JPS63100838U - - Google Patents

Info

Publication number
JPS63100838U
JPS63100838U JP19588486U JP19588486U JPS63100838U JP S63100838 U JPS63100838 U JP S63100838U JP 19588486 U JP19588486 U JP 19588486U JP 19588486 U JP19588486 U JP 19588486U JP S63100838 U JPS63100838 U JP S63100838U
Authority
JP
Japan
Prior art keywords
inspection device
foreign matter
calibration sample
matter inspection
wafer surface
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP19588486U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP19588486U priority Critical patent/JPS63100838U/ja
Publication of JPS63100838U publication Critical patent/JPS63100838U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP19588486U 1986-12-22 1986-12-22 Pending JPS63100838U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19588486U JPS63100838U (enrdf_load_stackoverflow) 1986-12-22 1986-12-22

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19588486U JPS63100838U (enrdf_load_stackoverflow) 1986-12-22 1986-12-22

Publications (1)

Publication Number Publication Date
JPS63100838U true JPS63100838U (enrdf_load_stackoverflow) 1988-06-30

Family

ID=31154183

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19588486U Pending JPS63100838U (enrdf_load_stackoverflow) 1986-12-22 1986-12-22

Country Status (1)

Country Link
JP (1) JPS63100838U (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2023548233A (ja) * 2020-11-09 2023-11-15 ジルトロニック アクチエンゲゼルシャフト 半導体ウェハの表面上の未知の粒子を分類する方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2023548233A (ja) * 2020-11-09 2023-11-15 ジルトロニック アクチエンゲゼルシャフト 半導体ウェハの表面上の未知の粒子を分類する方法

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