JPH01125717A - Magnetic recording medium - Google Patents
Magnetic recording mediumInfo
- Publication number
- JPH01125717A JPH01125717A JP62283574A JP28357487A JPH01125717A JP H01125717 A JPH01125717 A JP H01125717A JP 62283574 A JP62283574 A JP 62283574A JP 28357487 A JP28357487 A JP 28357487A JP H01125717 A JPH01125717 A JP H01125717A
- Authority
- JP
- Japan
- Prior art keywords
- film
- thin
- magnetic recording
- polymer
- disposed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000005291 magnetic effect Effects 0.000 title claims description 26
- 230000005294 ferromagnetic effect Effects 0.000 claims abstract description 13
- 229910021385 hard carbon Inorganic materials 0.000 claims abstract description 11
- 229920000642 polymer Polymers 0.000 claims abstract description 8
- 229920006254 polymer film Polymers 0.000 claims abstract description 7
- 239000010409 thin film Substances 0.000 claims description 19
- 239000010408 film Substances 0.000 claims description 15
- 229910052751 metal Inorganic materials 0.000 claims description 10
- 239000002184 metal Substances 0.000 claims description 10
- 230000003247 decreasing effect Effects 0.000 abstract 1
- 230000000694 effects Effects 0.000 description 8
- 239000010410 layer Substances 0.000 description 7
- 230000000052 comparative effect Effects 0.000 description 5
- 239000000178 monomer Substances 0.000 description 4
- -1 polyethylene Polymers 0.000 description 4
- 239000000314 lubricant Substances 0.000 description 3
- 230000005415 magnetization Effects 0.000 description 3
- 238000004544 sputter deposition Methods 0.000 description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- 239000004215 Carbon black (E152) Substances 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 239000011651 chromium Substances 0.000 description 2
- 238000005566 electron beam evaporation Methods 0.000 description 2
- 239000010419 fine particle Substances 0.000 description 2
- 150000002222 fluorine compounds Chemical class 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 229910002804 graphite Inorganic materials 0.000 description 2
- 239000010439 graphite Substances 0.000 description 2
- 229930195733 hydrocarbon Natural products 0.000 description 2
- 150000002430 hydrocarbons Chemical class 0.000 description 2
- 238000005461 lubrication Methods 0.000 description 2
- 239000012528 membrane Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 229920000139 polyethylene terephthalate Polymers 0.000 description 2
- 239000005020 polyethylene terephthalate Substances 0.000 description 2
- 230000001681 protective effect Effects 0.000 description 2
- ZTSDOGSKTICNPQ-UHFFFAOYSA-N 2,2,3,3,4,4,5,5,6,6,7,7,8,8,9,9,10,10,11,11,12,12,13,13,14,14,15,15,16,16,17,17,18,18,18-pentatriacontafluorooctadecanoic acid Chemical compound OC(=O)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)F ZTSDOGSKTICNPQ-UHFFFAOYSA-N 0.000 description 1
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- 229910020630 Co Ni Inorganic materials 0.000 description 1
- 229910020637 Co-Cu Inorganic materials 0.000 description 1
- 229910002440 Co–Ni Inorganic materials 0.000 description 1
- 229910020515 Co—W Inorganic materials 0.000 description 1
- 239000004962 Polyamide-imide Substances 0.000 description 1
- 239000004698 Polyethylene Substances 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- 239000004721 Polyphenylene oxide Substances 0.000 description 1
- 239000004734 Polyphenylene sulfide Substances 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 229910000808 amorphous metal alloy Inorganic materials 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011247 coating layer Substances 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 235000014113 dietary fatty acids Nutrition 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 238000001017 electron-beam sputter deposition Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 229930195729 fatty acid Natural products 0.000 description 1
- 239000000194 fatty acid Substances 0.000 description 1
- 150000004665 fatty acids Chemical class 0.000 description 1
- 229910052732 germanium Inorganic materials 0.000 description 1
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 229910052758 niobium Inorganic materials 0.000 description 1
- 229910017464 nitrogen compound Inorganic materials 0.000 description 1
- 150000002830 nitrogen compounds Chemical class 0.000 description 1
- BCCOBQSFUDVTJQ-UHFFFAOYSA-N octafluorocyclobutane Chemical compound FC1(F)C(F)(F)C(F)(F)C1(F)F BCCOBQSFUDVTJQ-UHFFFAOYSA-N 0.000 description 1
- 235000019407 octafluorocyclobutane Nutrition 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 229910000889 permalloy Inorganic materials 0.000 description 1
- 229920003207 poly(ethylene-2,6-naphthalate) Polymers 0.000 description 1
- 229920002312 polyamide-imide Polymers 0.000 description 1
- 229920000570 polyether Polymers 0.000 description 1
- 229920000573 polyethylene Polymers 0.000 description 1
- 239000011112 polyethylene naphthalate Substances 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 229920000069 polyphenylene sulfide Polymers 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 239000007858 starting material Substances 0.000 description 1
- 125000000020 sulfo group Chemical group O=S(=O)([*])O[H] 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
Landscapes
- Other Resins Obtained By Reactions Not Involving Carbon-To-Carbon Unsaturated Bonds (AREA)
- Magnetic Record Carriers (AREA)
Abstract
Description
【発明の詳細な説明】
産業上の利用分野
本発明は、高密度磁気記録再生に適する強磁性金属薄膜
を磁気記録層とする磁気記録媒体に関する。DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention relates to a magnetic recording medium whose magnetic recording layer is a ferromagnetic metal thin film suitable for high-density magnetic recording and reproduction.
従来の技術
従来より磁気記録層として広く用いられている塗布型の
磁性層は、今後益々短波長化する磁気記録において十分
なC/Nを確保することがむずかしくなってきており、
代ってG o−Or 、 G o −N i−0等の強
磁性金属薄膜を磁気記録層とする磁気記録媒体の実用化
が期待されている〔アイイーイーイートランザクション
ズ オン マグネティクス(II!、F、ETRANS
ACTIONS ON MAGNETIC8)VO
l、MAG、21 、No−3,1217〜1220(
1985)参照〕。かかる構成の磁気記録媒体の実用化
には、磁気ヘッドとの高速摺接運動に於ける耐久性の確
保が不可欠で、その点からの改善提案が増えてきている
〔例えば、特開昭63−88704号公報、同59−1
21631号公報。BACKGROUND OF THE INVENTION It is becoming difficult to ensure a sufficient C/N ratio for magnetic recording, which has been widely used as a magnetic recording layer in the past, as the wavelength becomes shorter and shorter in the future.
Instead, it is expected that magnetic recording media with magnetic recording layers made of ferromagnetic metal thin films such as G o-Or and G o -N i-0 will be put to practical use [IEE Transactions on Magnetics (II! ,F,ETRANS
ACTIONS ON MAGNETIC8) VO
l, MAG, 21, No-3, 1217-1220 (
(1985)]. In order to put a magnetic recording medium with such a configuration into practical use, it is essential to ensure durability during high-speed sliding movement with the magnetic head, and an increasing number of proposals for improvement from this point of view have been made [for example, Japanese Patent Application Laid-Open No. 1983-1990 Publication No. 88704, 59-1
Publication No. 21631.
同59−171026号公報、同62−197917号
公報等参照〕。中でも、磁気記録層に微細な凹凸を形成
する方法は、磁気記録層の耐久性向上効果が大きく注目
されている〔アイイーイーイートランザクションズ オ
ン マグネティクス(IKKETRANSACTION
S ON MAGNETIC8)Vol、MAG−
21,Nos 、1624〜1 s2θ(1986)参
照〕。See Publication No. 59-171026, Publication No. 62-197917, etc.]. Among them, the method of forming fine irregularities on the magnetic recording layer is attracting a lot of attention for its effect of improving the durability of the magnetic recording layer [IKKETRANSACTIONS on Magnetics]
S ON MAGNETIC8) Vol, MAG-
21, Nos, 1624-1 s2θ (1986)].
発明が解決しようとする問題点
しかしながら、高分子フィルム上に、ム12031Si
n2.CaOポリエチレン球等の微粒子を塗布固定した
、微粒子塗布層を配した上に電子ビーム蒸着法、スパッ
タリング法等で強磁性金属薄膜を配し、保護潤滑層を配
した磁気記録媒体は、記録波長が0.6μm以下になる
と、C/N が不十分で改善が望まれていた。Problems to be Solved by the Invention However, when a polymer film is coated with Mu12031Si,
n2. A magnetic recording medium has a fine particle coating layer on which fine particles such as CaO polyethylene spheres are coated and fixed, a ferromagnetic metal thin film is deposited by electron beam evaporation, sputtering, etc., and a protective lubricant layer is provided. If it is less than 0.6 μm, the C/N ratio is insufficient and improvement is desired.
本発明は上記した事情に鑑みなされたもので短波長での
Ct/Nの良好な磁気記録媒体を提供するものである。The present invention has been made in view of the above-mentioned circumstances, and it is an object of the present invention to provide a magnetic recording medium with a good Ct/N at short wavelengths.
問題点を解決するだめの手段
上記した問題点を解決するため本発明の磁気記録媒体は
、平滑な高分子フィルム上に強磁性金属薄膜を配し、そ
の上に油状重合物を含むプラズマ重合膜を配した上に硬
質炭素薄膜を配したものである。Means for Solving the Problems In order to solve the above-mentioned problems, the magnetic recording medium of the present invention has a ferromagnetic metal thin film arranged on a smooth polymer film, and a plasma polymerized film containing an oily polymer on top of the ferromagnetic metal thin film. on which a hard carbon thin film is placed.
作用
本発明の磁気記録媒体は、上記した構成により、強磁性
金属薄膜の微視的な均一性が改善されるために、記録波
長が短かくなっても雑音が増加することがなく、短波長
域でのC/Nが確保でき、必要な耐久性は、プラズマ重
合膜と硬質炭素薄膜の積層構造により得られ、且つ、そ
の厚みも、いずれの膜も薄くて横の結合が強いのでスペ
ーシング損失を改善できる点も(j/N改善に作用する
。Effect The magnetic recording medium of the present invention has the above-described structure, which improves the microscopic uniformity of the ferromagnetic metal thin film, so that noise does not increase even when the recording wavelength becomes short. The required durability is achieved by the laminated structure of plasma polymerized film and hard carbon thin film, and the thickness of both films is thin and the lateral bond is strong, so the required durability is achieved by spacing. The ability to improve loss also works to improve j/N.
実施例
以下、図面を参照しながら、本発明の一実施例について
説明する。図は、本発明の一実施例の磁気記録媒体の拡
大断面図である。図で1はポリエチレンテレフタレート
、ボリフェニレンサルフフイド、ポリイミド、ポリエー
テルサルフォ/、ポリアミドイミド、ポリエチレンナフ
タレート等の高分子フィルムで、平均粗さが10人から
60人最大粗さでも100人までの平滑性をもつものが
必要である。2はCo−Ni 、 Co−Cu 、 C
o−0r 。EXAMPLE Hereinafter, an example of the present invention will be described with reference to the drawings. The figure is an enlarged sectional view of a magnetic recording medium according to an embodiment of the present invention. In the figure, 1 is a polymer film such as polyethylene terephthalate, polyphenylene sulfide, polyimide, polyether sulfo/, polyamideimide, polyethylene naphthalate, etc., with an average roughness of 10 to 60 and a maximum roughness of 100. It is necessary to have a smoothness of . 2 is Co-Ni, Co-Cu, C
o-0r.
Go−Ta 、 Co−Mo 、 Co −W 、 C
o −0、Co−Ni−0。Go-Ta, Co-Mo, Co-W, C
o-0, Co-Ni-0.
Co−0r−Nb、Co−0r−Rh 等の強磁性金属
薄膜で、磁化容易軸の方向に関係せず、かつ製法につい
ても電子ビーム蒸着法、スパッタリング法等いずれの薄
膜形成法によるものでもよく、必要ならば、チタン、ゲ
ルマニウム、クロム等の下地層パーマロイ等の軟磁性層
を介して形成したものでもよい。3は、油状重合物を含
むプラズマ重合膜で、・ 炭化水素系気体モノマー、弗
素化合物モノマー。A ferromagnetic metal thin film such as Co-0r-Nb or Co-0r-Rh, regardless of the direction of the axis of easy magnetization, and may be manufactured by any thin film forming method such as electron beam evaporation or sputtering. If necessary, it may be formed through a soft magnetic layer such as permalloy underlayer made of titanium, germanium, chromium, etc. 3 is a plasma-polymerized membrane containing oily polymers, such as hydrocarbon gas monomers and fluorine compound monomers.
窒素化合物モノマーなどを出発物質とし、モノマーの流
量、真空度、高周波の周波数、投入電力等をパラメータ
にして条件を最適化し膜厚は30人から100人までの
範囲で、油状重合物が、重量比で全体に対して、16係
から30チ含まれるのが好ましい。4は、硬質炭素薄膜
で、グラファイトのスパッタリングや、炭化水素系ガス
の放電分解による方法等で形成されるもので厚みは30
人から100人までが好ましく、この膜は、かかる薄さ
で十分保護膜として作用しているのは恐らく、形成時に
油状重合物が揮発し、硬質炭素膜に一部トラップされ、
後々潤滑作用に寄与するためと、微細孔が無数にあくこ
との形状効果で、潤滑作用の補助効果の持続性が改善さ
れることによっていると考えられるものである。6は脂
肪酸、フッ素化合物等の潤滑剤であるが、必ずしも必要
ではないが、広い環境条件で使用し安定な特性を得るに
は、均一厚み換算で30八から70人程度は配する方が
好ましい。Starting material is a nitrogen compound monomer, etc., and the conditions are optimized using parameters such as monomer flow rate, degree of vacuum, high frequency, input power, etc., and the film thickness is in the range of 30 to 100 mm. In terms of ratio, it is preferable that 16 to 30 pieces are included in the total. 4 is a hard carbon thin film formed by graphite sputtering or hydrocarbon gas discharge decomposition, and has a thickness of 30 mm.
Preferably, the film has a thickness of 1 to 100 cm, and the reason why this film sufficiently acts as a protective film at such a thin thickness is probably because the oily polymer volatilizes during formation and is partially trapped in the hard carbon film.
This is thought to be because it contributes to the lubrication effect later on, and because the shape effect of the countless micropores improves the sustainability of the auxiliary effect of the lubrication effect. 6 is a lubricant such as a fatty acid or a fluorine compound, but it is not always necessary, but in order to use it in a wide range of environmental conditions and obtain stable characteristics, it is preferable to use a lubricant of about 308 to 70 in terms of uniform thickness. .
以下、更に具体的に本発明の一実施例について、比較例
との対比で説明する。厚み13μmのポリエチレンテレ
フタレートフィルムで平均粗す20人、最大粗さ66人
のものを準備し、160℃の加熱ローラに沿わせて、表
面を1a(xaマ)。Hereinafter, one embodiment of the present invention will be described in more detail in comparison with a comparative example. Prepare a polyethylene terephthalate film with a thickness of 13 μm, with an average roughness of 20 people and a maximum roughness of 66 people.
20μム/d の電子ビーム照射処理を行ってから、高
周波スパッタリング法により、Co−Cr(Or20.
5Wt係)垂直磁化膜を0.1μm形成し、その上にパ
ーフルオロシクロブタンを1ts o cc/Winで
導入し、0.09 (Torr)で、103 (icH
2) 。After performing electron beam irradiation treatment at 20 μm/d, Co-Cr (Or20.
5Wt) A perpendicular magnetization film with a thickness of 0.1 μm was formed, and perfluorocyclobutane was introduced thereon at a rate of 1tso cc/Win.
2).
1.2(Kw)のグロー放電により、油状重合物を重量
比で19係含有するプラズマ重合薄膜を60人形成し、
引き続き、グラファイトをターゲットにし、ムr十H2
= 0.02 (Torr)、Ar:H2=1 : 3
゜13.66(MH2)1.5(KW)のグロー放電を
用いたスパッタリングにより、ダイアモンド状の硬質炭
素薄膜を60人形成した。この膜には、孔が多数あり概
略面積比で23%の孔がおいていた。最後に真空蒸着法
で1x 1o−’ (Torr)で、フィルムを巻いた
状態で1昼夜排気したのち、バーフルオロステアリン酸
を40人蒸着し、8ミリ幅の磁気テープとした。By glow discharge of 1.2 (Kw), 60 people formed a plasma polymerized thin film containing an oily polymer of 19% by weight,
Continuing to target graphite, Mr1H2
= 0.02 (Torr), Ar:H2=1:3
Sixty diamond-shaped hard carbon thin films were formed by sputtering using a glow discharge of 13.66 (MH2) and 1.5 (KW). This membrane had a large number of pores, with an approximate area ratio of 23%. Finally, the film was evacuated at 1×1o-' (Torr) for one day and night using a vacuum evaporation method, and then barfluorostearic acid was evaporated by 40 people to form a magnetic tape with a width of 8 mm.
一方比較例は、同じフィルム上に、直径160人のム1
20.微粒子を10ケ/(μm )2配してから、実施
例と同じ0.1μmのCo−Or垂直磁化膜を配し、硬
質炭素薄膜を、130人配し、パーフルオロステアリン
酸を40人蒸着し8ミリ幅の磁気テープとして準備した
。両者のテープを改造した8ミリビデオデツキによりO
/Nを比較した。On the other hand, in a comparative example, 160 people in diameter were placed on the same film.
20. After arranging 10 particles/(μm)2, a 0.1 μm Co-Or perpendicular magnetization film as in the example was placed, 130 hard carbon thin films were placed, and perfluorostearic acid was evaporated by 40 people. A magnetic tape with a width of 8 mm was prepared. O by an 8mm video deck modified from both tapes.
/N was compared.
ギャップ長0.14μmのアモルファス合金スパッタ積
層型のリングヘッドにより、ピット長0.23μm、)
ランク幅7μmで短形波を記録し、帯域s(MHz)で
のC/Nは実施例が比較例に対して、3.9(dB)良
好で、ピット長が0.1μmになると、差は拡大し、実
施例の方がa、6(dB)良好であった。尚ステル特性
は、初期出力より2(dB)低下するまでの時間で比較
すると実施例は82分比較例は70分であった。又くり
返し走行を40℃10%RHで230回行った後の動摩
擦係数は実施例は0.26比較例は0.39で、実施例
の安定性は良好であった。尚本発明は磁気ディスクに於
ても優れた特性を示すものである。A pit length of 0.23 μm is achieved using an amorphous alloy sputter laminated ring head with a gap length of 0.14 μm.
A rectangular wave was recorded with a rank width of 7 μm, and the C/N in the band s (MHz) was 3.9 (dB) better in the example than in the comparative example, and when the pit length became 0.1 μm, the difference was was enlarged, and the example was better by a, 6 (dB). When comparing the stealth characteristics in terms of the time required for the output to drop by 2 (dB) from the initial output, it was 82 minutes for the example and 70 minutes for the comparative example. The dynamic friction coefficient after repeated running 230 times at 40° C. and 10% RH was 0.26 for the example and 0.39 for the comparative example, indicating that the stability of the example was good. The present invention also exhibits excellent characteristics in magnetic disks.
発明の効果
以上のように本発明によれば、短波長域で優れたC/N
の磁気記録媒体が得られるといった効果がある。Effects of the Invention As described above, according to the present invention, the C/N is excellent in the short wavelength range.
This has the effect that a magnetic recording medium of 100% can be obtained.
図は本発明の一実施例に係る磁気記録媒体の拡大断面図
である。
1・・・・・・高分子フィルム、2・・・・・・強磁性
金属薄膜、3・・・・・・油状重合物を含むプラズマ重
合膜、4・・・・・・硬質炭素薄膜。The figure is an enlarged sectional view of a magnetic recording medium according to an embodiment of the present invention. 1... Polymer film, 2... Ferromagnetic metal thin film, 3... Plasma polymerized film containing an oily polymer, 4... Hard carbon thin film.
Claims (1)
、油状重合物を含むプラズマ重合膜を配した上に硬質炭
素薄膜を配したことを特徴とする磁気記録媒体。A magnetic recording medium characterized in that a ferromagnetic metal thin film is disposed on a smooth polymer film, a plasma polymerized film containing an oily polymer is disposed, and a hard carbon thin film is disposed on top of the ferromagnetic metal thin film.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62283574A JPH01125717A (en) | 1987-11-10 | 1987-11-10 | Magnetic recording medium |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62283574A JPH01125717A (en) | 1987-11-10 | 1987-11-10 | Magnetic recording medium |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH01125717A true JPH01125717A (en) | 1989-05-18 |
Family
ID=17667287
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62283574A Pending JPH01125717A (en) | 1987-11-10 | 1987-11-10 | Magnetic recording medium |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH01125717A (en) |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61105720A (en) * | 1984-10-26 | 1986-05-23 | Denki Kagaku Kogyo Kk | Magnetic storage medium |
-
1987
- 1987-11-10 JP JP62283574A patent/JPH01125717A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61105720A (en) * | 1984-10-26 | 1986-05-23 | Denki Kagaku Kogyo Kk | Magnetic storage medium |
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