JP2537915B2 - Magnetic recording media - Google Patents

Magnetic recording media

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Publication number
JP2537915B2
JP2537915B2 JP62283575A JP28357587A JP2537915B2 JP 2537915 B2 JP2537915 B2 JP 2537915B2 JP 62283575 A JP62283575 A JP 62283575A JP 28357587 A JP28357587 A JP 28357587A JP 2537915 B2 JP2537915 B2 JP 2537915B2
Authority
JP
Japan
Prior art keywords
magnetic recording
film
thin film
recording media
hard carbon
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP62283575A
Other languages
Japanese (ja)
Other versions
JPH01125718A (en
Inventor
紘一 篠原
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP62283575A priority Critical patent/JP2537915B2/en
Publication of JPH01125718A publication Critical patent/JPH01125718A/en
Application granted granted Critical
Publication of JP2537915B2 publication Critical patent/JP2537915B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Description

【発明の詳細な説明】 産業上の利用分野 本発明は高密度磁気記録再生に適する強磁性金属薄膜
を磁気記録層とする磁気記録媒体に関する。
TECHNICAL FIELD The present invention relates to a magnetic recording medium having a ferromagnetic metal thin film as a magnetic recording layer, which is suitable for high density magnetic recording and reproduction.

従来の技術 従来より磁気記録層として広く用いられている、塗布
型の磁性層は、今後益々短波長化する磁気記録において
十分なC/Nを確保することがむずかしくなってきてお
り、代ってCo−Cr,Co−Ni−O等の強磁性金属薄膜を、
磁気記録層とする磁気記録媒体の実用化が期待されてい
る〔アイイーイーイー トランザクションズ オン マ
グネティクス(IEEE TRANSACTIONS ON MAGNETICS)V
ol.MAG−21,No.3,1217〜1220(1985)参照〕。かかる構
成の磁気記録媒体の実用化には、磁気ヘッドとの高速摺
接運動に於ける耐久性の確保が不可欠で、その点からの
改善提案が増えてきている〔例えば、特開昭53−88704
号公報,同59−121631号公報,同59−171026号公報,同
62−197917号公報等参照〕。中でも、磁気記録層に微細
な凹凸を形成する方法は、磁気記録層の耐久性向上効果
が大きく注目されている〔アイイーイーイー トランザ
クションズ オン マグネティクス(IEEE TRANSACTIO
NS ON MAGNETICS)Vol.MAG−21,No.5 1524〜1526(19
85)参照〕。
2. Description of the Related Art A coating type magnetic layer, which has been widely used as a magnetic recording layer in the past, has become difficult to secure a sufficient C / N in magnetic recording whose wavelength is becoming shorter and shorter in the future. Co-Cr, Co-Ni-O and other ferromagnetic metal thin film,
Practical application of magnetic recording media for magnetic recording layers is expected [IEEE TRANSACTIONS ON MAGNETICS] V
ol.MAG-21, No. 3, 1217-1220 (1985)]. In order to put the magnetic recording medium having such a structure into practical use, it is essential to secure durability in high-speed sliding contact with the magnetic head, and proposals for improvement from that point are increasing [for example, JP-A-53-53]. 88704
No. 59-121631, No. 59-171026, No. 59-171026
62-197917, etc.]. Among them, the method of forming fine irregularities on the magnetic recording layer is attracting a great deal of attention because of the effect of improving the durability of the magnetic recording layer [IEEE TRANSACTIO
NS ON MAGNETICS) Vol.MAG-21, No.5 1524 to 1526 (19
85)].

発明が解決しようとする問題点 しかしながら、高分子フィルム上に、Al2O3,SiO2,Ca
O,ポリエチレン球等の微粒子を塗布固定した、微粒子塗
布層を配した上に電子ビーム蒸着法,スパッタリング法
等で強磁性金属薄膜を配し、保護潤滑層を配した磁気記
録媒体は、記録波長が0.5μm以下になると、C/Nが不十
分で改善が望まれていた。
Problems to be Solved by the Invention However, on the polymer film, Al 2 O 3 , SiO 2 , Ca
Magnetic recording media with a protective lubrication layer on which a ferromagnetic metal thin film is deposited by electron beam evaporation, sputtering, etc., on which a fine particle coating layer is coated and fixed with fine particles such as O and polyethylene spheres Is 0.5 μm or less, the C / N is insufficient, and improvement is desired.

本発明は上記した事情に鑑みされたもので短波長での
C/Nの良好な磁気記録媒体を提供するものである。
The present invention has been made in view of the above-mentioned circumstances.
A magnetic recording medium having a good C / N is provided.

問題点を解決するための手段 上記した問題点を解決するため本発明の磁気記録媒体
は、平滑な高分子フィルム上に強磁性金属薄膜を配した
上に網状の硬質炭素膜と潤滑剤とを配したものである。
Means for Solving the Problems In order to solve the above-mentioned problems, the magnetic recording medium of the present invention comprises a ferromagnetic polymer thin film on a smooth polymer film, and further comprises a hard carbon film and a lubricant. It is arranged.

作用 本発明の磁気記録媒体は、上記した構成により、強磁
性金属薄膜の微視的な均一性が確保されるため、記録波
長が0.5μm以下になっても雑音が急に増加することが
なく、短波長でのC/Nが確保でき、必要な耐久性は硬質
炭素膜が網状に形成されることで、潤滑剤との相互補助
関係が強くなりうることができる。
Effect The magnetic recording medium of the present invention, which has the above-described structure, ensures microscopic uniformity of the ferromagnetic metal thin film, so that noise does not suddenly increase even when the recording wavelength is 0.5 μm or less. The C / N at a short wavelength can be ensured, and the required durability can be enhanced by the hard carbon film formed in a net shape so that the mutual auxiliary relationship with the lubricant can be strengthened.

実施例 以下、図面を参照しながら、本発明の実施例について
説明する。図は本発明の一実施例の磁気記録媒体の拡大
断面図である。図で1はポリエチレンテレフタレート,
ポリフェンレンサルファイド,ポリイミド,ポリエーテ
ルサルフォン等の高分子フィルムで、表面の平滑性につ
いては、平均粗さで10Åから50Å、最大粗さでも100Å
までの平滑さが好ましい。2はCo−Ni,Co−Cr,Co−Ta,C
o−Mo,Co−W,Co−O,Co−Ni−O,Co−Cr−Nb等の強磁性金
属薄膜で、磁化容易軸の方向に関係せず、かつ、製法に
ついても電子ビーム蒸着法,スパッタリング法等特別限
定されるものではない。又必要ならば、チタン,ゲルマ
ニウム,クロム等の下地層、パーマロイ等の軟磁性層を
介して形成したものでもよい。3は網状の硬質炭素薄膜
で、最大高さは、高々150Å、好ましくは100Åから60Å
までの範囲で構成するものとする。4は脂肪酸,脂肪酸
エステル,パーフルオロアルキルカルボン酸,パーフル
オロアルキルスルフォン酸等の潤滑剤である。かかる構
成を得る簡便な方法は、先ず、4の潤滑剤を島状に蒸着
し、しかるのちに、グラファイトのスパッタリング,炭
化水素系ガスの放電分解による炭素薄膜の形成を行え
ば、潤滑剤が揮発することで、その部分には硬質炭素薄
膜が形成されないから、結果的に網状に硬質炭素薄膜が
形成されるというメカニズムを利用することである。以
下、更に具体的に本発明の一実施例について比較例との
対比で説明する。厚み12μm、表面粗さ平均で20Å、最
大で55Åのポリエチレンテレフタレート表面を16kev、1
6μA/cm2の電子ビーム照射前処理を行い、その上に高周
波スパッタリング法により、Co−Cr(Cr20.5wt%)垂直
磁化膜を0.12μm形成し、その上に、真空蒸着法で、ミ
リスチン酸を島状に、均一な膜となったら20Åとなる厚
み分だけ(島の全面積比率は33%)蒸着した上に、グラ
ファイトをターゲットにAr+H2=3×10-3(Torr),Ar:
H2=1:3で13.56(MHz)1.2(KW)のグロー放電によりス
パッタを行い、ダイアモンド状の硬質炭素膜を網状に形
成した。膜厚は70Åで、その上パーフルオロミリスチン
酸を均一膜厚換算40Å真空蒸着し、8ミリ幅の磁気テー
プとした。比較例は、厚み12μの実施例と同じポリエチ
レンテレフタレートフィルムを用い、その上に直径100
ÅのCaCO3を10ケ/(μm)配して、その上にCo−Cr
垂直磁化膜(Cr:20.5wt%)を0.12μm形成し、その上
にダイアモンド状硬質炭素膜を200Å形成し、更にパー
フルオロミリスチン酸を約50Å蒸着し、8ミリ幅の磁気
テープを製造した。両テープを改造した8ミリビデオに
より評価した。ギャップ長0.16μmのセンダストスパッ
タ膜とフェライトの複合型リングヘッドにより、ビット
長0.26μmトラック幅7μmの短形波を記録し、帯域8
(MHz)でのC/Nを比較した。実施例は比較例より5.5(d
B)良好なC/Nを示し、スチル特性も出力が初期より2
(dB)低下するまでの時間は実施例が85(分)、比較例
が87(分)と同じレベルで、この耐久性は島状でなく網
状である硬質炭素薄膜が連続膜と等価の働きをしている
ことからきており、かつ、実際のスペーシング損失の差
も、硬質炭素薄膜が薄くてもよいことから大きく、C/N
の差に寄与している。
Embodiments Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is an enlarged sectional view of a magnetic recording medium according to one embodiment of the present invention. In the figure, 1 is polyethylene terephthalate,
A polymer film made of polyphenene sulfide, polyimide, polyether sulfone, etc., with a surface smoothness of 10Å to 50Å with an average roughness and 100Å even with a maximum roughness.
Up to smoothness is preferred. 2 is Co-Ni, Co-Cr, Co-Ta, C
It is a ferromagnetic metal thin film such as o-Mo, Co-W, Co-O, Co-Ni-O, Co-Cr-Nb, etc., which is not related to the direction of the easy axis of magnetization, and the manufacturing method is electron beam evaporation method. The sputtering method is not particularly limited. If necessary, it may be formed through an underlayer of titanium, germanium, chromium or the like, or a soft magnetic layer of permalloy or the like. 3 is a net-like hard carbon thin film with a maximum height of at most 150Å, preferably 100Å to 60Å
It shall consist of up to. Reference numeral 4 is a lubricant such as fatty acid, fatty acid ester, perfluoroalkylcarboxylic acid, perfluoroalkylsulfonic acid. A simple method of obtaining such a constitution is to first vaporize the lubricant of 4 in an island shape, and then form a carbon thin film by sputtering graphite and discharge decomposition of a hydrocarbon-based gas to evaporate the lubricant. By doing so, the hard carbon thin film is not formed in that portion, and as a result, the mechanism that the hard carbon thin film is formed like a net is utilized. Hereinafter, one example of the present invention will be described more specifically in comparison with a comparative example. Thickness of 12μm, average surface roughness of 20Å, maximum of 55Å polyethylene terephthalate surface 16kev, 1
Electron beam irradiation pretreatment of 6μA / cm 2 was performed, and Co-Cr (Cr20.5wt%) perpendicular magnetization film was formed on it 0.12μm by high frequency sputtering method, and myristic acid was formed on it by vacuum evaporation method. Is deposited in an island shape and becomes a uniform film with a thickness of 20Å (the total area ratio of islands is 33%), and graphite is used as a target for Ar + H 2 = 3 × 10 -3 (Torr), Ar:
Sputtering was performed by glow discharge of 13.56 (MHz) 1.2 (KW) with H 2 = 1: 3 to form a diamond-like hard carbon film in a net shape. The film thickness was 70Å, and perfluoromyristic acid was vacuum-deposited with a uniform film thickness of 40Å to obtain a magnetic tape of 8 mm width. The comparative example uses the same polyethylene terephthalate film as the example with a thickness of 12μ, and a diameter of 100
Å CaCO 3 of 10 pieces / (μm) 2 are arranged and Co-Cr
A perpendicular magnetized film (Cr: 20.5 wt%) was formed to a thickness of 0.12 μm, a diamond-like hard carbon film was formed to 200 Å, and perfluoromyristic acid was vapor-deposited to about 50 Å to manufacture an 8-mm wide magnetic tape. Both tapes were evaluated by the modified 8 mm video. With a composite type ring head of sendust sputtered film with a gap length of 0.16 μm and a ferrite, a rectangular wave with a bit length of 0.26 μm and a track width of 7 μm was recorded, and a band 8
The C / N at (MHz) was compared. The example is 5.5 (d
B) Good C / N is shown, and the still characteristics output is 2 from the initial level.
The time until it decreases (dB) is the same level as 85 (minutes) in the example and 87 (minutes) in the comparative example, and this durability has a net-like hard carbon film equivalent to a continuous film. In addition, the difference in actual spacing loss is large because the hard carbon thin film may be thin, and C / N
Contributes to the difference.

発明の効果 以上のように本発明によれば、短波長でのC/Nの優れ
た磁気記録媒体が得られるといったすぐれた効果があ
る。
EFFECTS OF THE INVENTION As described above, according to the present invention, there is an excellent effect that a magnetic recording medium having an excellent C / N at a short wavelength can be obtained.

【図面の簡単な説明】[Brief description of drawings]

図は本発明の一実施例に係る磁気記録媒体の拡大断面図
である。 1……高分子フィルム、2……強磁性金属薄膜、3……
網状硬質炭素薄膜、4……潤滑剤。
FIG. 1 is an enlarged sectional view of a magnetic recording medium according to an embodiment of the present invention. 1 ... Polymer film, 2 ... Ferromagnetic metal thin film, 3 ...
Reticulated hard carbon thin film, 4 ... Lubricant.

Claims (1)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】平滑な高分子フィルム上に強磁性金属薄膜
を配した上に網状の硬質炭素膜と、潤滑剤とを配したこ
とを特徴とする磁気記録媒体。
1. A magnetic recording medium characterized in that a ferromagnetic metal thin film is provided on a smooth polymer film, and a hard net carbon film and a lubricant are provided thereon.
JP62283575A 1987-11-10 1987-11-10 Magnetic recording media Expired - Fee Related JP2537915B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62283575A JP2537915B2 (en) 1987-11-10 1987-11-10 Magnetic recording media

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62283575A JP2537915B2 (en) 1987-11-10 1987-11-10 Magnetic recording media

Publications (2)

Publication Number Publication Date
JPH01125718A JPH01125718A (en) 1989-05-18
JP2537915B2 true JP2537915B2 (en) 1996-09-25

Family

ID=17667301

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62283575A Expired - Fee Related JP2537915B2 (en) 1987-11-10 1987-11-10 Magnetic recording media

Country Status (1)

Country Link
JP (1) JP2537915B2 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007269106A (en) * 2006-03-30 2007-10-18 Mitsubishi Fuso Truck & Bus Corp Window structure mounted on side of driver's seat

Also Published As

Publication number Publication date
JPH01125718A (en) 1989-05-18

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