JPS63102016A - Magnetic recording medium - Google Patents
Magnetic recording mediumInfo
- Publication number
- JPS63102016A JPS63102016A JP24687386A JP24687386A JPS63102016A JP S63102016 A JPS63102016 A JP S63102016A JP 24687386 A JP24687386 A JP 24687386A JP 24687386 A JP24687386 A JP 24687386A JP S63102016 A JPS63102016 A JP S63102016A
- Authority
- JP
- Japan
- Prior art keywords
- film
- magnetic
- protective film
- magnetic recording
- recording medium
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000005291 magnetic effect Effects 0.000 title claims abstract description 37
- 239000010408 film Substances 0.000 claims abstract description 30
- 230000001681 protective effect Effects 0.000 claims abstract description 20
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 18
- 229910052751 metal Inorganic materials 0.000 claims abstract description 17
- 229910052799 carbon Inorganic materials 0.000 claims abstract description 16
- 239000002184 metal Substances 0.000 claims abstract description 15
- 239000010409 thin film Substances 0.000 claims abstract description 15
- 229910052726 zirconium Inorganic materials 0.000 claims abstract description 10
- 229910052697 platinum Inorganic materials 0.000 claims abstract description 9
- 239000000758 substrate Substances 0.000 claims abstract description 8
- 230000005294 ferromagnetic effect Effects 0.000 abstract description 4
- 239000000956 alloy Substances 0.000 abstract description 3
- 229910045601 alloy Inorganic materials 0.000 abstract description 3
- 229910052759 nickel Inorganic materials 0.000 abstract description 3
- 229910017061 Fe Co Inorganic materials 0.000 abstract description 2
- 229910001030 Iron–nickel alloy Inorganic materials 0.000 abstract description 2
- 229910052742 iron Inorganic materials 0.000 abstract 2
- 230000015572 biosynthetic process Effects 0.000 abstract 1
- 238000000151 deposition Methods 0.000 abstract 1
- 239000010410 layer Substances 0.000 description 5
- 238000004544 sputter deposition Methods 0.000 description 5
- 150000002739 metals Chemical class 0.000 description 4
- 229910000684 Cobalt-chrome Inorganic materials 0.000 description 3
- 239000010952 cobalt-chrome Substances 0.000 description 3
- 229910002804 graphite Inorganic materials 0.000 description 2
- 239000010439 graphite Substances 0.000 description 2
- 239000000314 lubricant Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 229910052763 palladium Inorganic materials 0.000 description 2
- 229920001721 polyimide Polymers 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 238000007738 vacuum evaporation Methods 0.000 description 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- 229910020630 Co Ni Inorganic materials 0.000 description 1
- 229910002440 Co–Ni Inorganic materials 0.000 description 1
- 229910020516 Co—V Inorganic materials 0.000 description 1
- WMFYOYKPJLRMJI-UHFFFAOYSA-N Lercanidipine hydrochloride Chemical compound Cl.COC(=O)C1=C(C)NC(C)=C(C(=O)OC(C)(C)CN(C)CCC(C=2C=CC=CC=2)C=2C=CC=CC=2)C1C1=CC=CC([N+]([O-])=O)=C1 WMFYOYKPJLRMJI-UHFFFAOYSA-N 0.000 description 1
- 239000004952 Polyamide Substances 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 235000010724 Wisteria floribunda Nutrition 0.000 description 1
- 239000003082 abrasive agent Substances 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 238000005422 blasting Methods 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000001941 electron spectroscopy Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 239000010687 lubricating oil Substances 0.000 description 1
- 239000000696 magnetic material Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 239000008188 pellet Substances 0.000 description 1
- FPVKHBSQESCIEP-JQCXWYLXSA-N pentostatin Chemical compound C1[C@H](O)[C@@H](CO)O[C@H]1N1C(N=CNC[C@H]2O)=C2N=C1 FPVKHBSQESCIEP-JQCXWYLXSA-N 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 229920003229 poly(methyl methacrylate) Polymers 0.000 description 1
- 229920002647 polyamide Polymers 0.000 description 1
- 239000004417 polycarbonate Substances 0.000 description 1
- 229920000515 polycarbonate Polymers 0.000 description 1
- -1 polyethylene terephthalate Polymers 0.000 description 1
- 229920000139 polyethylene terephthalate Polymers 0.000 description 1
- 239000005020 polyethylene terephthalate Substances 0.000 description 1
- 239000004926 polymethyl methacrylate Substances 0.000 description 1
- 239000011241 protective layer Substances 0.000 description 1
- 238000000682 scanning probe acoustic microscopy Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 229910052723 transition metal Inorganic materials 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
Landscapes
- Magnetic Record Carriers (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は磁気記録媒体、さらに詳しくは走行耐久性にす
ぐれる金属薄膜型磁気記録媒体に関する。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a magnetic recording medium, and more particularly to a metal thin film type magnetic recording medium that has excellent running durability.
近年、記録媒体の高密度化に伴い、従来の塗布型磁気記
録媒体に替わって、いわゆる金属薄膜型磁気記録媒体が
注目されるようになってきている。In recent years, as the density of recording media has increased, so-called metal thin film magnetic recording media have been attracting attention in place of conventional coated magnetic recording media.
しかし、金属薄膜型磁気記録媒体は、従来の塗布型磁気
記録媒体のように潤滑剤や研磨剤を磁性層中に混入させ
ることが困難なので、一般に走行耐久性に劣り、例えば
Co−Cr合金膜を設けた垂直磁気記録ディスクの場合
100回程鹿の走行パスで表面の合金層とヘッドとの間
で凝着等が生じて走行不能になることが多い。However, metal thin film magnetic recording media generally have poor running durability because it is difficult to mix lubricants or abrasives into the magnetic layer unlike conventional coated magnetic recording media. In the case of a perpendicular magnetic recording disk provided with a disk, adhesion occurs between the alloy layer on the surface and the head after about 100 running passes, and the disk often becomes unable to run.
そこで、このような問題を解決するために、液体潤滑剤
を磁性薄膜表面に塗布したυ、固体保護膜を磁性層表面
に設けることが提案されている。In order to solve this problem, it has been proposed to apply a liquid lubricant to the surface of the magnetic thin film, or to provide a solid protective film on the surface of the magnetic layer.
この中では、固体潤滑剤であるカーボンを主成分とする
保護膜を磁性薄膜表面に設けることが特に走行耐久性向
上に効果があることが知られている。Among these, it is known that providing a protective film mainly composed of carbon, which is a solid lubricant, on the surface of the magnetic thin film is particularly effective in improving running durability.
しかしながら、このようなカーボンを主成分とする保護
層を磁性層表面に設けてもなお走行耐久性が充分でない
。これは主にヘッドに生じた付着物が保護膜との摩擦係
数を増大させることに原因するものと考えられる。However, even if such a protective layer containing carbon as a main component is provided on the surface of the magnetic layer, running durability is still insufficient. This is thought to be mainly due to the fact that the deposits formed on the head increase the coefficient of friction with the protective film.
さらに、はう素、ケイ素、遷移金属元素等をダイアモン
ド状カーボン保護膜に含有させることが提案されている
が(特開昭60−22236号)、潤滑性が劣り、した
がって十分な耐久性が得られない。Furthermore, it has been proposed to incorporate boron, silicon, transition metal elements, etc. into the diamond-like carbon protective film (Japanese Unexamined Patent Publication No. 60-22236), but the lubricity is poor and therefore sufficient durability cannot be obtained. I can't do it.
本発明は、磁気ヘッドに付着物を生ぜしめない:かつ走
行耐久性の著しく改良された金属薄膜型磁気記録媒体を
提供するにある。The present invention provides a metal thin film magnetic recording medium that does not cause deposits on a magnetic head and has significantly improved running durability.
本発明は、非磁性基板上に磁性金属薄膜を設けてなる磁
気記録媒体において、該薄膜上にQe、Pd、Pt、お
よびZrから選ばれる少なくとも1種を含有するグラフ
ァイト状カーボンを主成分とする保護膜が設けられてい
ることを特徴とする磁気記録媒体、に関する。The present invention provides a magnetic recording medium in which a magnetic metal thin film is provided on a non-magnetic substrate, in which the main component is graphitic carbon containing at least one selected from Qe, Pd, Pt, and Zr on the thin film. The present invention relates to a magnetic recording medium characterized by being provided with a protective film.
上記グラファイト状カーボンを主成分とする保護膜とは
、真空蒸着法、ス・でツタリング法等で作成されるグラ
ファイト様のアモルファス膜を意味する。すなわち、X
線回折によっては明確なピークが見られず、かつX線電
子分光法(xps)によシ求められる炭素のプラズモン
損失工*ルギ−Mがグラファイトのそれを示すような膜
である。The above-mentioned protective film containing graphite-like carbon as a main component means a graphite-like amorphous film prepared by a vacuum evaporation method, a sputtering method, or the like. That is, X
It is a film in which no clear peak is observed by line diffraction, and the plasmon loss coefficient of carbon determined by X-ray electron spectroscopy (XPS) is similar to that of graphite.
上記グラファイト状カーボンを主成分とする保護膜中に
含有されるGe、Pd%pt、およびZrの重量け10
%以下であり、0.j−7%であることが好ましい。The weight of Ge, Pd%pt, and Zr contained in the above-mentioned protective film mainly composed of graphitic carbon is 10%.
% or less, and 0. It is preferably j-7%.
本発明の磁性金属薄膜には、pe、Co、Ni等の強磁
性金属、あるいはFe−Co、Fe−Ni、Co−Ni
、Fe−8i%Co−Cr。The magnetic metal thin film of the present invention includes ferromagnetic metals such as pe, Co, and Ni, or Fe-Co, Fe-Ni, and Co-Ni.
, Fe-8i%Co-Cr.
Co−V、Co−8m、Co−Pt5Co−P。Co-V, Co-8m, Co-Pt5Co-P.
Co−N1−P、)’e−Cr−Co等の強磁性合金、
あるいはまたこれらに微量の金属元素等が添加されたも
のが使用される。Ferromagnetic alloys such as Co-N1-P, )'e-Cr-Co,
Alternatively, those to which trace amounts of metal elements or the like are added are used.
非磁性基板としてはポリエチレンテレフタレート、ポリ
イミド、ポリアミド等のフィルム状の高分子材料、ポリ
カーボネイト、ポリメチルメタクリレート等のディスク
状の高分子材料、ガラス等のセラミック、アルミニウム
等の金属等が使用可能である。基板の形状はシート、カ
ード、ディスク、ドラム、テープ等のいずれでも良い。As the non-magnetic substrate, it is possible to use film-like polymeric materials such as polyethylene terephthalate, polyimide, polyamide, etc., disc-shaped polymeric materials such as polycarbonate, polymethyl methacrylate, ceramics such as glass, metals such as aluminum, etc. The shape of the substrate may be a sheet, card, disk, drum, tape, or the like.
本発明の磁気記録媒体を作成するには、捷ず非磁性基板
上に磁性金属薄膜を真空蒸着、スパッタリング、イオン
ブレーティング、メッキ等の方法で被着せしめて形成し
、更にその上にC□、pe。To create the magnetic recording medium of the present invention, a magnetic metal thin film is deposited on a non-magnetic substrate by vacuum evaporation, sputtering, ion blasting, plating, etc., and then C□ , pe.
Niの中から少なくとも一種を含有するグラファイト状
カーメンを主成分とする保護膜を真空蒸着、スパッタリ
ング等で形成すれば良い。A protective film mainly composed of graphitic carmen containing at least one type of Ni may be formed by vacuum evaporation, sputtering, or the like.
この場合、磁性膜は2種の異なる磁性体を用いて様4し
ても良いし、下地層を設けた単層型にしても良い。また
、中間層を設けた積層型にしても良い。なお磁性膜の厚
さはいずれの場合でもO0/−2μmが適当である。In this case, the magnetic film may be of a different type using two different magnetic materials, or may be of a single layer type with an underlayer provided. Alternatively, a laminated type having an intermediate layer may be used. In any case, the appropriate thickness of the magnetic film is O0/-2 .mu.m.
また、保護膜の厚さけ厚すぎると記録、再生時に充分な
出力が得られず、−力落すぎると走行耐久性の向上が見
られないので、lO〜toooX、好ましくはjO−2
00穴程度である。In addition, if the thickness of the protective film is too thick, sufficient output cannot be obtained during recording and reproduction, and if the force is too low, no improvement in running durability can be seen.
It is about 00 holes.
以下、本発明の実施例について説明する。 Examples of the present invention will be described below.
非磁性基板として厚さSOμmのポリイミドフィルムを
用いた。A polyimide film with a thickness of SO μm was used as a nonmagnetic substrate.
まず、この基板上にCoCrをターゲットしたArガス
中のスパッタリングによシ厚さ、2300穴のCoCr
薄膜を形成した。First, a CoCr film with a thickness of 2300 holes was deposited on this substrate by sputtering in Ar gas with CoCr as a target.
A thin film was formed.
次に、グラファイトターゲット上にGe、Pd、−よ−
Pt、Zr等のベレットを置いてArガス中でスパッタ
リングを行い、上記CoCr薄膜上にGe。Next, a pellet of Ge, Pd, Pt, Zr, etc. is placed on the graphite target and sputtering is performed in Ar gas to deposit Ge on the CoCr thin film.
Pd、Pt、Zrのうち少なくとも一種を含有するグラ
ファイト状カーボンを主成分とする厚さλ00^の保護
膜を各種作成した。Various types of protective films having a thickness of λ00^ and having graphite-like carbon as a main component containing at least one of Pd, Pt, and Zr were prepared.
これらを直径3.3インチのディスクの形状に加工し、
市販のディスクジャケットに組み込んだ。Process these into a disc shape with a diameter of 3.3 inches,
It was incorporated into a commercially available disc jacket.
市販の70ツピーデイスクドライブによシ記録を行った
後、再生信号と摩擦係数をモニターしなから乙θθr、
p、m、で回転させ、摩擦係数が急激に大きくなるまで
の−ξミスを測定することによシ走行耐久性のテストを
行った。After recording on a commercially available 70 disk drive, monitor the playback signal and friction coefficient.
The running durability was tested by rotating at speeds p and m and measuring the -ξ error until the friction coefficient suddenly increased.
Ge、Pd、Pt、Zr等の含有量はオージェ電子分光
法を用いて測定した各々の元素と炭素との微分スはクト
ルのピーク比より求めた。なお、膜厚方向で保護膜の構
成元素の組成に変化がないことも同様にして確認した。The content of Ge, Pd, Pt, Zr, etc. was determined from the differential of each element and carbon measured using Auger electron spectroscopy based on the Kutle peak ratio. It was also similarly confirmed that there was no change in the composition of the constituent elements of the protective film in the film thickness direction.
比較の為、Ge、Pd、Pt、Zr等を含有しないグラ
ファイト状カーボンを主成分とする厚さ200穴の保護
膜を設けた媒体も作成し、これを比較例とした。For comparison, a medium with a protective film having a thickness of 200 holes mainly composed of graphitic carbon containing no Ge, Pd, Pt, Zr, etc. was also prepared, and this was used as a comparative example.
得られた結果を第1表〜第μ表に示した。表から明らか
なように、上記金属を適量含有したカーボンを主成分と
する保護膜を設けた媒体は、これらを含有しないカーボ
ンを主成分とする保護膜を設けた媒体と比較して走行耐
久性に優れている。The results obtained are shown in Table 1 to Table μ. As is clear from the table, the running durability of the media provided with a protective film mainly composed of carbon containing appropriate amounts of the above metals is higher than that of the media provided with a protective film mainly composed of carbon that does not contain these metals. Excellent.
ヘッドを顕微鏡観察した結果、含有した金属の量が多く
走行耐久性が悪かった媒体には付着物はないものの傷が
入シ、走行耐久性の優れた媒体には付着物も傷もなく、
金属を含有しない媒体は傷はないものの付着物が発生し
ていることを確認した。As a result of observing the heads under a microscope, media with high metal content and poor running durability had no deposits but were scratched, while media with excellent running durability had no deposits or scratches.
Although there were no scratches on the medium that did not contain metal, it was confirmed that deposits were generated.
第1表
第2表
第3表
第μ表
一タ−
〔発明の効果〕
本発明の磁気記録媒体は、走行時磁気ヘッドに付着物を
生ぜしめないと同時に、走行耐久性に顕著にすぐれるも
のである。Table 1 Table 2 Table 3 Table μ Table 1 [Effects of the Invention] The magnetic recording medium of the present invention does not produce deposits on the magnetic head during running, and at the same time has significantly superior running durability. It is something.
特許出願人 富士写真フィルム株式会社−7θ−Patent applicant: Fuji Photo Film Co., Ltd. -7θ-
Claims (1)
において、該薄膜上にGe、Pd、Pt、およびZrか
ら選ばれる少なくとも1種を10重量%以下含有するグ
ラファイト状カーボンを主成分とする保護膜が設けられ
ていることを特徴とする磁気記録媒体。A magnetic recording medium comprising a magnetic metal thin film provided on a non-magnetic substrate, the main component of which is graphitic carbon containing 10% by weight or less of at least one selected from Ge, Pd, Pt, and Zr. A magnetic recording medium characterized by being provided with a protective film.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP24687386A JPS63102016A (en) | 1986-10-17 | 1986-10-17 | Magnetic recording medium |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP24687386A JPS63102016A (en) | 1986-10-17 | 1986-10-17 | Magnetic recording medium |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS63102016A true JPS63102016A (en) | 1988-05-06 |
Family
ID=17155003
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP24687386A Pending JPS63102016A (en) | 1986-10-17 | 1986-10-17 | Magnetic recording medium |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS63102016A (en) |
-
1986
- 1986-10-17 JP JP24687386A patent/JPS63102016A/en active Pending
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US4647507A (en) | Magnetic recording material | |
US5118564A (en) | Longitudinal magnetic recording media with fine grain crystal magnetic layer | |
JPH07161034A (en) | Magnetic recording medium | |
JPH0675287B2 (en) | Magnetic recording medium | |
JPS63102017A (en) | Magnetic recording medium | |
JPS63102016A (en) | Magnetic recording medium | |
JPS63102014A (en) | Magnetic recording medium | |
JPS63102018A (en) | Magnetic recording medium | |
JPS63102023A (en) | Magnetic recording medium | |
JPS63102022A (en) | Magnetic recording medium | |
JPS63102015A (en) | Magnetic recording medium | |
JPS63102019A (en) | Magnetic recording medium | |
JP3962962B2 (en) | Magnetic recording medium | |
JP2596072B2 (en) | Magnetic recording media | |
JPS5942634A (en) | Magnetic recording medium | |
JP2527616B2 (en) | Metal thin film magnetic recording medium | |
JPH02101618A (en) | Magnetic disk | |
JP3627298B2 (en) | Magnetic recording medium | |
JPS634419A (en) | Magnetic recording medium provided with protective layer having carbon-containing composition | |
JPH0750009A (en) | Magnetic recording medium | |
JP2626051B2 (en) | Magnetic recording media | |
JP2732153B2 (en) | Metal thin-film magnetic recording media | |
JPH0268712A (en) | Thin film magnetic recording medium | |
JPS63183607A (en) | Magnetic recording medium | |
JPH02210614A (en) | Magnetic recording medium |