JPS6295119A - 水素化ガスの除去方法 - Google Patents
水素化ガスの除去方法Info
- Publication number
- JPS6295119A JPS6295119A JP60233387A JP23338785A JPS6295119A JP S6295119 A JPS6295119 A JP S6295119A JP 60233387 A JP60233387 A JP 60233387A JP 23338785 A JP23338785 A JP 23338785A JP S6295119 A JPS6295119 A JP S6295119A
- Authority
- JP
- Japan
- Prior art keywords
- gas
- hydrogenation
- potassium permanganate
- carrier
- hydrogenation gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Treating Waste Gases (AREA)
- Catalysts (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60233387A JPS6295119A (ja) | 1985-10-21 | 1985-10-21 | 水素化ガスの除去方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60233387A JPS6295119A (ja) | 1985-10-21 | 1985-10-21 | 水素化ガスの除去方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6295119A true JPS6295119A (ja) | 1987-05-01 |
| JPH0410367B2 JPH0410367B2 (enExample) | 1992-02-25 |
Family
ID=16954295
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60233387A Granted JPS6295119A (ja) | 1985-10-21 | 1985-10-21 | 水素化ガスの除去方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6295119A (enExample) |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4910001A (en) * | 1987-08-31 | 1990-03-20 | Japan Pionics, Ltd. | Method for cleaning gas containing toxic component |
| US4996030A (en) * | 1987-06-01 | 1991-02-26 | Japan Pionics, Ltd. | Method for cleaning exhaust gases |
| US5096681A (en) * | 1991-02-22 | 1992-03-17 | Phillips Petroleum Company | Removal of trialkyl arsine from fluids |
| US5378439A (en) * | 1989-09-22 | 1995-01-03 | L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude | Process for removing gaseous hydrides from a solid support comprising metallic oxides |
| US5672325A (en) * | 1995-01-24 | 1997-09-30 | Japan Atomic Energy Research Institute | Method for the oxidation treatment of decaborane gas |
| US5853678A (en) * | 1993-03-17 | 1998-12-29 | Nipon Sanso Corporation | Method for removing hydrides, alkoxides and alkylates out of a gas using cupric hydroxide |
| JP2007093385A (ja) * | 2005-09-28 | 2007-04-12 | Tokyo Gas Co Ltd | 気体中の微量ヒ素の全量捕集法及び全量分析法 |
| CN104338432A (zh) * | 2013-07-30 | 2015-02-11 | 湖南华望熏蒸消毒有限公司 | 一种磷化氢气体的处理剂和制作方法 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5684618A (en) * | 1979-12-12 | 1981-07-10 | Seitetsu Kagaku Co Ltd | Method of removing harmful gas for semiconductor |
| JPS60187335A (ja) * | 1984-03-07 | 1985-09-24 | Nippon Sanso Kk | 粒状吸収処理剤 |
-
1985
- 1985-10-21 JP JP60233387A patent/JPS6295119A/ja active Granted
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5684618A (en) * | 1979-12-12 | 1981-07-10 | Seitetsu Kagaku Co Ltd | Method of removing harmful gas for semiconductor |
| JPS60187335A (ja) * | 1984-03-07 | 1985-09-24 | Nippon Sanso Kk | 粒状吸収処理剤 |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4996030A (en) * | 1987-06-01 | 1991-02-26 | Japan Pionics, Ltd. | Method for cleaning exhaust gases |
| US4910001A (en) * | 1987-08-31 | 1990-03-20 | Japan Pionics, Ltd. | Method for cleaning gas containing toxic component |
| US5378439A (en) * | 1989-09-22 | 1995-01-03 | L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude | Process for removing gaseous hydrides from a solid support comprising metallic oxides |
| US5096681A (en) * | 1991-02-22 | 1992-03-17 | Phillips Petroleum Company | Removal of trialkyl arsine from fluids |
| US5853678A (en) * | 1993-03-17 | 1998-12-29 | Nipon Sanso Corporation | Method for removing hydrides, alkoxides and alkylates out of a gas using cupric hydroxide |
| US5672325A (en) * | 1995-01-24 | 1997-09-30 | Japan Atomic Energy Research Institute | Method for the oxidation treatment of decaborane gas |
| JP2007093385A (ja) * | 2005-09-28 | 2007-04-12 | Tokyo Gas Co Ltd | 気体中の微量ヒ素の全量捕集法及び全量分析法 |
| CN104338432A (zh) * | 2013-07-30 | 2015-02-11 | 湖南华望熏蒸消毒有限公司 | 一种磷化氢气体的处理剂和制作方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0410367B2 (enExample) | 1992-02-25 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| KR960003147B1 (ko) | 배기가스의 정화법 | |
| US4743435A (en) | Method for cleaning exhaust gases | |
| JP3217101B2 (ja) | 空気浄化剤の製造方法 | |
| JPS6295119A (ja) | 水素化ガスの除去方法 | |
| KR920003770B1 (ko) | 배기가스의 세정방법 | |
| JP2581642B2 (ja) | エッチング排ガス除害剤及び排ガス処理方法 | |
| JP4564242B2 (ja) | 三フッ化塩素を含む無機ハロゲン化ガス含有排ガスの処理方法、処理剤及び処理装置 | |
| KR100488091B1 (ko) | 유해가스 정화제 및 정화방법 | |
| KR20010061933A (ko) | 유해가스 정화제 및 정화방법 | |
| JPH0268140A (ja) | ヨウ素除去用吸着剤の製造方法 | |
| JP3260825B2 (ja) | 有害ガスの浄化方法 | |
| JPS63147518A (ja) | 空気浄化方法 | |
| JPS62286521A (ja) | 排ガスの浄化方法 | |
| JPH0417082B2 (enExample) | ||
| JP3131480B2 (ja) | 空気浄化剤とその製造方法 | |
| WO2010109671A1 (ja) | 揮発性無機水素化物含有排ガス除害剤及び揮発性無機水素化物含有排ガス除害方法 | |
| JPS61129026A (ja) | 排ガスの浄化方法 | |
| JPS62286520A (ja) | 排ガスの浄化方法 | |
| JPS62286523A (ja) | 排ガスの浄化方法 | |
| JPS62286522A (ja) | 排ガスの浄化方法 | |
| JPS62286525A (ja) | 排ガスの浄化方法 | |
| JPH074506B2 (ja) | 排ガスの浄化方法 | |
| JP3362918B2 (ja) | 排ガスの浄化方法 | |
| JPH0221941A (ja) | リン吸着剤及びその製造方法 | |
| JPS62286524A (ja) | 排ガスの浄化方法 |