JPH01176311A - Magnetic recording medium - Google Patents
Magnetic recording mediumInfo
- Publication number
- JPH01176311A JPH01176311A JP33453787A JP33453787A JPH01176311A JP H01176311 A JPH01176311 A JP H01176311A JP 33453787 A JP33453787 A JP 33453787A JP 33453787 A JP33453787 A JP 33453787A JP H01176311 A JPH01176311 A JP H01176311A
- Authority
- JP
- Japan
- Prior art keywords
- film
- magnetic recording
- metal thin
- ferromagnetic metal
- thin film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000005291 magnetic effect Effects 0.000 title claims description 24
- 230000005294 ferromagnetic effect Effects 0.000 claims abstract description 25
- 229920006254 polymer film Polymers 0.000 claims abstract description 6
- 239000010409 thin film Substances 0.000 claims description 23
- 239000002184 metal Substances 0.000 claims description 21
- 229910052751 metal Inorganic materials 0.000 claims description 21
- 239000000314 lubricant Substances 0.000 abstract description 5
- 230000001681 protective effect Effects 0.000 abstract description 5
- -1 polyethylene terephthalate Polymers 0.000 abstract description 4
- 229920000139 polyethylene terephthalate Polymers 0.000 abstract description 3
- 239000005020 polyethylene terephthalate Substances 0.000 abstract description 3
- 229910020630 Co Ni Inorganic materials 0.000 abstract 1
- 229910002440 Co–Ni Inorganic materials 0.000 abstract 1
- 229910018553 Ni—O Inorganic materials 0.000 abstract 1
- 238000010030 laminating Methods 0.000 abstract 1
- 239000010408 film Substances 0.000 description 18
- 239000010410 layer Substances 0.000 description 12
- 230000000052 comparative effect Effects 0.000 description 7
- 230000005415 magnetization Effects 0.000 description 5
- 238000005566 electron beam evaporation Methods 0.000 description 4
- 238000004544 sputter deposition Methods 0.000 description 4
- 239000000463 material Substances 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 description 2
- 239000000178 monomer Substances 0.000 description 2
- 239000011368 organic material Substances 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- ZTSDOGSKTICNPQ-UHFFFAOYSA-N 2,2,3,3,4,4,5,5,6,6,7,7,8,8,9,9,10,10,11,11,12,12,13,13,14,14,15,15,16,16,17,17,18,18,18-pentatriacontafluorooctadecanoic acid Chemical compound OC(=O)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)F ZTSDOGSKTICNPQ-UHFFFAOYSA-N 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 1
- 239000004695 Polyether sulfone Substances 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- 239000004734 Polyphenylene sulfide Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910003481 amorphous carbon Inorganic materials 0.000 description 1
- 229910000808 amorphous metal alloy Inorganic materials 0.000 description 1
- 239000011247 coating layer Substances 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 235000014113 dietary fatty acids Nutrition 0.000 description 1
- 208000028659 discharge Diseases 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 229930195729 fatty acid Natural products 0.000 description 1
- 239000000194 fatty acid Substances 0.000 description 1
- 150000004665 fatty acids Chemical class 0.000 description 1
- 239000010419 fine particle Substances 0.000 description 1
- 229910052731 fluorine Inorganic materials 0.000 description 1
- 239000011737 fluorine Substances 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 229910021385 hard carbon Inorganic materials 0.000 description 1
- FFUAGWLWBBFQJT-UHFFFAOYSA-N hexamethyldisilazane Chemical compound C[Si](C)(C)N[Si](C)(C)C FFUAGWLWBBFQJT-UHFFFAOYSA-N 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 239000004816 latex Substances 0.000 description 1
- 229920000126 latex Polymers 0.000 description 1
- 230000005381 magnetic domain Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 229910052961 molybdenite Inorganic materials 0.000 description 1
- CWQXQMHSOZUFJS-UHFFFAOYSA-N molybdenum disulfide Chemical compound S=[Mo]=S CWQXQMHSOZUFJS-UHFFFAOYSA-N 0.000 description 1
- 229910052982 molybdenum disulfide Inorganic materials 0.000 description 1
- 229910052758 niobium Inorganic materials 0.000 description 1
- 239000005416 organic matter Substances 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 229920003207 poly(ethylene-2,6-naphthalate) Polymers 0.000 description 1
- 229920006393 polyether sulfone Polymers 0.000 description 1
- 239000011112 polyethylene naphthalate Substances 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 238000006116 polymerization reaction Methods 0.000 description 1
- 229920000069 polyphenylene sulfide Polymers 0.000 description 1
- 229910052703 rhodium Inorganic materials 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
Landscapes
- Magnetic Record Carriers (AREA)
Abstract
Description
【発明の詳細な説明】
産業上の利用分野
本発明は、高密度磁気記録に適する強磁性金属薄膜を磁
気記録層とする磁気記録媒体に関する。DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention relates to a magnetic recording medium whose magnetic recording layer is a ferromagnetic metal thin film suitable for high-density magnetic recording.
従来の技術
従来より、広く磁気記録層として用いられている塗布型
の磁性層は、今後益々短波長化する磁気記録において、
十分なC/Nが確保しにくくなってきティる。代ッテ、
Go−Ni−0、Go−Or等の強磁性金属薄膜を磁気
記録層とする磁気記録媒体の実用化が期待されている[
アイイーイーイートランザクションズ オン マグネテ
ィクス(IEEE TRANSACTIONS O
N MAGNETIC3)VO,[、MAG−21、
No−3,P、P、1217〜1220(1985)参
照コ。Conventional technology Coating-type magnetic layers, which have been widely used as magnetic recording layers, are useful in magnetic recording, where wavelengths will become shorter and shorter in the future.
It becomes difficult to secure sufficient C/N. Daitte,
The practical application of magnetic recording media with magnetic recording layers made of ferromagnetic metal thin films such as Go-Ni-0 and Go-Or is expected [
IEEE TRANSACTIONS ON MAGNETICS
N MAGNETIC3) VO, [, MAG-21,
See No-3, P, P, 1217-1220 (1985).
かかる構成の磁気記録媒体の実用化には、合金系の磁気
ヘッドとの高速摺動での耐久性、相性の確保が必要で、
その点に関しての提案が増加してきている[例えば、特
開昭53−88704号公報、同69−121631号
公報、同69−171026号公報、同62−1979
17号公報等参照]。In order to put such a magnetic recording medium into practical use, it is necessary to ensure durability and compatibility with high-speed sliding with alloy-based magnetic heads.
Proposals regarding this point are increasing [for example, Japanese Patent Application Laid-open No. 53-88704, Japanese Patent Application Publication No. 69-121631, Japanese Patent Application Publication No. 69-171026, Japanese Patent Application Laid-open No. 62-1979.
See Publication No. 17, etc.].
中でも、磁気記録層に微細な凹凸を形成する方法が一歩
実用化に向けて先行している[アイイーイーイー トラ
ンザクションズ オン マグネティクス(IEEE T
RANSACTIONS ON MAGNETIC5)
vol 、 MAe−21、No −rs 、 P、P
、 1524〜1528(1985)参照]。Among these methods, a method of forming fine irregularities on the magnetic recording layer is one step ahead of practical application [IEEE Transactions on Magnetics (IEEE T
RANSACTIONS ON MAGNETIC5)
vol, MAe-21, No-rs, P, P
, 1524-1528 (1985)].
発明が解決しようとする問題点
しかしながら、高分子フィルム上にム#2051Sin
2. CaO、高分子ラテックス等を塗布固定した微粒
子塗布層を配した上に電子ビーム蒸着法、スバッタリン
グ法等で、強磁性金属薄膜を配し、更にその上に保護潤
滑層を配した磁気記録媒体は、記録波長が0.6μm〜
0.3μm と短波長化すると、C/Nが不十分で改善
が望まれていた。Problems to be Solved by the Invention However, when #2051Sin is used on a polymer film,
2. Magnetic recording in which a ferromagnetic metal thin film is deposited by electron beam evaporation, sputtering, etc. on a fine particle coating layer coated and fixed with CaO, polymer latex, etc., and a protective lubricant layer is further deposited on top of it. The recording wavelength of the medium is 0.6 μm ~
When the wavelength was shortened to 0.3 μm, the C/N ratio was insufficient and improvement was desired.
本発明は上記した事情に鑑みなされたもので、短波長域
でのC/Hの良好な磁気記録媒体を提供するものである
。The present invention was made in view of the above-mentioned circumstances, and it is an object of the present invention to provide a magnetic recording medium with good C/H in a short wavelength region.
問題点を解決するための手段
本発明の磁気記録媒体は、上記した問題点を解決するた
めに、平滑な高分子フィルム上に第1強磁性金属薄膜と
、テープの幅方向にのびた扁平な有機物突起層と、第2
強磁性金属薄膜とが積層されているものである。Means for Solving the Problems In order to solve the above problems, the magnetic recording medium of the present invention has a first ferromagnetic metal thin film on a smooth polymer film, and a flat organic material extending in the width direction of the tape. a protrusion layer and a second
ferromagnetic metal thin films are laminated.
作用
本発明の磁気記録媒体は上記した構成により、強磁性金
属薄膜が形成される基板に急しゅんな形状変化がなくな
ることで、微視的に均一性が改善される。一方、強磁性
金属薄膜が有機物突起層で磁気的に分離されることで磁
区が小さくなり、雑音が下がり、C/Nが改善されるこ
とになる。−方、耐久性は、幅方向に伸びた扁平な有機
物突起がヘッドとの相対運動では粒状突起と等価に働く
ので確保される。Function: Due to the above-described configuration of the magnetic recording medium of the present invention, the substrate on which the ferromagnetic metal thin film is formed does not undergo sudden changes in shape, thereby improving microscopic uniformity. On the other hand, since the ferromagnetic metal thin film is magnetically separated by the organic protrusion layer, the magnetic domain becomes smaller, noise is reduced, and C/N is improved. - On the other hand, durability is ensured because the flat organic protrusions extending in the width direction act equivalently to the granular protrusions when moving relative to the head.
実施例
以下、図面を参照しながら本発明の一実施例について詳
しく説明する0図は本発明の一実施例の磁気記録媒体の
拡大断面図で、図中、1は、ポリエチレンテレフタレー
ト、ポリエチレンナフタレート、ポリフェニレンサルフ
ァイド、ポリエーテルサルフオン、ポリイミド等の高分
子フィルムである。2はCo 、 Go −Ni 、
Go−Fe 、 Co−0r 、 Go −Pt、Co
−Rh、Co−Ru、Go−0,Co−Ta、Co−3
i。EXAMPLE Hereinafter, an example of the present invention will be described in detail with reference to the drawings. Figure 0 is an enlarged sectional view of a magnetic recording medium according to an example of the present invention, and in the figure, 1 is polyethylene terephthalate, polyethylene naphthalate. , polyphenylene sulfide, polyether sulfone, polyimide, etc. 2 is Co, Go-Ni,
Go-Fe, Co-0r, Go-Pt, Co
-Rh, Co-Ru, Go-0, Co-Ta, Co-3
i.
Co −3m 、 Co −Cr −Nb 、 Co
−Ni−0等から成る第1強磁性金属薄膜で、電子ビー
ム蒸着、高周波スパッタリング法等で形成される膜厚3
00人〜1800人の面内磁化膜又は垂直磁化膜である
。Co-3m, Co-Cr-Nb, Co
A first ferromagnetic metal thin film made of -Ni-0, etc., with a thickness of 3, formed by electron beam evaporation, high frequency sputtering, etc.
00 to 1800 in-plane magnetization film or perpendicular magnetization film.
3はテープの幅方向にのびた扁平な有機物突起で、モノ
マーガスを導入し、プラズマを形成し、反応管の先端を
しぼり、先端よりテープの幅方向に斜めに照射し第1強
磁性金属薄膜上に重合により得た有機物突起を扁平に形
成すればよい。3 is a flat organic protrusion extending in the width direction of the tape, introduces monomer gas, forms plasma, squeezes the tip of the reaction tube, and irradiates the tape obliquely from the tip in the width direction of the tape onto the first ferromagnetic metal thin film. What is necessary is just to form the organic matter protrusion obtained by polymerization into a flat shape.
4は第2強磁性金属薄膜で、第1強磁性金属薄膜と同じ
材料であってもよいし、異なる材料でもよいし垂直磁化
膜と面内磁化膜の組み合わせでもよい。A second ferromagnetic metal thin film 4 may be made of the same material as the first ferromagnetic metal thin film, may be made of a different material, or may be a combination of a perpendicular magnetization film and an in-plane magnetization film.
5は保護潤滑剤層で、プラズマ重合膜、アモルファスカ
ーボン膜、 TiC膜、 MoS2膜、 SiO□膜等
の保護膜と脂肪酸、フッ素オイル等の潤滑剤との組み合
せから成り、膜厚はスペーシング損失の少くなるよう極
力薄く構成できる材料、製法で最適化する必要がある。5 is a protective lubricant layer, which is composed of a combination of a protective film such as a plasma polymerized film, an amorphous carbon film, a TiC film, a MoS2 film, or a SiO□ film, and a lubricant such as fatty acid or fluorine oil, and the film thickness is determined by the spacing loss. It is necessary to optimize materials and manufacturing methods that can be made as thin as possible to reduce the amount of damage.
以下、更に具体的に、本発明の実施例について比較例と
の対比で説明する。厚み10μmのポリエチレンテレフ
タレートフィルムで平均fflす30人の表面を0.0
1 (Torr)のArで5ooV、1人のグロー放電
処理を1.6秒行い、電子ビーム蒸着法でCio −N
i (Go : 80 wt%)を直径1mの円筒キャ
ンに涜わせて、最小入射角36度酸素分圧3X 10
(Torr)で600人形成し第1強磁性金属薄膜を
配し、その上に、開孔部が4oCIn×2c1nの反応
管内に、モノマーガスとして、ヘキサメチルシシラザン
ヲ導入L13.5 e (MHz) 、 9oO(W)
のプラズマを発生させ該薄膜に入射角72度で入射させ
、高さ1oO人、突起の面積は約0.4(μm)。Examples of the present invention will be described in more detail below in comparison with comparative examples. Polyethylene terephthalate film with a thickness of 10 μm covers the surface of 30 people with an average ffl of 0.0
1 (Torr) of Ar, 5ooV, glow discharge treatment for 1.6 seconds by one person, and Cio-N by electron beam evaporation method.
i (Go: 80 wt%) is placed in a cylindrical can with a diameter of 1 m, and the minimum incident angle is 36 degrees and the oxygen partial pressure is 3X 10
(Torr) and placed a first ferromagnetic metal thin film on top of the first ferromagnetic metal thin film.Hexamethylsilazane was introduced as a monomer gas into a reaction tube with an opening of 4oCIn x 2C1n. ), 9oO(W)
A plasma was generated and made incident on the thin film at an incident angle of 72 degrees, the height was 100 degrees, and the area of the protrusion was about 0.4 (μm).
密度は2×10ケ/allの扁平な突起層を形成した。A flat protrusion layer with a density of 2×10 cells/all was formed.
更に第2強磁性金属薄膜として、Go −Cr垂直磁化
膜とCo−Ni−0斜め蒸着膜の2種類を配した。Furthermore, two types of second ferromagnetic metal thin films, a Go-Cr perpendicular magnetization film and a Co-Ni-0 obliquely deposited film, were disposed.
実施例AはGo−Cr (Co : sowt %)’
i ターゲ71−とじ、高周波スパッタリング法により
垂直磁化膜を500人形成した。実施例Bは第1強磁性
金属薄膜と同じGo −Ni f用い、最小入射角50
度、2 X 1O−5(Torr)の酸素分圧で電子ビ
ーム蒸着し、Co −Ni−0膜を80OA形成した。Example A is Go-Cr (Co: sowt%)'
i Target 71 - 500 perpendicularly magnetized films were formed by high frequency sputtering. Example B uses the same Go-Ni f as the first ferromagnetic metal thin film, and the minimum incident angle is 50
Electron beam evaporation was performed at an oxygen partial pressure of 2×1 O−5 (Torr) to form a Co-Ni-0 film of 80 OA.
夫々、グラファイトをターゲットにしてAr+H2=0
.01 (Torr) Ar :)12= 1 : 2
、13.66(MHz ) 1.1(KW) tD
高周波スパッタリングにより、ダイアモンド状硬質炭素
薄膜を9o人形成し、真空蒸着法によりパーフルオロス
テアリン酸膜−&40人形成してから8ミリ幅の磁気テ
ープに加工した。一方比較例は、厚み10μmのポリエ
チレンテレフタレートフイルム上に直径150へのKu
205 微粒子を15ケ/(μm)2配し、実施例A
。Ar + H2 = 0 with graphite as the target, respectively.
.. 01 (Torr) Ar:)12=1:2
, 13.66 (MHz) 1.1 (KW) tD
Nine diamond-shaped hard carbon thin films were formed by high frequency sputtering, and 40 perfluorostearic acid films were formed by vacuum evaporation, and then processed into an 8 mm wide magnetic tape. On the other hand, in the comparative example, Ku
205 15 particles/(μm) 2 arranged, Example A
.
Bと同じ条件で第1強磁性金属薄膜と第2強磁性金属薄
膜を形成し、保護潤滑剤層を配して、夫々8ミリ幅の磁
気テープとして比較個人、比較例Bを準備した。A first ferromagnetic metal thin film and a second ferromagnetic metal thin film were formed under the same conditions as B, and a protective lubricant layer was provided to prepare a comparative individual and a comparative example B as magnetic tapes each having a width of 8 mm.
夫々の磁気テープを、8ミリビデオを改造し、ギャップ
長o、13μmのアモルファス合金スパッタ膜をギャッ
プ近傍に配した複合リングヘッドにより、ピット長0.
22μmの記録再生を行い、C/Nを比較した。帯域は
10 (MHz)で、比較例Ato (dB)とした。Each magnetic tape has a pit length of 0.5 mm using a composite ring head that is a modified 8 mm video tape with a gap length of o and an amorphous alloy sputtered film of 13 μm placed near the gap.
Recording and reproduction was performed at 22 μm, and the C/N was compared. The band was 10 (MHz), and the comparative example was Ato (dB).
比較例Bは+1.5 (dB)、実施例Aは+2.2
(dB)、 実施例Bは+4.0 (dB)と良好で
あった。Comparative example B is +1.5 (dB), Example A is +2.2
(dB), and Example B was good at +4.0 (dB).
尚、メチル耐久性を、メチル状態で初期出力から3(d
B)出力が低下するまでの時間で比較したところ、実施
個人は31〜38(分)、実施例Bは52〜66粉)、
比較何人は32〜41(分)、比較例Bは54〜60(
分)でC/Nが改善されても耐久性も十分実用レベルに
あることが理解される。In addition, the methyl durability is increased by 3 (d) from the initial output in the methyl state.
B) When comparing the time until the output decreased, the experimenter was 31 to 38 (minutes), and Example B was 52 to 66 minutes).
The comparison number was 32-41 (minutes), and the comparative example B was 54-60 (minutes).
It is understood that even if the C/N ratio is improved by 1 minute), the durability is still at a sufficiently practical level.
発明の効果
以上のように、本発明によれば、短波長で優れたC/N
を与える磁気記録媒体が得られ、すぐれた効果がある。Effects of the Invention As described above, according to the present invention, excellent C/N at short wavelengths can be achieved.
A magnetic recording medium can be obtained which provides excellent effects.
図は本発明の一実施例に係る磁気記録媒体の拡大断面図
である。
1・・・・・・高分子フィルム、2・・・・・・第1強
磁性金属薄膜、3・・・・・・有機物突起層、4・・・
・・・第2強磁性金属薄膜。The figure is an enlarged sectional view of a magnetic recording medium according to an embodiment of the present invention. DESCRIPTION OF SYMBOLS 1... Polymer film, 2... First ferromagnetic metal thin film, 3... Organic material protrusion layer, 4...
...Second ferromagnetic metal thin film.
Claims (1)
テープの幅方向に延びた扁平な有機物突起層と、第2強
磁性金属薄膜とが積層されていることを特徴とする磁気
記録媒体。A first ferromagnetic metal thin film on a smooth polymer film,
A magnetic recording medium characterized in that a flat organic protrusion layer extending in the width direction of the tape and a second ferromagnetic metal thin film are laminated.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP33453787A JPH01176311A (en) | 1987-12-29 | 1987-12-29 | Magnetic recording medium |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP33453787A JPH01176311A (en) | 1987-12-29 | 1987-12-29 | Magnetic recording medium |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH01176311A true JPH01176311A (en) | 1989-07-12 |
Family
ID=18278514
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP33453787A Pending JPH01176311A (en) | 1987-12-29 | 1987-12-29 | Magnetic recording medium |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH01176311A (en) |
-
1987
- 1987-12-29 JP JP33453787A patent/JPH01176311A/en active Pending
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