JPS6293363U - - Google Patents
Info
- Publication number
- JPS6293363U JPS6293363U JP1985186992U JP18699285U JPS6293363U JP S6293363 U JPS6293363 U JP S6293363U JP 1985186992 U JP1985186992 U JP 1985186992U JP 18699285 U JP18699285 U JP 18699285U JP S6293363 U JPS6293363 U JP S6293363U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- evaporation sources
- electron beam
- thin film
- gas inlet
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims description 7
- 238000010438 heat treatment Methods 0.000 claims description 4
- 230000008020 evaporation Effects 0.000 claims description 3
- 238000001704 evaporation Methods 0.000 claims description 3
- 238000010894 electron beam technology Methods 0.000 claims description 2
- 239000010409 thin film Substances 0.000 claims description 2
- 239000002994 raw material Substances 0.000 claims 1
- 239000013078 crystal Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 239000012495 reaction gas Substances 0.000 description 1
Landscapes
- Thermal Transfer Or Thermal Recording In General (AREA)
- Physical Vapour Deposition (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985186992U JPH0318500Y2 (cs) | 1985-12-04 | 1985-12-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985186992U JPH0318500Y2 (cs) | 1985-12-04 | 1985-12-04 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6293363U true JPS6293363U (cs) | 1987-06-15 |
| JPH0318500Y2 JPH0318500Y2 (cs) | 1991-04-18 |
Family
ID=31137054
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1985186992U Expired JPH0318500Y2 (cs) | 1985-12-04 | 1985-12-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0318500Y2 (cs) |
-
1985
- 1985-12-04 JP JP1985186992U patent/JPH0318500Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0318500Y2 (cs) | 1991-04-18 |
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