JPS62189650U - - Google Patents

Info

Publication number
JPS62189650U
JPS62189650U JP5756486U JP5756486U JPS62189650U JP S62189650 U JPS62189650 U JP S62189650U JP 5756486 U JP5756486 U JP 5756486U JP 5756486 U JP5756486 U JP 5756486U JP S62189650 U JPS62189650 U JP S62189650U
Authority
JP
Japan
Prior art keywords
sheet
measured
defect
optical inspection
inspection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5756486U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5756486U priority Critical patent/JPS62189650U/ja
Publication of JPS62189650U publication Critical patent/JPS62189650U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Sampling And Sample Adjustment (AREA)
JP5756486U 1986-04-18 1986-04-18 Pending JPS62189650U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5756486U JPS62189650U (enrdf_load_stackoverflow) 1986-04-18 1986-04-18

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5756486U JPS62189650U (enrdf_load_stackoverflow) 1986-04-18 1986-04-18

Publications (1)

Publication Number Publication Date
JPS62189650U true JPS62189650U (enrdf_load_stackoverflow) 1987-12-02

Family

ID=30887385

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5756486U Pending JPS62189650U (enrdf_load_stackoverflow) 1986-04-18 1986-04-18

Country Status (1)

Country Link
JP (1) JPS62189650U (enrdf_load_stackoverflow)

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