JP2527616B2 - Metal thin film magnetic recording medium - Google Patents

Metal thin film magnetic recording medium

Info

Publication number
JP2527616B2
JP2527616B2 JP1147637A JP14763789A JP2527616B2 JP 2527616 B2 JP2527616 B2 JP 2527616B2 JP 1147637 A JP1147637 A JP 1147637A JP 14763789 A JP14763789 A JP 14763789A JP 2527616 B2 JP2527616 B2 JP 2527616B2
Authority
JP
Japan
Prior art keywords
film
magnetic
recording medium
thin film
magnetic recording
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1147637A
Other languages
Japanese (ja)
Other versions
JPH0312813A (en
Inventor
俊明 森近
秀生 越本
達彦 門脇
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kubota Corp
Original Assignee
Kubota Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kubota Corp filed Critical Kubota Corp
Priority to JP1147637A priority Critical patent/JP2527616B2/en
Publication of JPH0312813A publication Critical patent/JPH0312813A/en
Application granted granted Critical
Publication of JP2527616B2 publication Critical patent/JP2527616B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Magnetic Record Carriers (AREA)

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明はノイズ特性にすぐれた金属薄膜型面内記録用
磁気記録媒体に関する。
TECHNICAL FIELD The present invention relates to a magnetic recording medium for metal thin film type in-plane recording excellent in noise characteristics.

〔従来の技術〕[Conventional technology]

近時、磁気記録媒体として、CoNi,CoCr,CoCrNi等の強
磁性金属の薄膜(磁性層)を非磁性基体上に成膜した金
属薄膜型磁気記録媒体が、その高密度記録性により、従
来の塗布型磁気記録媒体に置き代りつつある。その記録
層である磁性膜の形成は、スパッタリング、イオンプレ
ーティング、真空蒸着等の各種物理的蒸着法により行わ
れる。磁気記録方式を面内磁化方式とする場合の記録媒
体では、その磁性膜に面内異方性を導入するための下地
層、代表的にはクロム膜が基体上に成膜され、そのCr膜
面に上記磁性膜の積層成膜が行われる。
Recently, as a magnetic recording medium, a metal thin film type magnetic recording medium in which a thin film (magnetic layer) of a ferromagnetic metal such as CoNi, CoCr, and CoCrNi is formed on a non-magnetic substrate has become Coating type magnetic recording media are being replaced. The magnetic film as the recording layer is formed by various physical vapor deposition methods such as sputtering, ion plating and vacuum vapor deposition. In a recording medium in which the magnetic recording method is the in-plane magnetization method, an underlayer for introducing in-plane anisotropy in the magnetic film, typically a chromium film, is formed on the substrate, and the Cr film is formed. A stacked film of the magnetic film is formed on the surface.

〔発明が解決しようとする課題〕[Problems to be Solved by the Invention]

上記金属薄膜型磁気記録媒体は、これまでの塗布型磁
気記録媒体にまさる高密度の記録が可能であるが、次世
代の磁気記録媒体としては更に記録密度の向上が要求さ
れる。
The metal thin film type magnetic recording medium is capable of higher density recording than the conventional coating type magnetic recording medium, but further improvement in recording density is required for the next generation magnetic recording medium.

本発明は、上記金属薄膜型磁気記録媒体について、更
にその高密度記録を可能とするためのノイズ特性の改良
された磁気記録媒体を提供しようとするものである。
An object of the present invention is to provide a magnetic recording medium having improved noise characteristics for the above-mentioned metal thin film type magnetic recording medium, which enables high density recording.

〔課題を解決するための手段および作用〕[Means and Actions for Solving the Problems]

本発明は、非磁性基体上に記録層として強磁性金属か
らなる薄膜が下地膜を介して積層形成されている面内記
録用磁気記録媒体において、 前記下地膜が下式: Cr100-xAgx …〔I〕 〔但し、xは0.1〜3.0である〕 で示される組成を有する合金からなることを特徴として
いる。
The present invention relates to a magnetic recording medium for in-plane recording, wherein a thin film made of a ferromagnetic metal is laminated as a recording layer on a non-magnetic substrate via an underlayer film, wherein the underlayer film has the following formula: Cr 100- xAgx ... [I] [where x is 0.1 to 3.0], and is characterized by being composed of an alloy having a composition.

上記のように本発明の磁気記録媒体は、記録層である
強磁性金属薄膜(磁性膜)に面内異方性を付与する下地
膜が、〔I〕式で示されるCrAg合金を以て形成されてい
る。この下地膜を形成するCrAg合金中のAgはCrに固溶せ
ず、Crの粒界に析出して下地膜の結晶粒界を明確化す
る。下地膜の粒界が明確化されることに伴い、その下地
膜面上に積層形成される磁性膜の粒界の明確化・磁区の
孤立化が促され、結果として磁性膜の保磁力増加、磁化
遷移幅の減少等による記録再生ノイズ特性の低減効果が
得られる。
As described above, in the magnetic recording medium of the present invention, the underlayer film that imparts in-plane anisotropy to the ferromagnetic metal thin film (magnetic film) that is the recording layer is formed of the CrAg alloy represented by the formula [I]. There is. Ag in the CrAg alloy that forms this underlayer does not form a solid solution with Cr and precipitates at the grain boundaries of Cr to clarify the grain boundaries of the underlayer. With the clarification of the grain boundaries of the underlayer, the clarification of grain boundaries and the isolation of magnetic domains of the magnetic film laminated on the underlayer surface are promoted, resulting in an increase in the coercive force of the magnetic film. The effect of reducing the recording / reproducing noise characteristic due to the reduction of the magnetization transition width and the like can be obtained.

下地膜のCrAg合金におけるAg量(x)の下限を0.1と
したのは、上記効果を十分ならしめるためである。しか
し、その量があまり多くなると、却って磁性膜の保磁力
(Hc)の低下傾向をみる。これは、Agの増量に伴って下
地膜のCrの結晶に乱れが生じること等によるものと考え
られる。このため、Ag量の上限を3.0とした。
The lower limit of the Ag amount (x) in the CrAg alloy of the underlayer is set to 0.1 in order to make the above effect sufficiently. However, when the amount is too large, the coercive force (Hc) of the magnetic film tends to decrease. It is considered that this is because the crystal of Cr of the base film is disturbed as the amount of Ag is increased. Therefore, the upper limit of Ag amount is set to 3.0.

上記下地膜の膜面上に積層形成される磁性膜は、Co,C
oNi,CoCr,CoCrNi等、あるいはその磁気的・電気的特性
の改善を目的として添加される、例えばTa,Nb,V,P,その
他の元素を含有する各種の強磁性合金であり、その合金
組成の選択は自由である。
The magnetic film laminated on the film surface of the underlayer is made of Co, C
oNi, CoCr, CoCrNi, etc., or various ferromagnetic alloys containing Ta, Nb, V, P, and other elements added for the purpose of improving their magnetic and electrical properties, and their alloy composition. Is free to choose.

本発明の金属薄膜型磁気記録媒体は、磁気ディスクを
はじめ、磁気ドラム、磁気テープ、磁気シート等を包含
する。これらは、いずれもその磁性膜に面内異方性を導
入するための下地膜が前記〔I〕式で示される組成を有
するCrAg合金からなる点を除いて、公知の工程および条
件に従って製作することができる。例えば、磁気ディス
クについて述べれば、アルミニウム合金板等を基体と
し、その表面に無電解めっきにより硬質のNi−Pめっき
膜(膜厚:例えば15〜25μm)を設け、めっき膜面にテ
キスチャ処理を施したのち、磁性膜に面内異方性を与え
るための下地層であるCrAg合金膜を適宜膜厚(例えば50
0〜3000Å)に形成する。その膜面上に、記録層である
磁性膜(膜厚は例えば500〜2000Å)を成膜する。つい
で磁性膜の摩耗・損傷を防止するための保護膜として、
潤滑性と耐摩耗性を備えた被膜、例えば炭素質膜(膜
厚:例えば150〜600Å)を形成することにより、多層積
層構造を有する面内記録用磁気ディスクを得る。その積
層構造は上記の例に限定されず、例えば、磁性膜の上
に、炭素質膜を成膜するに先立って、Cr膜(膜厚約100
〜500Å)を形成することにより、磁気ディスクの耐候
性をさらに高めることができ、また磁性膜面に炭素質膜
を形成した後、更にその表面に潤滑剤(膜厚:例えば10
〜100Å)を設けて、磁気ヘッドに対する保護潤滑機能
をより良好なものとすることもできる。なお、各層の成
膜は、スパッタリング法、イオンプレーティング法、真
空蒸着法などにより行うことができる。
The metal thin film type magnetic recording medium of the present invention includes a magnetic disk, a magnetic drum, a magnetic tape, a magnetic sheet and the like. Each of these is manufactured according to known steps and conditions except that the underlayer for introducing in-plane anisotropy into the magnetic film is made of a CrAg alloy having the composition represented by the above formula [I]. be able to. For example, regarding a magnetic disk, an aluminum alloy plate or the like is used as a substrate, and a hard Ni-P plating film (film thickness: for example, 15 to 25 μm) is provided on the surface by electroless plating, and the plating film surface is textured. After that, a CrAg alloy film, which is an underlayer for giving in-plane anisotropy to the magnetic film, is appropriately thickened (for example, 50
0 to 3000Å). A magnetic film (having a film thickness of, for example, 500 to 2000Å) as a recording layer is formed on the film surface. Then, as a protective film to prevent wear and damage of the magnetic film,
By forming a coating having lubricity and wear resistance, for example, a carbonaceous film (film thickness: for example, 150 to 600Å), an in-plane recording magnetic disk having a multilayer laminated structure is obtained. The laminated structure is not limited to the above example, and for example, a Cr film (film thickness of about 100 is formed on the magnetic film before forming the carbonaceous film.
~ 500Å), the weather resistance of the magnetic disk can be further enhanced. Also, after forming the carbonaceous film on the magnetic film surface, a lubricant (film thickness: 10
~ 100 Å) can be provided to improve the protective lubrication function for the magnetic head. The film formation of each layer can be performed by a sputtering method, an ion plating method, a vacuum vapor deposition method, or the like.

〔実施例〕〔Example〕

〔I〕供試磁気ディスクの製作 アルミニウム合金基板(外径130mm、内径40mm、厚さ
1.9mm)の表面に、Ni−P無電解っき膜(膜厚20μm)
を形成し、表面にポリッシュとテキスチャ処理を行った
のち、マグネトロンスパッタリング法(但し、アルゴン
雰囲気圧:1×10-2torr)により、CrAg合金からなる下地
膜、強磁性合金からなる磁性膜および潤滑膜としての炭
素質膜(膜厚300Å)をこの順に積層成膜して供試磁気
ディスクを得た。なお、各供試磁気ディスク同士の記録
再生特性の正当な比較を行うために、各供試磁気ディス
クの保磁力(Hc)、および残留磁束密度(Br)と膜厚
(δ)の積(Br・δ)が互いに等しくなるように下地膜
および磁性膜の成膜を行った。そのHcは1050Oeとし、Br
・δは450G・μとした。
[I] Manufacture of test magnetic disk Aluminum alloy substrate (outer diameter 130 mm, inner diameter 40 mm, thickness
1.9 mm) surface with Ni-P electroless plating film (film thickness 20 μm)
After forming and polishing and texturing the surface, the magnetron sputtering method (Argon atmosphere pressure: 1 × 10 -2 torr) was used to form a base film made of a CrAg alloy, a magnetic film made of a ferromagnetic alloy, and lubrication. A carbonaceous film (thickness 300 Å) as a film was laminated in this order to obtain a test magnetic disk. In order to make a proper comparison of the recording / reproducing characteristics between the test magnetic disks, the coercive force (Hc) of each test magnetic disk and the product of residual magnetic flux density (Br) and film thickness (δ) (Br The underlayer film and the magnetic film were formed such that δ) became equal to each other. Its Hc is 1050 Oe and Br
・ Δ was set to 450G ・ μ.

〔II〕記録再生特性試験 各供試磁気ディスクについて、フェライトヘッドを使
用し、記録線密度28KFCIで、信号の記録再生試験を行っ
た。ヘッド仕様は、ギャップ幅:13.5μ、ギャップ長さ:
0.79μ、インダクタンス:8μH、フライングハイト:0.2
0μ、ローディング・フォース:9.5g f、コイル巻数:26
であり、回転速度は3600rpmとした。
[II] Recording / reproducing characteristic test For each magnetic disk under test, a recording / reproducing test of a signal was conducted at a recording linear density of 28 KFCI using a ferrite head. Head specifications are: gap width: 13.5μ, gap length:
0.79μ, inductance: 8μH, flying height: 0.2
0μ, loading force: 9.5gf, coil turns: 26
And the rotation speed was 3600 rpm.

各供試磁気ディスクの試験結果を、その磁性膜の合金
組成と併せて第1表に示す。表中、No.1〜6は下地膜を
CrAg合金で形成した発明例、No.11〜13は下地膜がCr単
相金属である比較例である。なお、「S/N」は再生信号
出力とメディアノイズ強さの比を意味している。
The test results of each magnetic disk under test are shown in Table 1 together with the alloy composition of the magnetic film. In the table, No. 1 to 6 are base films
Inventive examples formed of CrAg alloy, Nos. 11 to 13 are comparative examples in which the base film is a Cr single-phase metal. Note that "S / N" means the ratio of the reproduction signal output and the media noise strength.

また、第1図は、磁性膜の保磁力(Hc)を、その下地
膜の膜厚(δ)との関係で示したグラフであり、図中、
(a)は上記供試磁気ディスクNo.1と同じ合金組成の下
地膜(Cr99Ag1)と磁性膜(Co84Cr12Ta4)、(b)は供
試磁気ディスクNo.11と同じ合金組成の下地膜(Cr100
と磁性膜(Co84Cr12Ta4)をそれぞれ有する磁気ディス
クについての測定結果を示している。
Further, FIG. 1 is a graph showing the coercive force (Hc) of the magnetic film in relation to the film thickness (δ) of the underlying film.
(A) is the underlayer film (Cr 99 Ag 1 ) and magnetic film (Co 84 Cr 12 Ta 4 ) of the same alloy composition as the above-mentioned magnetic disk No. 1, and (b) is the same as the magnetic disk No. 11 under test. Underlayer film of alloy composition (Cr 100 )
The measurement results are shown for a magnetic disk having a magnetic film and a magnetic film (Co 84 Cr 12 Ta 4 ).

上記試験結果から、CrAg合金下地膜とする発明例の磁
気ディスクは、変調ノイズ、S/N比等の改良されたノイ
ズ特性を有していることがわかる。
From the above test results, it is understood that the magnetic disk of the invention example having the CrAg alloy underlayer has improved noise characteristics such as modulation noise and S / N ratio.

〔発明の効果〕 本発明の金属薄膜型磁気記録媒体は、ノイズ特性にす
ぐれ、記録再生ノイズが低いことにより従来品を凌ぐ高
密度記録が可能であり、これにより磁気記録媒体のコン
パクト化と高品質・高性能化等の効果を得ることができ
る。
[Advantages of the Invention] The metal thin film magnetic recording medium of the present invention has excellent noise characteristics and low recording / reproducing noise, which enables high-density recording superior to that of conventional products. It is possible to obtain effects such as quality and high performance.

【図面の簡単な説明】[Brief description of drawings]

第1図は、磁性膜の保磁力(Hc)を、その下地層の膜厚
との関係で示したグラフである。
FIG. 1 is a graph showing the coercive force (Hc) of a magnetic film in relation to the film thickness of its underlayer.

Claims (1)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】非磁性基体上に、記録層として強磁性金属
からなる薄膜が下地膜を介して積層形成されている面内
記録用磁気記録媒体において、 前記下地膜が下式: Cr100-xAgx 〔但し、xは0.1〜3.0である〕 で示される組成を有する合金からなることを特徴とする
ノイズ特性にすぐれた金属薄膜型磁気記録媒体。
1. A magnetic recording medium for longitudinal recording in which a thin film made of a ferromagnetic metal is laminated as a recording layer on a non-magnetic substrate via an underlayer film, wherein the underlayer film has the following formula: Cr 100- A metal thin film magnetic recording medium excellent in noise characteristics, characterized by comprising an alloy having a composition represented by xAgx (where x is 0.1 to 3.0).
JP1147637A 1989-06-09 1989-06-09 Metal thin film magnetic recording medium Expired - Lifetime JP2527616B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1147637A JP2527616B2 (en) 1989-06-09 1989-06-09 Metal thin film magnetic recording medium

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1147637A JP2527616B2 (en) 1989-06-09 1989-06-09 Metal thin film magnetic recording medium

Publications (2)

Publication Number Publication Date
JPH0312813A JPH0312813A (en) 1991-01-21
JP2527616B2 true JP2527616B2 (en) 1996-08-28

Family

ID=15434839

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1147637A Expired - Lifetime JP2527616B2 (en) 1989-06-09 1989-06-09 Metal thin film magnetic recording medium

Country Status (1)

Country Link
JP (1) JP2527616B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9548075B2 (en) 2013-06-27 2017-01-17 Kabushiki Kaisha Toshiba Magnetic recording medium and magnetic recording/reproduction apparatus

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9548075B2 (en) 2013-06-27 2017-01-17 Kabushiki Kaisha Toshiba Magnetic recording medium and magnetic recording/reproduction apparatus

Also Published As

Publication number Publication date
JPH0312813A (en) 1991-01-21

Similar Documents

Publication Publication Date Title
JPH05274644A (en) Magnetic recording medium and its production
JPH0566647B2 (en)
JPH07105027B2 (en) Perpendicular magnetic recording medium
JP2527616B2 (en) Metal thin film magnetic recording medium
JP2552546B2 (en) Metal thin film magnetic recording medium
US5082750A (en) Magnetic recording medium of thin metal film type
JP2527617B2 (en) Metal thin film magnetic recording medium
JP2527618B2 (en) Metal thin film magnetic recording medium
JP2544205B2 (en) Metal thin film magnetic recording medium for in-plane magnetization recording
JP2001250223A (en) Magnetic recording medium and magnetic recorder
JPS6313256B2 (en)
JP2721624B2 (en) Metal thin-film magnetic recording media
JPH08329442A (en) Magnetic recording medium
JPH0719372B2 (en) Method of manufacturing magnetic recording medium
JPH0896340A (en) Magnetic recording medium and its production
JP3434845B2 (en) Magnetic recording medium, method for manufacturing the magnetic recording medium, and magnetic storage device
JP2732153B2 (en) Metal thin-film magnetic recording media
JPH0460916A (en) Metal thin film type magnetic recording medium
JP2785276B2 (en) Magnetic recording media
JP2990975B2 (en) Magnetic recording media
JP2760906B2 (en) Magnetic recording medium and method of manufacturing the same
JPS6333286B2 (en)
JPH01232516A (en) Thin metallic film type magnetic recording medium
JPH01232517A (en) Thin metallic film type magnetic recording medium
JPH0223511A (en) Thin metallic film type magnetic recording medium