JPS63149531U - - Google Patents

Info

Publication number
JPS63149531U
JPS63149531U JP4277487U JP4277487U JPS63149531U JP S63149531 U JPS63149531 U JP S63149531U JP 4277487 U JP4277487 U JP 4277487U JP 4277487 U JP4277487 U JP 4277487U JP S63149531 U JPS63149531 U JP S63149531U
Authority
JP
Japan
Prior art keywords
pellet
stage
pellets
detection section
reflected light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4277487U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4277487U priority Critical patent/JPS63149531U/ja
Publication of JPS63149531U publication Critical patent/JPS63149531U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP4277487U 1987-03-23 1987-03-23 Pending JPS63149531U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4277487U JPS63149531U (enrdf_load_stackoverflow) 1987-03-23 1987-03-23

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4277487U JPS63149531U (enrdf_load_stackoverflow) 1987-03-23 1987-03-23

Publications (1)

Publication Number Publication Date
JPS63149531U true JPS63149531U (enrdf_load_stackoverflow) 1988-10-03

Family

ID=30859007

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4277487U Pending JPS63149531U (enrdf_load_stackoverflow) 1987-03-23 1987-03-23

Country Status (1)

Country Link
JP (1) JPS63149531U (enrdf_load_stackoverflow)

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