JPH03116520A - Magnetic recording medium - Google Patents

Magnetic recording medium

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Publication number
JPH03116520A
JPH03116520A JP25566689A JP25566689A JPH03116520A JP H03116520 A JPH03116520 A JP H03116520A JP 25566689 A JP25566689 A JP 25566689A JP 25566689 A JP25566689 A JP 25566689A JP H03116520 A JPH03116520 A JP H03116520A
Authority
JP
Japan
Prior art keywords
thin film
film
diamond
magnetic recording
ferromagnetic metal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP25566689A
Other languages
Japanese (ja)
Inventor
Koichi Shinohara
紘一 篠原
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP25566689A priority Critical patent/JPH03116520A/en
Publication of JPH03116520A publication Critical patent/JPH03116520A/en
Pending legal-status Critical Current

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Abstract

PURPOSE:To obtain a magnetic recording medium having high C/N and high durability in good balance by providing island-like deposites of one of Al, Ti, Si, W, Mo, and B on a smooth ferromagnetic metal thin film, and further providing a diamond-like hard carbon thin film thereon. CONSTITUTION:Island-like deposites 3 comprising one of Al, Ti, Si, W, Mo, and B are formed on a smooth ferromagnetic metal thin film 2, and further a diamond-like hard carbon thin film 4 is provided thereon. By this constitution, microscopic uniformity of the ferromagnetic metal thin film 2 can be improved to improve the noise level and C/N compared to a conventional medium when same spacing loss is considered. Since the hard diamond-like carbon film firmly adheres with island-like deposites of Al, etc., as cores to the film 2, a pattern of small roughness height with little variation in shape can be formed to improve durability of the medium. The obtd. medium shows good balance of high C/N and high durability.

Description

【発明の詳細な説明】 産業上の利用分野 本発明は高密度磁気記録に適する磁気記録媒体に関する
DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention relates to a magnetic recording medium suitable for high-density magnetic recording.

従来の技術 磁気記録密度の向上は基本的な要求として存続し、狭ト
ラツク化と短波長化をベースにして達成されるものであ
る。今日、蒸着テープの実用化に(2) より、ハイバンド8ミリ仕様ではホワイトクリップが0
.4μmをきるといったレベルにまで波長の短縮化が進
んでいる。蒸着テープはCo−Ni−0斜め蒸着膜を磁
気記録層とするもので、耐久性の確保のためにベースフ
ィルムに形状付与を行い、斜め蒸着膜に微細な凹凸形成
を行っている[例えばテレビ技術1989年6月号、2
8頁参照]。
BACKGROUND OF THE INVENTION Improving magnetic recording density continues to be a fundamental requirement and is achieved on the basis of narrower tracks and shorter wavelengths. Nowadays, due to the practical use of vapor-deposited tape (2), there are no white clips in the high band 8mm specification.
.. Wavelengths are being shortened to the level of less than 4 μm. The vapor-deposited tape uses a Co-Ni-0 obliquely vapor-deposited film as a magnetic recording layer.To ensure durability, the base film is given a shape and fine irregularities are formed on the obliquely vapor-deposited film [e.g. Technology June 1989 issue, 2
See page 8].

発明が解決しようとする課題 しかしながら上記した構成のものをより広帯域、短波長
域での記録再生に用いた時、十分なC/Nと耐久性が確
保できないといった課題があり改善が望まれていた。
Problems to be Solved by the Invention However, when the structure described above is used for recording and reproducing in a wider band and shorter wavelength range, there is a problem that sufficient C/N and durability cannot be ensured, and improvements have been desired. .

本発明は上記した事情に鑑みなされたもので、より高水
準でC/Nと耐久性のバランスを確保した磁気記録媒体
を提供するものである。
The present invention was made in view of the above-mentioned circumstances, and it is an object of the present invention to provide a magnetic recording medium that maintains a higher level of balance between C/N and durability.

課題を解決するための手段 上記した課題を解決するため本発明の磁気記録媒体は、
平滑な強磁性金属薄膜上に島状のAI!。
Means for Solving the Problems In order to solve the above-mentioned problems, the magnetic recording medium of the present invention comprises:
Island-shaped AI on a smooth ferromagnetic metal thin film! .

T i、S i、W、Mo、Bのいずれかを配しその上
にダイヤモンド状硬質炭素膜を配するようにしたもので
ある。
One of Ti, Si, W, Mo, and B is placed on top of which a diamond-like hard carbon film is placed.

作用 本発明の磁気記録媒体は、上記した構成により、強磁性
金属薄膜の微視的均一性が良好となり雑音が改善され同
一スペーシング損失条件で比較した時C/Nが向上する
。又耐久性は、島状のAI!等を核ににして硬いダイヤ
モンド状炭素膜が強固に被着し、形状変化の小さい凹凸
を形成することで改善されることになる。
Function: Due to the above-described structure, the magnetic recording medium of the present invention has good microscopic uniformity of the ferromagnetic metal thin film, improves noise, and improves C/N when compared under the same spacing loss conditions. Also, the durability is due to island-shaped AI! This can be improved by firmly adhering a hard diamond-like carbon film to the core and forming irregularities with small changes in shape.

実施例 以下、図面を参照しながら本発明の磁気記録媒体につい
て説明する。
EXAMPLES Below, the magnetic recording medium of the present invention will be explained with reference to the drawings.

(実施例1) 第1図は、本発明の実施例の磁気記録媒体の拡大断面図
である。第1図で1はポリエチレンテレフタレート、ポ
リエチレンナフタレート、ポリエーテルエーテルケトン
、ポリイミド等の高分子フィルムかA 1−Mg合金板
等から成る基板である。表面は平均値で10人〜40人
、最大粗さで30λ〜70人の範囲とするのが好ましい
。2はCo−0,Co−Ti、Co−Cr、Co−Ta
(Example 1) FIG. 1 is an enlarged sectional view of a magnetic recording medium according to an example of the present invention. In FIG. 1, reference numeral 1 denotes a substrate made of a polymer film such as polyethylene terephthalate, polyethylene naphthalate, polyether ether ketone, or polyimide, or an A1-Mg alloy plate. The surface preferably has an average roughness of 10 to 40 roughness, and a maximum roughness of 30λ to 70 roughness. 2 is Co-0, Co-Ti, Co-Cr, Co-Ta
.

Co−Mo、Co−W、Co−N i、Co−N i−
O,Co−Cr−Nb等の強磁性金属薄膜で、スパッタ
リング法、電子ビーム蒸着法等により形成し、必要なら
イオン照射処理を行ったり、下地層を配してもよい。3
はAI、T i、S i、W。
Co-Mo, Co-W, Co-N i, Co-N i-
A ferromagnetic metal thin film such as O, Co-Cr-Nb, etc. may be formed by a sputtering method, an electron beam evaporation method, etc., and if necessary, ion irradiation treatment may be performed or an underlayer may be provided. 3
are AI, T i, S i, and W.

Mo、Bのいずれかから成る島状金属で、電子ビーム蒸
着法、イオンプレーティンク法、スパッタリング法等で
形成すればよい。4はダイヤモンド状硬質炭素膜で、C
,J(ガスのプラズマを加速対する方法や炭素イオン照
射する方法、グラファイトをターゲットにしてスパッタ
リングする方法等いずれの方法で形成してもよい。5は
脂肪酸。
An island-shaped metal made of either Mo or B may be formed by electron beam evaporation, ion plating, sputtering, or the like. 4 is a diamond-like hard carbon film, C
, J (may be formed by any method such as accelerating gas plasma, carbon ion irradiation, or sputtering using graphite as a target. 5 is a fatty acid.

脂肪酸アミド、パーフルオロポリエーテル等を真空蒸着
法、溶液塗布法等で必要量配した潤滑剤層である。本発
明はテープ状、ディスク状いずれの形態で実施してもよ
い。
This is a lubricant layer in which necessary amounts of fatty acid amide, perfluoropolyether, etc. are applied by vacuum deposition, solution coating, etc. The present invention may be implemented in either tape or disk form.

以下、更に具体的に本発明の実施例について比較例との
対比で説明する。
Examples of the present invention will now be described in more detail in comparison with comparative examples.

厚み40μmのポリエチレンテレフタレートフィルム(
平均粗さ20人、最大粗さ50人)上に、スパッタリン
グ法でCo−Cr (Coニア9wt%)垂直磁化膜を
0.2μm形成し、その上に同じく高周波スパッタリン
グ法で島状金属を配し、更にその上にグラファイトをタ
ーゲットにして、 Ar+H=0 二 03  (To
rr)、   Ar:H=1 : 2. 13.56 
(MHz) 、 0.8 (kW)でダイヤモンド状硬
質炭素膜を形成し、潤滑剤としてパーフルオロポリエー
テルとして市販のモンテジソン社製の“フォンブリンZ
−25”を1.0[■/−]塗布し、5インチのフロッ
ピーディスクを得た。比較例の一部は、Co−Cr垂直
磁化膜を配す前に、直径150人のS i 02微粒子
を50ケ/μ 配したものを用いた。
Polyethylene terephthalate film with a thickness of 40 μm (
A Co-Cr (9wt% Conia) perpendicularly magnetized film was formed to a thickness of 0.2 μm on the average roughness of 20 mm and maximum roughness of 50 mm using a sputtering method, and an island-like metal was placed on top of it using the same high-frequency sputtering method. Then, on top of that, target graphite, Ar + H = 0 2 03 (To
rr), Ar:H=1:2. 13.56
(MHz), 0.8 (kW) to form a diamond-like hard carbon film, and as a lubricant, "Fomblin Z" manufactured by Montegisson, which is commercially available as perfluoropolyether, was used.
-25" was coated with 1.0 [■/-] to obtain a 5-inch floppy disk. In some of the comparative examples, before the Co--Cr perpendicular magnetization film was applied, Si 02 with a diameter of 150" A material containing 50 particles/μ was used.

夫々のディスクをセンダストスパッタ膜をギャップ部に
配した、0.2μmギャップ長のヘッドで、0.38μ
mの波長で10μmのトラックの記録を行い、再生C/
Nを比較しl−0媒体の条件と評価結果を第1表にまと
めて示した。第1表より本発明のものは、Ai’、T 
i、W、Mo、S i、Bが炭素と強く結合することで
耐久性がよいのに比較し、Sb、Pt、Cr等では構成
の形状効果のみで耐久性が不十分であり、相対的に初期
のC/NはSiO2微粒子を用いかつダイヤモンド状硬
質炭素膜を200人配したものより2.7〜2.8(d
 B)改良され同等の耐久性のあることがわかる。
A 0.38μm head with a 0.2μm gap length and a sendust sputtered film placed in the gap between each disk.
A track of 10 μm is recorded at a wavelength of m, and the reproduction C/
Table 1 summarizes the conditions and evaluation results of the 1-0 medium for comparison of N. From Table 1, the present invention has Ai', T
Compared to i, W, Mo, Si, and B, which have good durability due to strong bonding with carbon, Sb, Pt, Cr, etc. have insufficient durability due only to the shape effect of the structure, and are relatively The initial C/N is 2.7 to 2.8 (d
B) It can be seen that it has been improved and has the same durability.

(以 下 余 白) (実施例2) 課題を解決するための別の手段は、平滑な強磁性金属薄
膜上にテクスチャーを配した高密度ポリエチレン、ポリ
ウレタンのいずれかを介してダイヤモンド状硬質炭素膜
を配するようにしたものである。
(Left below) (Example 2) Another means to solve the problem is to create a diamond-like hard carbon film on a smooth ferromagnetic metal thin film through either textured high-density polyethylene or polyurethane. It is arranged so that

本発明の磁気記録媒体は上記した構成により。The magnetic recording medium of the present invention has the above-described structure.

強磁性金属薄膜の微視的均一性が良好さなり雑音が改善
され、同一のスペーシング損失条件下で比較した時にC
/Nが向上する。又耐久性はテクスチャーによる凹凸と
、材料の組み合わせで得られる大きな付着強度と、高分
子のクツション効果で大幅に向上する。
The microscopic uniformity of the ferromagnetic metal thin film is better, the noise is improved, and the C when compared under the same spacing loss condition.
/N improves. Furthermore, durability is greatly improved by the unevenness of the texture, the large adhesion strength obtained from the combination of materials, and the cushioning effect of the polymer.

第2図は本発明の第2の実施例の磁気記録媒体の拡大断
面図である。第2図で第1図と同じ群の中から選択すれ
ばよい構成のものについては同一の番号を付した。6は
平滑な強磁性金属薄膜上に配した高密度ポリエチレン、
ポリウレタンのいずれかのテクスチャーを配した薄膜で
、膜厚は高々200人までがよく、テクスチャーはディ
スク状とテープ状に於て必ずしも同じ形態である必要は
なく、特に限定はない。
FIG. 2 is an enlarged sectional view of a magnetic recording medium according to a second embodiment of the present invention. In FIG. 2, components that need only be selected from the same group as in FIG. 1 are given the same numbers. 6 is high-density polyethylene placed on a smooth ferromagnetic metal thin film;
It is a thin film with any texture of polyurethane, and the film thickness is preferably up to 200 layers, and the texture does not necessarily have to be the same in the disk shape and the tape shape, and is not particularly limited.

更に具体的に本発明の実施例について比較例との対比で
説明する。
More specifically, examples of the present invention will be explained in comparison with comparative examples.

厚み10μmのポリエチレンテレフタレートフィルム(
平均粗さ20人、最大粗さ40人)を用い、直径1mの
円筒キャンに沿わせて、Co−Ni (Co : 80
wt%)を5X10−5(Torr)の酸素中で最小入
射角40度で1000人蒸着登行更に同様に1000人
蒸着登行い、計2000人のCo−Ni−0斜め蒸着膜
を配し、その上に溶液塗布法で樹脂コートを行い、乾燥
後、研磨紙を用い、溝の幅が5〜10μm1ピツチが1
50〜200μmの溝を形成し、(テープの長手方向に
伸びた溝とした)その上にCH4ガスを13.56 (
MHz)の高周波でプラズマ化し、ダイヤモンド状硬質
炭素膜を形成し、その上にデニポン社製のKRYTOX
143ACを0.9(■#)塗布し、8ミリ幅のテープ
にした。
10 μm thick polyethylene terephthalate film (
Co-Ni (Co: 80
wt%) in oxygen at 5 x 10-5 (Torr) at a minimum incident angle of 40 degrees with 1000 people, followed by 1000 people in the same way, and a total of 2000 people deposited a Co-Ni-0 obliquely deposited film. A resin coat is applied on top of it using a solution coating method, and after drying, using abrasive paper, the width of the groove is 5 to 10 μm, and each pitch is 1.
A groove of 50 to 200 μm was formed (the groove extended in the longitudinal direction of the tape), and CH4 gas was poured onto it at 13.56 μm (
MHz) to form a plasma using high frequency waves, forming a diamond-like hard carbon film, and depositing Denipon's KRYTOX on top of the diamond-like hard carbon film.
0.9 (■#) of 143AC was applied to make a tape with a width of 8 mm.

比較例の一部はCo−Ni−0膜を形成する前に、直径
100人のTiO2微粒子を50ケ/μ2配したものを
用いた。
In some of the comparative examples, TiO2 fine particles having a diameter of 100 particles were arranged at 50 particles/μ2 before forming the Co-Ni-0 film.

実施例、比較例共に、ギャップ長0.2μmの積層合金
型で、ハイバンド8ミリ仕様で記録再生を行い、C/N
を比較した。テープの条件と得られた結果を第2表に示
した。
Both the Example and the Comparative Example are of a laminated alloy type with a gap length of 0.2 μm, and recording and reproduction are performed with high band 8 mm specifications, and the C/N is
compared. The tape conditions and results obtained are shown in Table 2.

第2表かられかるように高密度ポリエチレンとポリウレ
タンは炭素と強く反応被着するためと思われる耐久性を
示しているが、樹脂とテクスチャーとダイヤモンド状硬
質炭素膜の構成要件のみでは十分とは言えないことが示
されている。
As can be seen from Table 2, high-density polyethylene and polyurethane exhibit durability, which is thought to be due to strong reaction adhesion with carbon, but the constituent requirements of resin, texture, and diamond-like hard carbon film alone are not sufficient. It shows what cannot be said.

C/Nと耐久性がより高い水準でバランスしていること
は他の比較例との対比でも明らかである。
It is also clear from comparison with other comparative examples that C/N and durability are balanced at a higher level.

(以 下 余 白) 発明の効果 以上のように本発明によれば高密度でのC/Nと優れた
耐久性を有する磁気記録媒体が得られるといったすぐれ
た効果がある。
(The following is a blank space) Effects of the Invention As described above, the present invention has the excellent effect of providing a magnetic recording medium having high density C/N and excellent durability.

【図面の簡単な説明】[Brief explanation of drawings]

第1図、第2図はそれぞれ本発明の実施例の磁気記録媒
体の拡大断面図である。 1・・・・・・基板、2・・・・・・強磁性金属薄膜、
3・・・・・・島状金属、4・・・・・・ダイヤモンド
状硬質炭素膜、6・・・・・・テクスチャーを配した薄
膜。
FIGS. 1 and 2 are enlarged cross-sectional views of magnetic recording media according to embodiments of the present invention, respectively. 1...Substrate, 2...Ferromagnetic metal thin film,
3... Island-like metal, 4... Diamond-like hard carbon film, 6... Thin film with texture.

Claims (2)

【特許請求の範囲】[Claims] (1)平滑な強磁性金属薄膜上に島状のAl、Ti、S
i、W、Mo、Bのいずれかを配しその上にダイヤモン
ド状硬質炭素薄膜を配したことを特徴とする磁気記録媒
体。
(1) Islands of Al, Ti, and S on a smooth ferromagnetic metal thin film
1. A magnetic recording medium comprising one of i, W, Mo, and B on which a diamond-like hard carbon thin film is disposed.
(2)平滑な強磁性金属薄膜上にテクスチャーを配した
高密度ポリエチレン、ポリウレタンのいずれかを介して
ダイヤモンド状硬質炭素薄膜を配したことを特徴とする
磁気記録媒体。
(2) A magnetic recording medium characterized in that a diamond-like hard carbon thin film is disposed on a smooth ferromagnetic metal thin film via either textured high-density polyethylene or polyurethane.
JP25566689A 1989-09-29 1989-09-29 Magnetic recording medium Pending JPH03116520A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP25566689A JPH03116520A (en) 1989-09-29 1989-09-29 Magnetic recording medium

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP25566689A JPH03116520A (en) 1989-09-29 1989-09-29 Magnetic recording medium

Publications (1)

Publication Number Publication Date
JPH03116520A true JPH03116520A (en) 1991-05-17

Family

ID=17281928

Family Applications (1)

Application Number Title Priority Date Filing Date
JP25566689A Pending JPH03116520A (en) 1989-09-29 1989-09-29 Magnetic recording medium

Country Status (1)

Country Link
JP (1) JPH03116520A (en)

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