JPH01263913A - Magnetic recording medium - Google Patents

Magnetic recording medium

Info

Publication number
JPH01263913A
JPH01263913A JP9105588A JP9105588A JPH01263913A JP H01263913 A JPH01263913 A JP H01263913A JP 9105588 A JP9105588 A JP 9105588A JP 9105588 A JP9105588 A JP 9105588A JP H01263913 A JPH01263913 A JP H01263913A
Authority
JP
Japan
Prior art keywords
film
thin
magnetic recording
hard
carbon film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9105588A
Other languages
Japanese (ja)
Inventor
Koichi Shinohara
紘一 篠原
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP9105588A priority Critical patent/JPH01263913A/en
Publication of JPH01263913A publication Critical patent/JPH01263913A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To improve durability and wide-band C/N by disposing projections consisting of a nitride or carbide to an island shape on a perpendicularly magnet ized film and further, disposing a thin and hard diamondlike carbon film thereon. CONSTITUTION:The perpendicularly magnetized film 7 is disposed on a smooth high-polymer film 6 and the projections 8 consisting of the nitride or carbide are disposed to the island shape thereon; further, the thin and hard diamondlike carbon film 9 is disposed thereon. The performance of the perpendicularly magnetized film 7 is, therefore, improved by the microscopical improvement of the uniformity. The noise level is thereby lowered and the modulation by the microscopical change in the position of a magnetic recording layer viewed from a magnetic head is decreased down to a negligible level, by which the noise level is lowered. The hardness of the projections is approximated to the hardness of the thin and hard diamondlike carbon film 9, by which the durability is assured even if the thin and hard diamond-like carbon film 9 is formed thin ner. The short wavelength long output is thereby improved and the C/N is greatly improved.

Description

【発明の詳細な説明】 産業上の利用分野 本発明は、高密度磁気記録に適した垂直磁気記録用の磁
気記録媒体に関する。
DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention relates to a magnetic recording medium for perpendicular magnetic recording suitable for high-density magnetic recording.

従来の技術 近年、磁気記録の高密度化の進歩により、これまで実用
に供されてきた、長手記録に変り、記録減磁の小さい、
磁性層面内に垂直な反平行磁界で残留磁化を保持するい
わゆる垂直磁気記録が注目されている。かかる磁気記録
の実現には、垂直磁化可能な磁気記録層を必要とし、従
来、垂直磁化用の磁気記録層は、Co−Cr、Co−V
、Co−Mo等のコバルトと他の金属との合金をヌパッ
タリングや真空蒸着により薄膜化したもの(特開昭55
−122232号公報、同58−107506号公報)
、Co−Crスパッタ膜から成る第1の垂直磁化膜の上
に、保磁力の異なるCo−Crのスパッタ膜(特開昭5
7−179942号公報)やF es○4スパッタ膜(
特開昭59−119533号公報)から成る第2の垂直
磁化膜を積層したものが知られる。
Background of the Invention In recent years, advances in high-density magnetic recording have led to a change to longitudinal recording, which has been used in practice up to now, and which has low recording demagnetization.
So-called perpendicular magnetic recording, in which residual magnetization is maintained by an antiparallel magnetic field perpendicular to the plane of the magnetic layer, is attracting attention. To realize such magnetic recording, a magnetic recording layer capable of perpendicular magnetization is required, and conventionally, magnetic recording layers for perpendicular magnetization have been made of Co-Cr, Co-V
, Co-Mo and other alloys of cobalt and other metals are made into thin films by nuputtering or vacuum evaporation (Japanese Unexamined Patent Publication No. 55
-122232 publication, 58-107506 publication)
, Co--Cr sputtered films with different coercive forces (JP-A-5
7-179942) and Fes○4 sputtered film (
A structure in which a second perpendicularly magnetized film is laminated is known (Japanese Patent Application Laid-Open No. 59-119533).

しかしこのような垂直磁化膜は、耐久性が十分でないこ
とから、高分子フィルム上に微細な突起を配し、磁気記
録層自体に急しゅんな突起を形成することで走行性やス
チル耐久性を改善することがCo−Ni等で試みられ(
例えば特開昭58−100221号公報、同60−21
9621号公報)でいることから、垂直磁化膜の耐久性
の向上にも同様の技術思想の適用が想到される。
However, such perpendicular magnetization films do not have sufficient durability, so fine protrusions are placed on the polymer film and steep protrusions are formed on the magnetic recording layer itself to improve running performance and still durability. Improvements have been attempted with Co-Ni etc. (
For example, JP-A-58-100221, JP-A-60-21
9621), it is conceivable that similar technical ideas can be applied to improving the durability of perpendicularly magnetized films.

その−例は、第2図に磁気記録媒体の拡大断面図で示し
たような構成をもつものである。即ち、第2図で、1は
ポリエチレンテレフタレートフィルム、ホリエチレンナ
フタレートフィルム、ポリフェニレンサルファイド、ホ
リエーテルエーテルケトン、ポリアミド等の高分子フィ
ルムで、2はAl2O3,CaCO3,Tic2.Zr
O2,5no2.工n2Q3゜Cr 203等の無機微
粒子、ポリエチレン球、ポリイミド環等の有機微粒子を
固定した、微粒子塗布層である。3はCo−0r 、 
Co −Mo 、 Co −T i 。
An example of this is one having a configuration as shown in FIG. 2, which is an enlarged sectional view of a magnetic recording medium. That is, in FIG. 2, 1 is a polymer film such as polyethylene terephthalate film, polyethylene naphthalate film, polyphenylene sulfide, polyether ether ketone, polyamide, etc., and 2 is a polymer film such as Al2O3, CaCO3, Tic2. Zr
O2,5no2. This is a fine particle coating layer on which inorganic fine particles such as Cr 203, organic fine particles such as polyethylene spheres and polyimide rings are fixed. 3 is Co-0r,
Co-Mo, Co-Ti.

Co−Ta 、Co−W、Co−Cr−Nb 、Co−
Cr−Ru等の垂直磁化膜で、4はBN膜、BC膜、カ
ーボン膜、プラズマ重合膜等の保護膜で、5は脂肪酸。
Co-Ta, Co-W, Co-Cr-Nb, Co-
4 is a perpendicular magnetization film such as Cr-Ru, a protective film such as a BN film, a BC film, a carbon film, a plasma polymerized film, and 5 is a fatty acid.

パーフルオロアルキルカルボン酸、パーフルオロポリエ
ーテル等の潤滑剤である。
Lubricants such as perfluoroalkyl carboxylic acid and perfluoropolyether.

発明が解決しようとする課題 かかる構成の垂直磁気記録媒体は、微細突起をもだない
フィルム上に得られている特性のものが得られず、斜め
蒸着膜のCo −N i−0膜系の高保磁力量との対比
で特に優れたC/Nが得られるものではないことから、
改善が望まれていた。本発明は上記した事情に鑑みてな
されたもので、優れた広帯域C/Nを示す、耐久性の良
好な垂直磁気記録用の磁気記録媒体を提供するものであ
る。
Problems to be Solved by the Invention A perpendicular magnetic recording medium having such a structure cannot obtain the characteristics obtained on a film without fine protrusions, and it is difficult to obtain the characteristics obtained on a film having no fine protrusions. Since it does not provide particularly excellent C/N in comparison with high coercive force,
Improvement was desired. The present invention has been made in view of the above circumstances, and provides a magnetic recording medium for perpendicular magnetic recording that exhibits an excellent broadband C/N and has good durability.

課題を解決するための手段 本発明の磁気記録媒体は、上記した課題を解決するため
、平滑な高分子フィルム上に垂直磁化膜を配し、その上
に島状に窒化物又は炭化物の突起を配し、更にダイアモ
ンド状硬質炭素薄膜を配したものである。
Means for Solving the Problems In order to solve the above-mentioned problems, the magnetic recording medium of the present invention has a perpendicularly magnetized film arranged on a smooth polymer film, and island-shaped nitride or carbide protrusions are formed on the perpendicularly magnetized film. In addition, a diamond-shaped hard carbon thin film is provided.

作   用 本発明の磁気記録媒体は、上記した構成により、垂直磁
化膜の性能が、微視的な均一性の改善によりはかられる
ことから、雑音レベルが下がるのと、磁気ヘッドからみ
て、磁気記録層の位置が微視的に変化し変調されること
が無視できるようになシ雑音しベlしを下げることがで
き、突起の硬さがダイアモンド状硬質炭素薄膜の硬さに
近ずくことで、ダイアモンド状硬質炭素薄膜を薄くして
も耐久性の確保ができ、短波長出力の改善もできC/N
は大幅に改善される。
Function: With the above-described configuration, the magnetic recording medium of the present invention can improve the performance of the perpendicularly magnetized film by improving the microscopic uniformity. Microscopic changes and modulations in the position of the recording layer can be ignored, noise can be reduced, and the level can be lowered, and the hardness of the protrusions approaches that of a diamond-like hard carbon thin film. Therefore, even if the diamond-like hard carbon thin film is made thinner, durability can be ensured, and short wavelength output can be improved, resulting in C/N.
will be significantly improved.

実施例 以下、図面を参照しながら本発明の一実施例について説
明する。第1図は本発明の一実施例の磁気記録媒体の拡
大断面図で、第1図で6はポリエチレンテレフタレート
、ポリエチレンナフタレート、ポリフェニレンサルファ
イド、ポリエーテルサルフォン、ポリエーテルエーテル
ケトン、ポリアミド、ポリイミド等の高分子フィルムで
、外部添加微粒子を含むものであっても、平均粗さは5
0Å以下が好ましく、外部添加微粒子を含まず、傷や表
面欠陥の少ないものか、無いものは更に好ましい。
Embodiment Hereinafter, an embodiment of the present invention will be described with reference to the drawings. FIG. 1 is an enlarged sectional view of a magnetic recording medium according to an embodiment of the present invention. In FIG. 1, 6 is polyethylene terephthalate, polyethylene naphthalate, polyphenylene sulfide, polyether sulfone, polyether ether ketone, polyamide, polyimide, etc. Even for polymer films containing externally added fine particles, the average roughness is 5.
It is preferably 0 Å or less, and it is more preferable that it does not contain externally added fine particles and has few or no scratches or surface defects.

7はCo−Cr 、Co −Mo 、Co−W、Co−
Ta 。
7 is Co-Cr, Co-Mo, Co-W, Co-
Ta.

Co−Cr −Nb 、 Co−0r−Rh 等の垂直
磁化膜で、高周波スパッタリング、電子ビーム蒸着法等
の薄膜形成法で形成されるもので、膜厚は0.06μm
から0.3μmが好ましい。8はTic、BC,SiC
A perpendicularly magnetized film of Co-Cr-Nb, Co-0r-Rh, etc., formed by a thin film forming method such as high frequency sputtering or electron beam evaporation, and the film thickness is 0.06 μm.
0.3 μm is preferable. 8 is Tic, BC, SiC
.

BN、5t3N4.TiN等の炭化物又は窒化物を島状
に配して得られる島状突起で、島状突起の高さは30人
から150人が好ましい。
BN, 5t3N4. The island-shaped projection is obtained by arranging carbide or nitride such as TiN in an island shape, and the height of the island-like projection is preferably 30 to 150.

9はダイアモンド状硬質炭素薄膜で、炭化水素系ガス単
独又は他のガスとの混合系のプラズマを加速し形成する
プラズマ加速法、グラファイトをターゲットにしたスパ
ッタリング法、イオンビームデポジション法等により膜
厚50人から150人の範囲に構成されたものである。
9 is a diamond-shaped hard carbon thin film whose thickness is determined by a plasma acceleration method in which plasma of a hydrocarbon gas alone or a mixture with other gases is accelerated, a sputtering method using graphite as a target, an ion beam deposition method, etc. The number of participants ranges from 50 to 150.

10はパーフルオロポリエーテル、鉱物油、高級アルコ
ール等の潤滑剤である。尚本発明は、磁気ディスク、磁
気テープのいずれでも実施できるのは勿論であるが、以
下、更に具体的な磁気テープとしての実施例について比
較例との対比で詳しく説明する。
10 is a lubricant such as perfluoropolyether, mineral oil, or higher alcohol. Although the present invention can of course be implemented using either a magnetic disk or a magnetic tape, a more specific example using a magnetic tape will be described in detail below in comparison with a comparative example.

Jllo、5μmのポリエチレンテレフタレートフィル
ムで平均表面粗さが20人の平滑なものを、02.0.
09(Tarr)、200(KHz)、950(W)の
グロー放電によ93秒間表面処理した後、値径5oc!
II1表面温度70℃の円筒キャンに沿わせて、13.
56(MHz ) 、 2.3 (KW ) 、 Ar
 O,07(Torr)の高周波グロー放電により、G
o−Cr−Nb(79:15:6wt%)をターゲット
にして、スパッタリングを行って0.2μmの垂直磁化
膜を形成し、更にその上にBをターゲットにして、CH
4ガヌガス、O6(Torr )にして、200 (K
Hz ) 、 1 、2(KW )でスパッタリングを
行って、島状のBCを面積波ふぐ率20%、突起高さ8
Q人の島状突起として形成し、引き続き、グラファイト
をターゲットにしてAr 十H2−0,09(To r
 r ) A r :H2=1 ”、 4 。
Jllo, 5 μm polyethylene terephthalate film with an average surface roughness of 20 people, 02.0.
After surface treatment for 93 seconds by glow discharge at 09 (Tarr), 200 (KHz), and 950 (W), the value diameter was 5oc!
II1 Along the cylindrical can with a surface temperature of 70°C, 13.
56 (MHz), 2.3 (KW), Ar
Due to high frequency glow discharge of O.07 (Torr), G
Using o-Cr-Nb (79:15:6wt%) as a target, sputtering was performed to form a perpendicular magnetization film of 0.2 μm, and on top of that, using B as a target, CH
4 Ganugas, O6 (Torr), 200 (K
Sputtering was performed at Hz), 1, 2 (KW) to form island-shaped BC with an area wave rate of 20% and a protrusion height of 8.
It is formed as an island-like protrusion of Q, and then Ar 1H2-0,09 (Tor
r) A r :H2=1'', 4.

40(囲z ) 、 1.4 (KW)  のグロー放
電によりスパッタリングを行って、ダイアモンド状硬質
炭素薄膜を90人形成し、更に真空蒸着法によりパーフ
ルオロステアリン酸を40人配し、8ミリ中冨の磁気テ
ープを得た。
Sputtering was performed using a glow discharge of 40 (circle Z) and 1.4 (KW) to form 90 diamond-shaped hard carbon thin films, and 40 perfluorostearic acid was deposited by vacuum evaporation to form an 8 mm thick film. magnetic tape was obtained.

一方比較例は、同じフィルムを用い、直径120人のC
r2O3徽粒子を40ケ/(μm)2配してから、垂直
磁化膜、ダイアモンド状硬質炭素薄膜、パーフルオロス
テアリン酸を実施例と同じ製造条件で順次配し、8ミリ
幅の磁気テープとして準備した。
On the other hand, a comparative example uses the same film and has a diameter of 120 people.
After arranging 40 r2O3 particles/(μm)2, a perpendicular magnetization film, a diamond-shaped hard carbon thin film, and perfluorostearic acid were sequentially arranged under the same manufacturing conditions as in the example to prepare an 8 mm wide magnetic tape. did.

両テープを、改造した8ミリビデオにより、ギャップ長
0.16μm のアモルファスヘッドにより、ビット長
0.2μm 、 )ラックピッチ6μmの記録再生を行
って帯域10 (MHz )での広帯域C/Nを比較し
た。
Comparison of wideband C/N in band 10 (MHz) by recording and reproducing both tapes using a modified 8mm video tape using an amorphous head with a gap length of 0.16μm, a bit length of 0.2μm, and a rack pitch of 6μm. did.

初期のC/Nは、比較例をo(dB)とすると実施例は
3,5(dB)良好で、4o℃ses%R)((7)環
境下で140回くり返し走行した後のC/Nは、実施例
は初期値対比で−0,3〜−o、5(dB)、比較例は
同じ(−1,3〜−1,5(dB)で、スチル画像目視
でノイズの発生までの時間は、40 ”c 85%RH
で、実施例は63〜66(分)、比較例は60〜54(
分)、5℃15係RHで実施例は51〜54(分)、比
較例ば4Q〜43(分)で、実施例の方が耐久性も良好
で、且つ、C/Nもすぐれていることがわかる。
The initial C/N is good by 3.5 (dB) for the comparative example, which is 3.5 (dB), and the C/N after running 140 times under the (7) environment is 4oCses%R). N is -0.3 to -o, 5 (dB) compared to the initial value for the example, and the same (-1.3 to -1.5 (dB) for the comparative example, up to the occurrence of noise when visually inspecting the still image) The time is 40”c 85%RH
63 to 66 (minutes) for the example and 60 to 54 (minutes) for the comparative example.
51 to 54 (minutes) for the example at 5°C and 15% RH, and 4Q to 43 (minutes) for the comparative example, showing that the example has better durability and C/N. I understand that.

発明の効果 以上のように本発明によれば、耐久性、広帯域C/N共
に改善された垂直磁気記録用の磁気記録媒体が得られる
といったすぐれた効果がある。
Effects of the Invention As described above, the present invention has the excellent effect of providing a magnetic recording medium for perpendicular magnetic recording that is improved in both durability and broadband C/N.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明の一実施例の磁気記録媒体の拡大断面図
、第2図は従来の磁気記録媒体の拡大断面図である。 6・・・・・・高分子フィルム、7・・・・・・垂直磁
化膜、8・・・・・・島状突起(炭化物又は窒化物)、
9・・・・・・ダイアモンド状硬質炭素薄膜。 代理人の氏名 弁理士 中 尾 敏 男 ほか1名6”
°−高分子フィルム 7−皇l徴化朕 δ−−一方4大突疋ら (浅化物ス1;望化物少 q−−一タイイ七ント状、 第 2 囚
FIG. 1 is an enlarged sectional view of a magnetic recording medium according to an embodiment of the present invention, and FIG. 2 is an enlarged sectional view of a conventional magnetic recording medium. 6... Polymer film, 7... Perpendicular magnetization film, 8... Island-like protrusions (carbide or nitride),
9...Diamond-like hard carbon thin film. Name of agent: Patent attorney Toshio Nakao and 1 other person6”
°-Polymer film 7-English coloration δ--On the other hand, 4 large structures (shallow material 1; desired material small q--1 type 7-shaped, 2nd prisoner)

Claims (1)

【特許請求の範囲】[Claims] 平滑な高分子フィルム上に垂直磁化膜を配し、その上に
島状に窒化物又は炭化物の突起を配し、更にダイアモン
ド状硬質炭素薄膜を配したことを特徴とする磁気記録媒
体。
A magnetic recording medium comprising a perpendicularly magnetized film arranged on a smooth polymer film, island-shaped nitride or carbide protrusions arranged thereon, and further arranged a diamond-shaped hard carbon thin film.
JP9105588A 1988-04-13 1988-04-13 Magnetic recording medium Pending JPH01263913A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9105588A JPH01263913A (en) 1988-04-13 1988-04-13 Magnetic recording medium

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9105588A JPH01263913A (en) 1988-04-13 1988-04-13 Magnetic recording medium

Publications (1)

Publication Number Publication Date
JPH01263913A true JPH01263913A (en) 1989-10-20

Family

ID=14015819

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9105588A Pending JPH01263913A (en) 1988-04-13 1988-04-13 Magnetic recording medium

Country Status (1)

Country Link
JP (1) JPH01263913A (en)

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