JPS63102014A - Magnetic recording medium - Google Patents
Magnetic recording mediumInfo
- Publication number
- JPS63102014A JPS63102014A JP24687186A JP24687186A JPS63102014A JP S63102014 A JPS63102014 A JP S63102014A JP 24687186 A JP24687186 A JP 24687186A JP 24687186 A JP24687186 A JP 24687186A JP S63102014 A JPS63102014 A JP S63102014A
- Authority
- JP
- Japan
- Prior art keywords
- film
- magnetic
- protective film
- magnetic recording
- recording medium
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000005291 magnetic effect Effects 0.000 title claims abstract description 35
- 239000010408 film Substances 0.000 claims abstract description 24
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 19
- 229910052799 carbon Inorganic materials 0.000 claims abstract description 17
- 229910052751 metal Inorganic materials 0.000 claims abstract description 15
- 230000001681 protective effect Effects 0.000 claims abstract description 15
- 239000002184 metal Substances 0.000 claims abstract description 14
- 239000010409 thin film Substances 0.000 claims abstract description 12
- 229910052742 iron Inorganic materials 0.000 claims abstract description 11
- 229910052759 nickel Inorganic materials 0.000 claims abstract description 9
- 239000000758 substrate Substances 0.000 claims abstract description 8
- 238000004544 sputter deposition Methods 0.000 abstract description 6
- 239000000956 alloy Substances 0.000 abstract description 4
- 229910045601 alloy Inorganic materials 0.000 abstract description 4
- 230000005294 ferromagnetic effect Effects 0.000 abstract description 4
- 238000001771 vacuum deposition Methods 0.000 abstract description 3
- 229910017061 Fe Co Inorganic materials 0.000 abstract description 2
- 230000015572 biosynthetic process Effects 0.000 abstract 1
- 239000010410 layer Substances 0.000 description 8
- 239000011241 protective layer Substances 0.000 description 5
- 229910000684 Cobalt-chrome Inorganic materials 0.000 description 3
- 239000010952 cobalt-chrome Substances 0.000 description 3
- -1 Co-8m Inorganic materials 0.000 description 2
- 229910002804 graphite Inorganic materials 0.000 description 2
- 239000010439 graphite Substances 0.000 description 2
- 239000000314 lubricant Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 229920001721 polyimide Polymers 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 238000007738 vacuum evaporation Methods 0.000 description 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- 229910020630 Co Ni Inorganic materials 0.000 description 1
- 229910002440 Co–Ni Inorganic materials 0.000 description 1
- 229910020707 Co—Pt Inorganic materials 0.000 description 1
- 229910020516 Co—V Inorganic materials 0.000 description 1
- 229910017110 Fe—Cr—Co Inorganic materials 0.000 description 1
- 229910001030 Iron–nickel alloy Inorganic materials 0.000 description 1
- 240000007594 Oryza sativa Species 0.000 description 1
- 235000007164 Oryza sativa Nutrition 0.000 description 1
- 239000004952 Polyamide Substances 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 238000002441 X-ray diffraction Methods 0.000 description 1
- 239000003082 abrasive agent Substances 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000001941 electron spectroscopy Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 239000010687 lubricating oil Substances 0.000 description 1
- 239000000696 magnetic material Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- FPVKHBSQESCIEP-JQCXWYLXSA-N pentostatin Chemical compound C1[C@H](O)[C@@H](CO)O[C@H]1N1C(N=CNC[C@H]2O)=C2N=C1 FPVKHBSQESCIEP-JQCXWYLXSA-N 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 229920003229 poly(methyl methacrylate) Polymers 0.000 description 1
- 229920002647 polyamide Polymers 0.000 description 1
- 239000004417 polycarbonate Substances 0.000 description 1
- 229920000515 polycarbonate Polymers 0.000 description 1
- 229920000139 polyethylene terephthalate Polymers 0.000 description 1
- 239000005020 polyethylene terephthalate Substances 0.000 description 1
- 239000004926 polymethyl methacrylate Substances 0.000 description 1
- 235000009566 rice Nutrition 0.000 description 1
- 238000000682 scanning probe acoustic microscopy Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
- 229910052723 transition metal Inorganic materials 0.000 description 1
Landscapes
- Magnetic Record Carriers (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は磁気記録媒体、さらに詳しくは走行耐久性にす
ぐれる金属薄膜型磁気記録媒体に関する。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a magnetic recording medium, and more particularly to a metal thin film type magnetic recording medium that has excellent running durability.
近年、記録媒体の高密度化に伴い、従来の塗布型磁気記
録媒体に替わって、いわゆる金属薄膜型磁気記録媒体が
注目されるようになってきている。In recent years, as the density of recording media has increased, so-called metal thin film magnetic recording media have been attracting attention in place of conventional coated magnetic recording media.
しかし、金属薄膜型磁気記録媒体は、従来の塗布型磁気
記録媒体のように潤滑剤や研磨剤を磁性層中に混入させ
ることが困難なので、一般に走行耐久性に劣り、例えば
Ｃｏ−Ｃｒ合金膜を設けた垂直磁気記録ディスクの場合
ｉｏｏ回程度の走行パスで表面の合金層とヘッドとの間
で凝着等が生じて走行不能になることが多い。However, metal thin film magnetic recording media generally have poor running durability because it is difficult to mix lubricants or abrasives into the magnetic layer unlike conventional coated magnetic recording media. In the case of a perpendicular magnetic recording disk provided with a perpendicular magnetic recording disk, adhesion or the like occurs between the alloy layer on the surface and the head after about 100 running passes, and the disk often becomes unable to run.
そこで、このような問題を解決するために、液体潤滑剤
を磁性層表面に塗布したり、固体保護層を磁性層表面に
設けることが提案されている。この中では、固体潤滑剤
であるカーボンを主成分とする保護層を磁性層表面に設
けることが特に走行耐久性向上に効果があることが知ら
れている。In order to solve these problems, it has been proposed to apply a liquid lubricant to the surface of the magnetic layer or to provide a solid protective layer on the surface of the magnetic layer. Among these, it is known that providing a protective layer mainly composed of carbon, which is a solid lubricant, on the surface of the magnetic layer is particularly effective in improving running durability.
しかしながら、このようなカーボンを主成分とする保護
層を磁性層表面に設けてもなお走行耐久性が充分でない
。これは主にヘッドに生じた付着物が保護層との摩擦係
数を増大させることに原因するものと考えられる。However, even if such a protective layer containing carbon as a main component is provided on the surface of the magnetic layer, running durability is still insufficient. This is thought to be mainly due to the fact that the deposits formed on the head increase the coefficient of friction with the protective layer.
さらに、はう素、ケイ素、遷移金属元素等をダイアモン
ド状カーボン保護膜に含有させることが提案されている
がｒ％開昭６０−一タタ３ぶ号）、潤滑性が劣り、した
がって十分な耐久性が得られない。Furthermore, it has been proposed to incorporate boron, silicon, transition metal elements, etc. into the diamond-like carbon protective film; I can't get sex.
本発明は、磁気ヘッドに付着物を生せしめない、かつ走
行耐久性の著しく改良された金属薄膜型磁気記録媒体を
提供するにある。SUMMARY OF THE INVENTION The present invention provides a thin metal film type magnetic recording medium that does not cause deposits on a magnetic head and has significantly improved running durability.
本発明は、非磁性基板上に磁性金属薄膜を設けてなる磁
気記録媒体において、該薄膜上にＣ０１Ｆｅ、およびＮ
ｉから選ばれる少なくとも１種を含有するグラファイト
状カーボンを主成分とする保護膜が設けられていること
を特徴とする磁気記録媒体、に関する。The present invention provides a magnetic recording medium in which a magnetic metal thin film is provided on a nonmagnetic substrate, in which C01Fe and N
The present invention relates to a magnetic recording medium characterized in that it is provided with a protective film whose main component is graphitic carbon containing at least one kind selected from i.
上記グラファイト状カーボンを主成分とする保護層とは
、真空蒸着法、スパッタリング法等で作成されるグラフ
ァイト様のアモルファス膜を意味する。すなわち、Ｘ線
回折によっては明確なピークが見られず、かつＸ線電子
分光法（ｘｐｓ ）Ｋより求められる炭素のプラズモン
損失エネルギー値がグラファイトのそれを示すような膜
である。The above-mentioned protective layer containing graphite-like carbon as a main component means a graphite-like amorphous film created by a vacuum evaporation method, a sputtering method, or the like. That is, it is a film in which no clear peak is observed by X-ray diffraction, and the plasmon loss energy value of carbon determined by X-ray electron spectroscopy (XPS) K shows that of graphite.
上記グラファイト状カーボンを主成分とする保護膜中に
含有されるＣ ｏ、ＦｅｓおよびＮｉの重量はＩＯ憾以
下であり、Ｏ１夕〜３４であることが好オしｈｏ
本発明の磁性金属薄膜には、Ｆ ｅ ｓ Ｃｏ ｓ Ｎ
ｒ等の強磁性金属、あるいはＦｅ−Ｃｏ、Ｆｅ−Ｎｉ
、Ｃｏ−Ｎｉ、Ｆｅ−８ｉ、Ｃｏ−Ｃｒ。The weight of Co, Fes, and Ni contained in the above-mentioned protective film mainly composed of graphitic carbon is less than IO, and preferably O1~34. is F e s Co s N
ferromagnetic metal such as r, or Fe-Co, Fe-Ni
, Co-Ni, Fe-8i, Co-Cr.
Ｃｏ−Ｖ、Ｃｏ−８ｍ、Ｃｏ−Ｐｔ、Ｃｏ−Ｐ。Co-V, Co-8m, Co-Pt, Co-P.
Ｃｏ−Ｎ１−Ｐ、Ｆｅ−Ｃｒ−Ｃｏ等の強磁性合金、あ
るいはまたこれらに微量の金属元素等が添加されたもの
が使用される。A ferromagnetic alloy such as Co-N1-P or Fe-Cr-Co, or one in which a trace amount of a metal element or the like is added to these alloys is used.
非磁性基板としてはポリエチレンテレフタレート、ポリ
イミド、ポリアミド等のフィルム状の高分子材料、ポリ
カーボネイト、ポリメチルメタクリレート等のディスク
状の高分子材料、ガラス等のセラミック、アルミニウム
等の金属等が使用可能である。基板の形状はシート、カ
ード、ディスク、ドラム、テープ等のいずれでも良い。As the non-magnetic substrate, it is possible to use film-like polymeric materials such as polyethylene terephthalate, polyimide, polyamide, etc., disc-shaped polymeric materials such as polycarbonate, polymethyl methacrylate, ceramics such as glass, metals such as aluminum, etc. The shape of the substrate may be a sheet, card, disk, drum, tape, or the like.
本発明の磁気記録媒体を作成するには、寸ず非磁性基板
上に磁性金属薄膜を真空蒸着、スパッタリング、イオン
ブレーティング、メッキ等の方法で被着せしめて形成し
、更にその上にＣｏ、Ｆｅ。In order to create the magnetic recording medium of the present invention, a magnetic metal thin film is deposited on a nonmagnetic substrate by a method such as vacuum evaporation, sputtering, ion blating, or plating, and then Co, Fe.
ＮｉＯ中から少なくとも一種を含有するグラファイト状
カーボンを主成分とする保護膜を真空蒸着、スパッタリ
ング等で形成すれば良い。A protective film whose main component is graphitic carbon containing at least one type of NiO may be formed by vacuum evaporation, sputtering, or the like.
この場合、磁性膜は２種の異なる磁性体を用いて積層し
ても良いし、下地層を設けた単層型にしても良い。また
、中間層を設けた積層型にしても良い。なお磁性膜の厚
さはいずれの場合でもＯ０／〜２μｍ程度が適当である
。In this case, the magnetic film may be laminated using two different magnetic materials, or may be a single layer type with an underlayer provided. Alternatively, a laminated type having an intermediate layer may be used. In any case, the appropriate thickness of the magnetic film is about O0/~2 μm.
また、保護の厚さは厚すぎると記録、再生時に充分な出
力が得られず、−力落すぎると走行耐久性の向上が見ら
れないので、１０−１０００＾、好ましくは、ＴＯ−，
２００＾程度である。In addition, if the thickness of the protection is too thick, sufficient output will not be obtained during recording and reproduction, and if the force is too low, no improvement in running durability will be seen.
It is about 200^.
以下、本発明の実施例について説明する。 Examples of the present invention will be described below.
非磁性基板として厚さ５０μｍのポリイミドフィルムを
用いた。A polyimide film with a thickness of 50 μm was used as a nonmagnetic substrate.
壕ず、この基板上にＣｏＣｒをターゲットとしたＡｒガ
ス中のスパッタリングにより厚さ２３００ＡのＣｏＣｒ
薄膜を形成した。CoCr with a thickness of 2300A was deposited on this substrate without trenches by sputtering in Ar gas using CoCr as a target.
A thin film was formed.
次に、グラファイトターゲット上にＣｏ、Ｆｅ。Next, Co and Fe were deposited on the graphite target.
Ｎｉ等のはレットを置いてＡｒガス中でスパッタリング
を行い、上記ＣｏＣｒ薄膜上にＣｏ、Ｆｅ。Sputtering is performed in Ar gas with a metal layer such as Ni placed on top of the CoCr thin film.
Ｎｉの中から少なくとも一種を含有するグラファイト状
カーボンを主成分とする厚さ２００人の保護膜を各稲作
成した。A protective film with a thickness of 200 mm was prepared for each rice, the main component of which was graphitic carbon containing at least one type of Ni.
これらを直径３．５インチのディスクの形状に加工し、
市販のディスクジャケットに組み込んだ。These are processed into a disc shape with a diameter of 3.5 inches,
It was incorporated into a commercially available disc jacket.
市販のフロッピーディスクドライブにより記録を行った
後、再生信号と摩擦係数をモニターしながらｔｏＯｒ、
ｐ、ｍで回転させ、摩擦係数が急激に大きくなるまでの
パス数を測定することにより走行耐久性のテストを行っ
た。After recording with a commercially available floppy disk drive, toOr, while monitoring the playback signal and friction coefficient.
Running durability was tested by rotating at speeds p and m and measuring the number of passes until the friction coefficient suddenly increased.
Ｃｏ、Ｆｅ、Ｎｉ等の含有量はオージェ電子分光法を用
いて測定した各々の元素と炭素との微分スペクトルのピ
ーク比より求めた。なお、膜厚方向で保護膜の構成元素
の組成に変化がないことも同様にして確認した。The content of Co, Fe, Ni, etc. was determined from the peak ratio of the differential spectrum of each element and carbon measured using Auger electron spectroscopy. It was also similarly confirmed that there was no change in the composition of the constituent elements of the protective film in the film thickness direction.
比較の為、Ｃｏ、Ｆｅ％Ｎｉ’Ｓｔ含有しないグラファ
イト状カーボンを主成分とする厚さ一００＾の保護膜を
設けた媒体も作成し、これを比較例Ｊ−
とした。For comparison, a medium with a protective film of 100^ thickness mainly composed of graphitic carbon not containing Co, Fe%Ni'St was also prepared, and this was designated as Comparative Example J-.
得られた結果を第１表〜第１表に示した。表から明らか
なように、Ｃｏ、Ｆｅ、Ｎｉを適量含有したカーボンを
主成分とする保護膜を設けた媒体は、これらを含有しな
いカーボンを主成分とする保護膜を設けた媒体と比較し
て走行耐久性に優れている。ヘッドを顕微鏡観察した結
果、含有した金属の量が多く走行耐久性が悪かった媒体
には付着物はないものの傷が入り、走行耐久性の優れた
媒体には付着物も傷もなく、金属を含有しない媒体は傷
はないものの付着物が発生していることを確認した。The obtained results are shown in Tables 1 to 1. As is clear from the table, the media provided with a protective film mainly composed of carbon containing appropriate amounts of Co, Fe, and Ni are more effective than the media provided with a protective film mainly composed of carbon that does not contain these. Excellent running durability. As a result of observing the heads under a microscope, media with high metal content and poor running durability had no deposits but were scratched, while media with excellent running durability had no deposits or scratches and contained metal. Although there were no scratches on the media that had not been tested, it was confirmed that there were deposits on the media.
第−表
第３表
第１表
〔発明の効果〕
本発明により、磁気ヘッドに付着物を生せしめることの
ない、かつ走行耐久性の顕著に改良された磁気記録媒体
が得られる。Table 3 Table 1 [Effects of the Invention] The present invention provides a magnetic recording medium that does not cause deposits on the magnetic head and has significantly improved running durability.
Claims (1)
において、該薄膜上にＣｏ、Ｆｅ、およびＮｉから選ば
れる少なくとも１種を１０重量％以下含有するグラファ
イト状カーボンを主成分とする保護膜が設けられている
ことを特徴とする磁気記録媒体。In a magnetic recording medium comprising a magnetic metal thin film provided on a non-magnetic substrate, a protective film mainly composed of graphitic carbon containing at least 10% by weight of at least one selected from Co, Fe, and Ni on the thin film. A magnetic recording medium characterized by being provided with.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP24687186A JPS63102014A (en) | 1986-10-17 | 1986-10-17 | Magnetic recording medium |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP24687186A JPS63102014A (en) | 1986-10-17 | 1986-10-17 | Magnetic recording medium |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63102014A true JPS63102014A (en) | 1988-05-06 |
Family
ID=17154970
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP24687186A Pending JPS63102014A (en) | 1986-10-17 | 1986-10-17 | Magnetic recording medium |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63102014A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5030494A (en) * | 1989-01-26 | 1991-07-09 | International Business Machines Corporation | Carbon overcoat for a thin film magnetic recording disk containing discrete clusters of tungsten (W) or tungsten carbide (WC) which project from the surface of the overcoat |
| US6159638A (en) * | 1997-07-24 | 2000-12-12 | Sharp Kabushiki Kaisha | Solid polymer electrolyte and preparation method therefor |
-
1986
- 1986-10-17 JP JP24687186A patent/JPS63102014A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5030494A (en) * | 1989-01-26 | 1991-07-09 | International Business Machines Corporation | Carbon overcoat for a thin film magnetic recording disk containing discrete clusters of tungsten (W) or tungsten carbide (WC) which project from the surface of the overcoat |
| US6159638A (en) * | 1997-07-24 | 2000-12-12 | Sharp Kabushiki Kaisha | Solid polymer electrolyte and preparation method therefor |
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