCFOBDDC-UHFFFAOYSA-N 0.000 description 2
- 150000002500 ions Chemical class 0.000 description 2
- NUJOXMJBOLGQSY-UHFFFAOYSA-N manganese dioxide Chemical compound O=[Mn]=O NUJOXMJBOLGQSY-UHFFFAOYSA-N 0.000 description 2
- 229920000139 polyethylene terephthalate Polymers 0.000 description 2
- 239000005020 polyethylene terephthalate Substances 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- ZTSDOGSKTICNPQ-UHFFFAOYSA-N 2,2,3,3,4,4,5,5,6,6,7,7,8,8,9,9,10,10,11,11,12,12,13,13,14,14,15,15,16,16,17,17,18,18,18-pentatriacontafluorooctadecanoic acid Chemical group OC(=O)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)F ZTSDOGSKTICNPQ-UHFFFAOYSA-N 0.000 description 1
- 239000004925 Acrylic resin Substances 0.000 description 1
- 229920000178 Acrylic resin Polymers 0.000 description 1
- 229910020630 Co Ni Inorganic materials 0.000 description 1
- 229910002440 Co–Ni Inorganic materials 0.000 description 1
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 1
- NTIZESTWPVYFNL-UHFFFAOYSA-N Methyl isobutyl ketone Chemical compound CC(C)CC(C)=O NTIZESTWPVYFNL-UHFFFAOYSA-N 0.000 description 1
- UIHCLUNTQKBZGK-UHFFFAOYSA-N Methyl isobutyl ketone Natural products CCC(C)C(C)=O UIHCLUNTQKBZGK-UHFFFAOYSA-N 0.000 description 1
- VCUFZILGIRCDQQ-KRWDZBQOSA-N N-[[(5S)-2-oxo-3-(2-oxo-3H-1,3-benzoxazol-6-yl)-1,3-oxazolidin-5-yl]methyl]-2-[[3-(trifluoromethoxy)phenyl]methylamino]pyrimidine-5-carboxamide Chemical compound O=C1O[C@H](CN1C1=CC2=C(NC(O2)=O)C=C1)CNC(=O)C=1C=NC(=NC=1)NCC1=CC(=CC=C1)OC(F)(F)F VCUFZILGIRCDQQ-KRWDZBQOSA-N 0.000 description 1
- 229910018104 Ni-P Inorganic materials 0.000 description 1
- 229910018536 Ni—P Inorganic materials 0.000 description 1
- 239000004696 Poly ether ether ketone Substances 0.000 description 1
- 239000004952 Polyamide Substances 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- 239000004734 Polyphenylene sulfide Substances 0.000 description 1
- 239000004809 Teflon Substances 0.000 description 1
- 229920006362 Teflon® Polymers 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 150000001408 amides Chemical class 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- WUKWITHWXAAZEY-UHFFFAOYSA-L calcium difluoride Chemical compound [F-].[F-].[Ca+2] WUKWITHWXAAZEY-UHFFFAOYSA-L 0.000 description 1
- 229910001634 calcium fluoride Inorganic materials 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 239000007822 coupling agent Substances 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000005566 electron beam evaporation Methods 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 229910052731 fluorine Inorganic materials 0.000 description 1
- 239000011737 fluorine Substances 0.000 description 1
- 229910021385 hard carbon Inorganic materials 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000003475 lamination Methods 0.000 description 1
- 239000010687 lubricating oil Substances 0.000 description 1
- 230000005415 magnetization Effects 0.000 description 1
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 125000005010 perfluoroalkyl group Chemical class 0.000 description 1
- 229920003207 poly(ethylene-2,6-naphthalate) Polymers 0.000 description 1
- 229920002647 polyamide Polymers 0.000 description 1
- 229920000570 polyether Polymers 0.000 description 1
- 229920002530 polyetherether ketone Polymers 0.000 description 1
- 239000011112 polyethylene naphthalate Substances 0.000 description 1
- 229920006290 polyethylene naphthalate film Polymers 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 229920006254 polymer film Polymers 0.000 description 1
- 238000006116 polymerization reaction Methods 0.000 description 1
- 229920000069 polyphenylene sulfide Polymers 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 230000002250 progressing effect Effects 0.000 description 1
- 238000007763 reverse roll coating Methods 0.000 description 1
- 150000003839 salts Chemical class 0.000 description 1
- 229910000702 sendust Inorganic materials 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 238000010025 steaming Methods 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
Abstract
Description
【発明の詳細な説明】
産業上の利用分野
本発明は、高密度磁気記録に適する磁気記録媒体の製造
方法に関する。DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention relates to a method for manufacturing a magnetic recording medium suitable for high-density magnetic recording.
従来の技術
磁気記録密度を高めようとの要求は継続的にあって、最
近では、高密度記録に適する強磁性金属薄膜を磁気記録
層とする磁気記録媒体の実用化が強く望まれている〔ア
イイーイーイートランザクションズオンマグネティクス
（ＩＩＮＮＣＴＲＡＮＳＡＣＴＩＯＮＳ ＯＮ Ｍ
ＡＧＮＩＣＴＩＣ８）ｖｏｌ。BACKGROUND OF THE INVENTION There is a continuous demand for increasing magnetic recording density, and recently there has been a strong desire to put into practical use magnetic recording media whose magnetic recording layer is a ferromagnetic metal thin film suitable for high-density recording. IEEEE Transactions on Magnetics (IINNCTRANSACTIONS ON M
AGNICTIC8) vol.
ＭＡＧ−２１、鳥−３，ｐ、ｐ、１２１７〜１２２０（
１９８５） ）。MAG-21, bird-3, p, p, 1217-1220 (
1985) ).
強磁性金属薄膜群の中で有望なものは、Ｃｏ−０ｒ等の
垂直磁化膜〔特公昭６８−９１号公報、特開昭６１−１
２０３３１号公報〕やＣｏ−Ｎｉ。Among the ferromagnetic metal thin films, the most promising ones are perpendicularly magnetized films such as Co-0r [Japanese Patent Publication No. 68-91, JP-A-61-1
No. 20331] and Co-Ni.
Ｇｏ−Ｎｉ−０等の斜め蒸着膜や湿式めっき膜〔特公昭
４１−１９３８９号公報、特開昭６３−４２０１０号公
報〕等があり、現在主たる改善検討は高密度磁気記録特
性を低下させないか、低下量を実用上無視できるような
保護潤滑層の形成にあり、一般によく知られるメチルイ
ソブチルケトン、メタノール、トルエン等の溶剤中に潤
滑剤を含ませて、塗布乾燥する方法〔特開昭６７−１７
９９４８号公報、特開昭６１−１７８７１８号公報〕で
は、スピンコード法、デイツプ法、リバースロールコー
ト法等の方法の如何を問わず、潤滑剤の種類と量と溶液
をうま〈組み合わせれば、磁気ディスク、磁気テープの
いずれの形態でも摩擦、摩耗特性を改善できる。There are obliquely deposited films such as Go-Ni-0 and wet-plated films (Japanese Patent Publication No. 41-19389, Japanese Patent Application Laid-open No. 63-42010), and the main improvement studies are currently focused on whether they will reduce the high-density magnetic recording characteristics. , a method in which a lubricant is impregnated in a generally well-known solvent such as methyl isobutyl ketone, methanol, toluene, etc., and applied and dried [JP-A-67] -17
No. 9948, Japanese Patent Application Laid-Open No. 61-178718], regardless of the spin code method, dip method, reverse roll coating method, etc., if the type and amount of lubricant and solution are appropriately combined, Friction and wear characteristics can be improved for both magnetic disks and magnetic tapes.
発明が解決しようとする課題
更に、最近では一層耐久性を向上すべく提案されている
酸化物と潤滑剤層の組み合わせ〔特開昭６１−１５１８
３０号公報〕スパッタ法で形成した有機薄膜と含フツ素
潤滑油層の積層〔特開昭６１−１３７２１９号公報〕等
の中で、カーボン膜と７０ロカーボン系〔特開昭６１−
１４２６２５号公報〕の組み合わせをはじめカーボン膜
の採用が磁気ディスクを中心に進んでいるが潤滑剤の均
一性、耐久性が通常法で得たものは不十分で、デイツプ
法で超音波印加する方法〔特開昭６３−１７７３１４号
公報〕やカーボン膜上にアミド系潤滑剤及びカップリン
グ剤を塗布した後加熱処理する等の改善が行われている
。しかしながらカーボン膜でも特にダイヤモンド状又は
ダイヤモンドに近いカーボン薄膜を配した上に各種の潤
滑剤を均一に付与しようとすると従来法では不十分で、
耐久性の向上に課題が残されている。本発明は上記した
事情に鑑みなされたもので、潤滑性、耐摩耗特性に優れ
た高密度磁気記録媒体を製造する方法を提供するもので
ある。Problems to be Solved by the Invention Furthermore, a combination of an oxide and a lubricant layer has recently been proposed to further improve durability [JP-A-61-1518
No. 30] Lamination of an organic thin film formed by sputtering and a fluorine-containing lubricating oil layer [JP-A-61-137219], etc., a carbon film and a 70 carbon-based [JP-A-61-1989]
The use of carbon films, including the combination described in Japanese Patent No. 142,625, is progressing mainly in magnetic disks, but the uniformity and durability of the lubricant obtained by conventional methods are insufficient, so the method of applying ultrasonic waves using the dip method has been developed. [Unexamined Japanese Patent Publication No. 63-177314] and other improvements have been made, such as applying an amide lubricant and a coupling agent on a carbon film and then subjecting it to heat treatment. However, when trying to apply various lubricants uniformly on a carbon film, especially on a diamond-shaped or diamond-like thin carbon film, conventional methods are insufficient.
Issues remain in improving durability. The present invention was made in view of the above circumstances, and provides a method for manufacturing a high-density magnetic recording medium with excellent lubricity and wear resistance.
課題を解決するための手段
上記した課題を解決するため本発明の磁気記録媒体の製
造方法は粒状突起を有する強磁性金属薄膜を磁気記録層
とし、磁気記録層に潤滑剤を配する前に磁気記録層構成
元素のイオンビームで表面処理するようにしたものであ
る。Means for Solving the Problems In order to solve the above-mentioned problems, the method for manufacturing a magnetic recording medium of the present invention uses a ferromagnetic metal thin film having granular protrusions as a magnetic recording layer, and before applying a lubricant to the magnetic recording layer. The surface is treated with an ion beam of the elements constituting the recording layer.
作用
本発明の磁気記録媒体の製造方法は上記した構成により
、磁気記録層表面が、化学的に清浄になるのと、潤滑剤
のぬれ性が均一にかつ良好に改善されることで、潤滑剤
と磁気記録層との界面での反応の均一化が促進され、耐
久性が大幅に向上することになる。Effect The method for manufacturing a magnetic recording medium of the present invention has the above-described structure, so that the surface of the magnetic recording layer becomes chemically clean and the wettability of the lubricant is uniformly and favorably improved. The uniformity of the reaction at the interface between the magnetic recording layer and the magnetic recording layer is promoted, and the durability is greatly improved.
実施例
以下、図面を参照しながら本発明に係る一実施例につい
て説明する。図は本発明の磁気記録媒体の製造方法によ
って製造される磁気記録媒体の拡大断面図である。図で
１はポリエチレンテレフタレート、ポリエチレンナフタ
レート、ポリフェニレンサルファイド、ポリエーテルエ
ーテルケトン。Embodiment Hereinafter, one embodiment of the present invention will be described with reference to the drawings. The figure is an enlarged sectional view of a magnetic recording medium manufactured by the method of manufacturing a magnetic recording medium of the present invention. In the figure, 1 is polyethylene terephthalate, polyethylene naphthalate, polyphenylene sulfide, and polyether ether ketone.
ポリアミド、ポリイミド等の高分子フィルムや、ム＃−
Ｍｇ、ムＪ−８ｉ合金等の非磁性基板から成る基板で、
２は微粒子層で５ｉｎ２．ム１２０５＋Ｂｅｄ、Ｔｉｅ
２，０ｒ２０５．ＺｒＯ□、ＭｏＣ，ＭｎＯ２。Polymer films such as polyamide, polyimide, etc.
A substrate made of a non-magnetic substrate such as Mg, Mu J-8i alloy, etc.
2 is a fine particle layer of 5in2. Mu1205+Bed, Tie
2,0r205. ZrO□, MoC, MnO2.
ＣａＦ２．テフロン粉末、アクリル樹脂ピース等ヲ塗布
したものや、プラズマ重合条件の制御により粒状突起を
形成するようにしたもの等が用いられる。３はＧｏ−Ｎ
ｉ 、０ｏ−Ｏｒ、Ｇｏ−Ｔｉ、Ｃｏ−Ｍｏ 。CaF2. Those coated with Teflon powder, acrylic resin pieces, etc., or those in which granular protrusions are formed by controlling plasma polymerization conditions are used. 3 is Go-N
i, 0o-Or, Go-Ti, Co-Mo.
Ｇｏ−Ｐ、Ｃｏ−Ｔａ、Ｇｏ−Ｗ、Ｇｏ−Ｎｉ−Ｐ。Go-P, Co-Ta, Go-W, Go-Ni-P.
Ｇｏ−Ｎｉ−０，Ｃｏ−０ｒ−Ｗｂ等の強磁性金属薄膜
で電子ビーム蒸着法、イオンブレーティング法。Electron beam evaporation method, ion blating method with ferromagnetic metal thin film such as Go-Ni-0, Co-0r-Wb.
スパッタリング法等で形成する。４はイオノビーム処理
層を模式的に示したもので、強磁性金属薄膜の構成元素
のイオンビームで表面処理したもので、目的は表面清浄
にあり、後述する例であきらかなように、ムｒイオンビ
ーム処理等に比べても作用効果に差がみられるものでイ
オンのエネルギーは６００ｖ〜ａＫＶぐらいの低い値で
特に積極的に注入するものでなく、スバ・ツタリングで
洗浄される時に注入されても同質の元素であることが重
要なのである。６は真空蒸着により得られる脂肪酸。It is formed by a sputtering method or the like. 4 schematically shows an ion beam treatment layer, in which the surface is treated with an ion beam of the constituent elements of a ferromagnetic metal thin film.The purpose is to clean the surface, and as will be clear from the example described later, There is a difference in the effects compared to beam processing, etc. The ion energy is low, around 600V to aKV, and it is not particularly aggressively implanted, and even if it is implanted when cleaning with Suba Tsutaring. It is important that the elements be of the same quality. 6 is a fatty acid obtained by vacuum deposition.
脂肪酸の金属塩、パーフルオロアルキルポリエーテル等
の潤滑剤層である。本発明はディスク・テープのいずれ
も対象となるものであるが、以下、更に具体的に磁気テ
ープの例で比較例との対比により詳しく説明する。This is a lubricant layer made of metal salts of fatty acids, perfluoroalkyl polyethers, etc. Although the present invention is applicable to both disks and tapes, it will be explained in more detail below using a magnetic tape example in comparison with a comparative example.
実施例−１
厚み１０μｍのポリエチレンテレフタレートフィルム上
に直径１６０人のＦｅ３Ｏ４微粒子を１０ケ／（μｍ）
２配し、その上に直径１ｍの円筒キャンに沿わせてＣｏ
−Ｎｉ （Ｃｏ：ａｏｗｔ％）を最小入射角４０度、酸
素分圧ｓ ｘ １ｏ−５（Ｔｏｒｒ）で電子ビーム蒸着
し１６００人のＧｏ−Ｎｉ−０膜を形成し、引き続きイ
オンビーム処理を行って、潤滑剤を蒸着した。潤滑剤は
パーフルオロステアリン酸で３ Ｘ １０−’ 〜４
Ｘ １０−’ （Ｔｏｒｒ）で、１ｏ（入／５ｅａ）の
蒸着を行い均一膜厚換算で４０人配し、その後８ミリ幅
のテープに加工した。Example-1 10 pieces/(μm) of Fe3O4 fine particles with a diameter of 160 on a polyethylene terephthalate film with a thickness of 10 μm
Co
-Ni (Co: aowt%) was electron beam evaporated at a minimum incident angle of 40 degrees and oxygen partial pressure s x 1o-5 (Torr) to form a 1600-layer Go-Ni-0 film, followed by ion beam treatment. Then, a lubricant was deposited. The lubricant is perfluorostearic acid with 3 x 10-' to 4
Vapor deposition was carried out at 10 (input/5 ea) at X 10-' (Torr), 40 people were placed in terms of uniform film thickness, and the tape was then processed into a tape having a width of 8 mm.
実施例−２
厚み７μｍのポリエチレンナフタレートフィルム上に直
径１００人のＣｒ２Ｏ，微粒子を１０ケ／（μｍ）２配
し、その上に直径６０ｍの円筒キャンに沿わせて、Ｇｏ
−Ｏｒ （Ｏｒ ： ２０ｗｔ４）をターゲットにして
１３．ｓｅ（ＭＨｚ）ｉ （ＫＷ）ムｒ：９Ｘ１０−’
（Ｔｏｒｒ）でスパッタリングして、１８００ÅのＣｏ
−０ｒ垂直磁化膜を形成し、イオンビーム処理後、モン
テフルオス社裂のパーフルオロポリエーテ゛ル１フォン
プリンＺ−２５”を４Ｘ１０−５〜６Ｘ１０−５（Ｔｏ
ｒｒ）の真空中で０．８〜１．２（入／５ｅａ）で蒸着
し、約４０への潤滑剤層を形成して、８ミリ幅のテープ
に加工した。Example-2 On a polyethylene naphthalate film with a thickness of 7 μm, 10 pieces/(μm) of Cr2O fine particles with a diameter of 100 were placed, and Go
-Or (Or: 20wt4) as a target 13. se (MHz) i (KW) mur: 9X10-'
(Torr) and sputtered with 1800 Å Co
-0r perpendicular magnetization film was formed, and after ion beam treatment, 4X10-5 to 6X10-5 (To
rr) vacuum at 0.8 to 1.2 (in/5ea) to form a lubricant layer of about 40 mm and processed into an 8 mm wide tape.
尚比較例についても対応条件で実行した。The comparative example was also run under the corresponding conditions.
上記したテープを改造した８ミリビデオにより評価した
。ギャップ長０．２μｍのメタルインギャップ型のセン
ダストヘッドによりトラック幅１０μｍでノ・イバンド
仕様でのＱ／Ｎを評価した結果についてイオンビーム処
理条件と対比して表にまとめて示した。夫々の環境で使
用してＣ／Ｎが初期に対して２（ｄＢ）低下するまでの
スチル耐久を比較した。Evaluation was made using an 8mm video modified from the tape described above. The results of evaluating the Q/N in no-band specifications with a track width of 10 μm using a metal-in-gap Sendust head with a gap length of 0.2 μm are summarized in a table in comparison with the ion beam processing conditions. The still durability was compared until the C/N decreased by 2 (dB) from the initial value when used in each environment.
尚、Ｃｏ−１ｒ膜上にダイヤモンド状硬質炭素膜を８０
人蒸した上で潤滑剤を配したものは初期Ｃ／Ｎが−０，
７（ｄＢ） でメチル耐久は６０〜６０分であること
からみても本発明の有価値性は更に短波長になれば大き
くなるといえる。In addition, a diamond-like hard carbon film was deposited on the Co-1r film at 80°C.
The initial C/N of the one with lubricant applied after steaming is -0,
Considering that the methyl durability is 60 to 60 minutes at 7 (dB), it can be said that the value of the present invention increases as the wavelength becomes even shorter.
発明の効果
以上のように本発明によれば、高密度記録性能に優れた
耐久性のある磁気記録媒体が製造できるといっ九すぐれ
た効果がある。Effects of the Invention As described above, the present invention has an excellent effect in that a durable magnetic recording medium with excellent high-density recording performance can be manufactured.
図は本発明の一実施例により製造される磁気記録媒体の
拡大断面図である。
１・・・・・・基板、２・・・・・微粒子層、３・・・
・・・強磁性金属薄膜、４・・・・・・イオンビーム処
理層、５・・・・・・潤滑剤層。The figure is an enlarged sectional view of a magnetic recording medium manufactured according to an embodiment of the present invention. 1... Substrate, 2... Fine particle layer, 3...
...Ferromagnetic metal thin film, 4...Ion beam treatment layer, 5...Lubricant layer.
Claims (1)
気記録媒体の潤滑剤蒸着前に蒸着面を構成元素のイオン
ビーム処理することを特徴とする磁気記録媒体の製造方
法。1. A method for producing a magnetic recording medium, the method of manufacturing a magnetic recording medium comprising, as a magnetic recording layer, a ferromagnetic metal thin film having granular protrusions, the deposition surface of which is subjected to an ion beam treatment of a constituent element before lubricant deposition.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP26453188A JPH02110829A (en) | 1988-10-20 | 1988-10-20 | Production of magnetic recording medium |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP26453188A JPH02110829A (en) | 1988-10-20 | 1988-10-20 | Production of magnetic recording medium |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02110829A true JPH02110829A (en) | 1990-04-24 |
Family
ID=17404554
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP26453188A Pending JPH02110829A (en) | 1988-10-20 | 1988-10-20 | Production of magnetic recording medium |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02110829A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0467446A (en) * | 1990-07-05 | 1992-03-03 | Sharp Corp | Production of magneto-optical disk |
| US6214479B1 (en) * | 1996-10-23 | 2001-04-10 | Kabushiki Kaisha Toyota Chuo Kenkyusho | Covered member and method of producing the same |
-
1988
- 1988-10-20 JP JP26453188A patent/JPH02110829A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0467446A (en) * | 1990-07-05 | 1992-03-03 | Sharp Corp | Production of magneto-optical disk |
| US6214479B1 (en) * | 1996-10-23 | 2001-04-10 | Kabushiki Kaisha Toyota Chuo Kenkyusho | Covered member and method of producing the same |
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