JP2605380B2 - Magnetic recording media - Google Patents

Magnetic recording media

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Publication number
JP2605380B2
JP2605380B2 JP25512588A JP25512588A JP2605380B2 JP 2605380 B2 JP2605380 B2 JP 2605380B2 JP 25512588 A JP25512588 A JP 25512588A JP 25512588 A JP25512588 A JP 25512588A JP 2605380 B2 JP2605380 B2 JP 2605380B2
Authority
JP
Japan
Prior art keywords
film
magnetic recording
thin film
tape
magnetic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP25512588A
Other languages
Japanese (ja)
Other versions
JPH02101622A (en
Inventor
紘一 篠原
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP25512588A priority Critical patent/JP2605380B2/en
Publication of JPH02101622A publication Critical patent/JPH02101622A/en
Application granted granted Critical
Publication of JP2605380B2 publication Critical patent/JP2605380B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Description

【発明の詳細な説明】 産業上の利用分野 本発明は高密度磁気記録に適する強磁性金属薄膜を磁
気記録層とする磁気記録媒体に関する。
Description: TECHNICAL FIELD The present invention relates to a magnetic recording medium using a ferromagnetic metal thin film suitable for high-density magnetic recording as a magnetic recording layer.

従来の技術 回転磁気ヘッドによるヘリカル走査方式による音声、
画像の記録、再生を行なう技術は、磁気記録の中でも、
記録密度が高くなってきている。そのため、今後更に短
波長化するには、新しい構成の磁気記録媒体が必要で、
高分子フィルム等の非磁性基板上に、Co−Crのスパッタ
リング法で得られた垂直磁化膜や、Co−Ni−Oの斜め蒸
着膜を配した蒸着テープが有望視されている〔例えば、
外国論文誌、IEEE TRANSACT10NS ON MAGNETICS Vol.MAG
−21,NO−3,P.P.1217〜1220(1985)参照〕。
Conventional technology Voice by helical scanning method using rotating magnetic head,
The technology of recording and reproducing images is one of the magnetic recording methods.
Recording density is increasing. Therefore, in order to further shorten the wavelength in the future, a magnetic recording medium with a new configuration is required.
On a non-magnetic substrate such as a polymer film, a perpendicular magnetic film obtained by a Co-Cr sputtering method, or a vapor deposition tape having a Co-Ni-O oblique vapor deposited film is promising (for example,
Foreign Transactions, IEEE TRANSACT10NS ON MAGNETICS Vol.MAG
-21, NO-3, PP1217-1220 (1985)].

第2図は蒸着テープの一例の拡大断面図で、第2図で
1はポリエチレンテレフタレートフィルム等の高分子フ
ィルムで必要に応じて凹凸を付与するための下塗り層を
配したものも用いられる。2は電子ビーム蒸着法、高周
波スパッタリング法等で形成される0.05μmから0.3μ
m程度の強磁性金属薄膜からなる磁気記録層で、3は保
護潤滑層でアモルファスカーボン膜と、フッ素オイルの
積層等、数多くの提案がなされているものから適宜選択
して用いることができる。4はバックコート層で、走行
性を助けるためにフイラー、潤滑剤等を含む樹脂からな
る塗布層である〔特公昭56−23,208号公報、特開昭58−
41418号公報、特開昭61−151835号公報、特開昭61−187
122号公報等参照〕。
FIG. 2 is an enlarged cross-sectional view of one example of a vapor deposition tape. In FIG. 2, 1 is a polymer film such as a polyethylene terephthalate film having an undercoat layer for providing irregularities as necessary. 2 is from 0.05 μm to 0.3 μm formed by electron beam evaporation, high frequency sputtering, etc.
A magnetic recording layer made of a ferromagnetic metal thin film having a thickness of about m is a protective lubricating layer, which can be appropriately selected from those proposed for many purposes such as lamination of an amorphous carbon film and fluorine oil. Reference numeral 4 denotes a back coat layer, which is a coating layer made of a resin containing a filler, a lubricant and the like for assisting the running property (Japanese Patent Publication No. 56-23,208;
41418, JP-A-61-151835, JP-A-61-187
No. 122, etc.].

又、磁気テープは体積記録密度が大きくできることも
特徴であり、長時間記録の手段として、テープの薄型化
の動向も重要であり、その点からみても蒸着テープは、
薄型化に有利で開発が進められているのが現状である。
Magnetic tapes are also characterized by their ability to increase the volume recording density, and as a means of long-term recording, the trend of tape thinning is also important.
At present, development is progressing in favor of thinning.

確かに磁気記録層が従来の塗布型磁性層に比べて1/10
ぐらいに薄くなるのと、磁気記録層のヤング率が10倍以
上大きいので、全厚を薄くできると考えられるが、広範
囲の温度範囲での実用化を目指した時、バイメタル構造
となっている不利な面が目立ってくるので、両面に蒸着
層を配したテープ構成も提案されている〔特開昭61−11
0343号公報等参照〕。
Certainly, the magnetic recording layer is 1/10 of the conventional coating type magnetic layer.
It is thought that the thickness is as thin as possible and the Young's modulus of the magnetic recording layer is more than 10 times larger, so it is thought that the overall thickness can be reduced.However, when aiming for practical use in a wide temperature range, the bimetal structure has a disadvantage. Because a special surface is conspicuous, a tape configuration in which a vapor deposition layer is disposed on both surfaces has been proposed (Japanese Patent Laid-Open No. 61-11 / 1986).
No. 0343).

第3図は、両面蒸着型の磁気テープの拡大断面図の一
例で、第3図で、5は高分子フィルムで両面にミミズ状
の凹凸を配したポリエチレンテレフタレートフィルム等
が用いられる。6は垂直磁化膜、斜め蒸着膜等の強磁性
金属薄膜から成る磁気記録層で、7は両面アクセス型と
する場合は、強磁性金属薄膜から構成し、片面アクセス
の場合は、SiO,SiO2,Al2O3,MgF2等の非磁性薄膜で、反
応性蒸着,高周波スパッタリング等の方法で形成される
もので8は保護潤滑膜である。
FIG. 3 is an example of an enlarged cross-sectional view of a double-sided deposition type magnetic tape. FIG. 3 is a polymer film, such as a polyethylene terephthalate film having worm-like irregularities on both surfaces. 6 is a magnetic recording layer made of a ferromagnetic metal thin film such as a perpendicular magnetic film, the oblique deposition film, 7 if a double-sided access type, and consists of a ferromagnetic metal thin film, in the case of single-sided access, SiO, SiO 2 , Al 2 O 3 , MgF 2, etc., a non-magnetic thin film formed by a method such as reactive vapor deposition or high frequency sputtering, and 8 is a protective lubricating film.

発明が解決しようとする課題 しかしながら上記した構成では、全厚が10μ以下で、
高密度記録再生用途に応用した場合、耐久性が不十分で
特に高画質化の進んだ最近の録画技術の要求からすると
ジッターによる画質劣化が課題であり、改善が望まれて
いた。
Problems to be Solved by the Invention However, in the above configuration, the total thickness is 10 μm or less,
When applied to high-density recording / reproducing applications, image quality deterioration due to jitter is a problem in view of the demands of recent recording techniques which have insufficient durability and particularly high image quality, and improvements have been desired.

本発明は、上記した事情に鑑みなされたもので、くり
返し使用でも走行性の安定化が図られジッターによる画
質劣化のない薄型の磁気テープを提供するものである。
The present invention has been made in view of the above-described circumstances, and provides a thin magnetic tape that stabilizes running performance even in repeated use and does not deteriorate image quality due to jitter.

課題を解決するための手段 上記した課題を解決するため本発明の磁気記録媒体
は、高分子フィルムの一方に強磁性金属薄膜とダイヤモ
ンド状炭素膜、潤滑層を積層し、もう一方にグラファイ
ト膜を配するようにしたものである。
Means for Solving the Problems To solve the above-mentioned problems, the magnetic recording medium of the present invention comprises a polymer film in which a ferromagnetic metal thin film, a diamond-like carbon film, and a lubricating layer are laminated, and a graphite film is formed in the other. It is intended to be arranged.

作 用 本発明の磁気記録媒体は上記した構成により、裏面の
走行性が安定しかつ、潤滑剤が両面にほぼ均等に転写で
平衡状態が保たれるようになるので走行性が安定に保た
れることになる。特に高速走行、ヘッドとの摺動で、強
磁性金属薄膜側の潤滑剤層は減少するが、絶えず反対側
から補給されるので耐久性が確保できるようになる。
Effect The magnetic recording medium of the present invention has a stable running property on the back surface and a stable running property because the lubricant is almost uniformly transferred to the both sides to maintain an equilibrium state by the above configuration. Will be. In particular, during high-speed running and sliding with the head, the lubricant layer on the ferromagnetic metal thin film side is reduced, but durability is secured because it is constantly replenished from the opposite side.

実施例 以下図面を参照しながら本発明の一実施例について説
明する。第1図は本発明の一実施例の磁気記録媒体の拡
大断面図で、第1図で9は厚み9μ以下のポリエチレン
テレフタレート、ポリエチレンナフタレート、ポリエー
テルエーテルケトン、ポリフエニレンサルフアイド、ポ
リエーテルサルフオン、ポリアミド、ポリイミド等の高
分子フィルムで、10,11は水溶性高分子から成るミミズ
状の下塗り層か、SiO2,TiO2,CaCO3,ZnO,ポリエチレン球
等の微粒子を配した下塗り層で、12はCo,Co−Cr,Co−O,
Co−Ni,Co−Fe,Co−Ta,Co−Mo,Co−W,Co−Nd,Co−Cr−N
b,Co−Ni−O等の強磁性金属薄膜で厚みは500Åから300
0Åの範囲が好ましく、多層構成としてもよく、電子ビ
ーム蒸着法、イオンプレーティング法、スパッタリング
法等により形成することができる。13はダイヤモンド状
の炭素薄膜で、スパッタリング法、イオンビームデポジ
ション法、等公知の方法〔エレクトロニク・セラミクス
1987年9月号,46−55頁参照〕で形成した50Åから200Å
の薄膜で、ダイヤモンド薄膜であってもよいが、工業的
には成膜速度が小さいことからダイヤモンド状硬質炭素
膜が適当である。14はカーボンをターゲットにしてスパ
ッタリング法で形成したグラファイト薄膜で、1000Åか
ら3000Åの範囲が好ましい。
Embodiment An embodiment of the present invention will be described below with reference to the drawings. FIG. 1 is an enlarged sectional view of a magnetic recording medium according to an embodiment of the present invention. In FIG. 1, 9 is a polyethylene terephthalate, polyethylene naphthalate, polyether ether ketone, polyphenylene sulfide, polyether having a thickness of 9 μ or less. Polymer films such as sulfon, polyamide, polyimide, etc., 10 and 11 are earthworm-like undercoat layers composed of water-soluble polymers or undercoats with fine particles such as SiO 2 , TiO 2 , CaCO 3 , ZnO, polyethylene spheres 12 is Co, Co-Cr, Co-O,
Co-Ni, Co-Fe, Co-Ta, Co-Mo, Co-W, Co-Nd, Co-Cr-N
b, Ferromagnetic metal thin film of Co-Ni-O etc.
A range of 0 ° is preferable, and a multilayer structure may be employed, and it can be formed by an electron beam evaporation method, an ion plating method, a sputtering method, or the like. Reference numeral 13 denotes a diamond-like carbon thin film, which is a known method such as a sputtering method, an ion beam deposition method, or the like.
(See September 1987, pp. 46-55).
The diamond thin film may be a diamond thin film, but a diamond-like hard carbon film is suitable from the industrial viewpoint because the film formation rate is low. Reference numeral 14 denotes a graphite thin film formed by sputtering using carbon as a target, and preferably has a thickness of 1000 to 3000 mm.

15は潤滑剤で15Aと15Bに分割され両面に配され、製造
後も、テープ状で利用されることにより転写により平衡
状態が保たれているので、脂肪酸、脂肪酸エステル、パ
ーフルオロカルボン酸、パーフルオロポリエーテル、等
を溶液塗布法、真空蒸着法等で配したものが用いられ
る。
15 is divided into 15A and 15B by a lubricant and arranged on both sides.Even after manufacture, the tape is used to maintain the equilibrium state by transfer, so that fatty acids, fatty acid esters, perfluorocarboxylic acid, What arrange | positioned fluoropolyether etc. by the solution coating method, the vacuum evaporation method, etc. is used.

以下、更に具体的に本発明の一実施例について比較例
との対比で詳しく説明する。
Hereinafter, an example of the present invention will be described more specifically in comparison with a comparative example.

実施例−1 厚み8.8μmのポリエチレンテレフタレートフィルム
の一方の面に直径90ÅのEu2O3微粒子を15ケ/(μm)
の密度の下塗り層、もう一方の面に直径400ÅのAl2O3
微粒子を3ケ/(μm)配し、Eu2O3微粒子を配した
面に直径1mの円筒キヤンに沿わせて、最小入射角48度、
酸素分圧8×10-5(Torr)でCo−Ni(Co:80wt%)を電
子ビーム蒸着し、Co−Ni−O膜1400Åを形成し、その上
にグラファイトをターゲットにしてAr+H2=0.09(Tor
r)AriH2=1:2,13.56(MHz)900(W)でスパッタリン
グ法によりダイヤモンド状硬質炭素膜を100Å配し、も
う一方の面にCH4ガスを放電分解し、グラファイト薄膜
を1550Å配し、ダイヤモンド状硬質炭素薄膜側に真空蒸
着法でパーフルオロステアリン酸を160Å配し、8ミリ
幅のテープに加工した。尚テープは8ミリカセットに12
0m巻き込み、50℃,1Wエージングを行った。
Example -1 on one surface of a polyethylene terephthalate film having a thickness 8.8μm diameter 90 Å Eu 2 O 3 fine particles 15 Ke / ([mu] m)
Undercoat layer of density 2 ; 400 mm diameter Al 2 O 3 on the other side
3 particles / (μm) 2 are arranged, and a minimum incidence angle of 48 degrees is set along a cylindrical can with a diameter of 1 m on the surface on which the Eu 2 O 3 particles are arranged.
Electron beam deposition of Co-Ni (Co: 80 wt%) at an oxygen partial pressure of 8 × 10 -5 (Torr) to form a Co-Ni-O film of 1400Å, and a graphite target thereon, Ar + H 2 = 0.09 (Tor
r) AriH 2 = 1: 2, 13.56 (MHz) 900 (W), a diamond-like hard carbon film is distributed by 100 ° by sputtering, and CH 4 gas is discharged and decomposed on the other surface, and a graphite thin film is disposed by 1550 °. Then, 160 ° of perfluorostearic acid was arranged on the diamond-like hard carbon thin film side by a vacuum evaporation method, and processed into an 8 mm wide tape. The tape is 12 in 8 mm cassette.
A 0 m winding was performed, and aging was performed at 50 ° C. for 1 W.

実施例−2 実施例−1と同じフィルムに微粒子を配し、Eu2O3
粒子側に、高周波スパッタリング法により、直径50cmの
円筒キヤンに沿わせて、Co−Cr(Co:80wt%)垂直磁化
膜を1400Å配し、その上に実施例−1と同様にダイヤモ
ンド状硬質炭素膜を100Å配し、もう一方の面にグラフ
ァイト薄膜を1450Å配し、潤滑剤としてパーフルオロア
ラキン酸を180Å配し、8ミリ幅のテープにし、実施例
−1と同じ条件でカセットに巻き込みエージングを行っ
た。
Arrange fine particles on the same film as in Example -2 Example -1, the Eu 2 O 3 particles side by high-frequency sputtering method, along a cylindrical Quillan diameter 50cm, Co-Cr (Co: 80wt%) Vertical A magnetized film was placed at 1400 °, a diamond-like hard carbon film was placed at 100 ° on the same manner as in Example-1, a graphite thin film was placed at 1450 ° on the other surface, and perfluoroarachinic acid was placed at 180 ° as a lubricant. And a tape having a width of 8 mm was wound into a cassette under the same conditions as in Example 1 and aged.

比較例−1 実施例−1でCo−Ni−O薄膜を配したのと反対側のフ
ィルム面にカーボン微粒子とCaCO3を重量比で2:1、ポリ
エステル樹脂に対し重量で1:1のバックコートを配した
以外は同じ条件で8ミリカセットテープを準備した。
Comparative Example -1 A carbon fine particle and CaCO 3 at a weight ratio of 2: 1 on the film surface on the opposite side of the Co-Ni-O thin film in Example 1 and a 1: 1 weight ratio with respect to the polyester resin. An 8 mm cassette tape was prepared under the same conditions except that the coat was provided.

比較例−2 実施例−2で、グラフアイト薄膜の代りに、Bをター
ゲットにしてCH4ガスを放電ガスとして0.1(Torr),13.
56(MHz)800(W)でのスパッタリングによりBC膜を12
00Å配した以外は同じ条件の8ミリカセットテープを準
備した。
In Comparative Example -2 Example -2 0.1 instead of graphite film, a CH 4 gas and B to the target as a discharge gas (Torr), 13.
12 BC film by sputtering at 56 (MHz) 800 (W)
An 8 mm cassette tape was prepared under the same conditions as above except that the tape was arranged at 00 °.

上記したテープをハイバンド仕様に改造した8ミリビ
デオで記録再生をくり返しジッターのレベルが画像目視
で許容レベルをこえるまでのくり返し走行回数を調べた
結果を表にまとめて示した。尚走行モードは全長記録
し、巻き戻し、再生チェックを行い、次に巻き戻すまで
3時間放置し巻き戻し再生するといったくり返しで比較
した。
The results of examining the number of times the tape was repeatedly recorded and reproduced with an 8 mm video modified to the high band specification until the jitter level exceeded an allowable level by visual observation were shown in a table. In the running mode, comparisons were made in such a way that the entire length was recorded, rewinding and reproduction were checked, and then left for 3 hours before rewinding to rewind and reproduce.

発明の効果 以上のように本発明によれば、走行性が良好でかつく
り返し耐久性も良好な高密度記録性能に優れた薄型の磁
気記録媒体が提供できるといったすぐれた効果がある。
Effects of the Invention As described above, according to the present invention, there is an excellent effect that a thin magnetic recording medium excellent in high-density recording performance having good running properties and good repeated durability can be provided.

【図面の簡単な説明】[Brief description of the drawings]

第1図は本発明の磁気記録媒体の一実施例の拡大断面図
で、第2図,第3図は従来の磁気記録媒体の拡大断面図
である。 9……高分子フィルム、10,11……下塗り層、12……強
磁性金属薄膜、13……ダイヤモンド状炭素膜、14……グ
ラフアイト膜、15A,15B……潤滑剤。
FIG. 1 is an enlarged sectional view of an embodiment of the magnetic recording medium of the present invention, and FIGS. 2 and 3 are enlarged sectional views of a conventional magnetic recording medium. 9: Polymer film, 10, 11: Undercoat layer, 12: Ferromagnetic metal thin film, 13: Diamond-like carbon film, 14: Graphite film, 15A, 15B: Lubricant.

Claims (1)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】高分子フィルムの一方の面に強磁性金属薄
膜とダイヤモンド状炭素膜,潤滑層を積層し、もう一方
の面にグラファイト膜を配したことを特徴とする磁気記
録媒体。
1. A magnetic recording medium characterized in that a ferromagnetic metal thin film, a diamond-like carbon film and a lubricating layer are laminated on one surface of a polymer film, and a graphite film is disposed on the other surface.
JP25512588A 1988-10-11 1988-10-11 Magnetic recording media Expired - Fee Related JP2605380B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP25512588A JP2605380B2 (en) 1988-10-11 1988-10-11 Magnetic recording media

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP25512588A JP2605380B2 (en) 1988-10-11 1988-10-11 Magnetic recording media

Publications (2)

Publication Number Publication Date
JPH02101622A JPH02101622A (en) 1990-04-13
JP2605380B2 true JP2605380B2 (en) 1997-04-30

Family

ID=17274436

Family Applications (1)

Application Number Title Priority Date Filing Date
JP25512588A Expired - Fee Related JP2605380B2 (en) 1988-10-11 1988-10-11 Magnetic recording media

Country Status (1)

Country Link
JP (1) JP2605380B2 (en)

Also Published As

Publication number Publication date
JPH02101622A (en) 1990-04-13

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