JPS629203A - 楕円面鏡の表面形状測定用ホログラム干渉計 - Google Patents
楕円面鏡の表面形状測定用ホログラム干渉計Info
- Publication number
- JPS629203A JPS629203A JP14879785A JP14879785A JPS629203A JP S629203 A JPS629203 A JP S629203A JP 14879785 A JP14879785 A JP 14879785A JP 14879785 A JP14879785 A JP 14879785A JP S629203 A JPS629203 A JP S629203A
- Authority
- JP
- Japan
- Prior art keywords
- light
- hologram
- optical system
- mirror
- spherical wave
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000003287 optical effect Effects 0.000 claims abstract description 27
- 238000005286 illumination Methods 0.000 claims description 16
- 230000004907 flux Effects 0.000 abstract description 5
- 230000001678 irradiating effect Effects 0.000 abstract 1
- 238000000034 method Methods 0.000 description 7
- 238000010586 diagram Methods 0.000 description 4
- 239000007788 liquid Substances 0.000 description 3
- 238000005259 measurement Methods 0.000 description 3
- 238000007654 immersion Methods 0.000 description 2
- 238000007689 inspection Methods 0.000 description 2
- 238000004556 laser interferometry Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000004075 alteration Effects 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- XKRFYHLGVUSROY-UHFFFAOYSA-N argon Substances [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
Landscapes
- Instruments For Measurement Of Length By Optical Means (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Testing Of Optical Devices Or Fibers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14879785A JPS629203A (ja) | 1985-07-05 | 1985-07-05 | 楕円面鏡の表面形状測定用ホログラム干渉計 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14879785A JPS629203A (ja) | 1985-07-05 | 1985-07-05 | 楕円面鏡の表面形状測定用ホログラム干渉計 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS629203A true JPS629203A (ja) | 1987-01-17 |
| JPH0376846B2 JPH0376846B2 (enrdf_load_stackoverflow) | 1991-12-06 |
Family
ID=15460918
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14879785A Granted JPS629203A (ja) | 1985-07-05 | 1985-07-05 | 楕円面鏡の表面形状測定用ホログラム干渉計 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS629203A (enrdf_load_stackoverflow) |
-
1985
- 1985-07-05 JP JP14879785A patent/JPS629203A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0376846B2 (enrdf_load_stackoverflow) | 1991-12-06 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |