JPS6288907U - - Google Patents
Info
- Publication number
- JPS6288907U JPS6288907U JP18058685U JP18058685U JPS6288907U JP S6288907 U JPS6288907 U JP S6288907U JP 18058685 U JP18058685 U JP 18058685U JP 18058685 U JP18058685 U JP 18058685U JP S6288907 U JPS6288907 U JP S6288907U
- Authority
- JP
- Japan
- Prior art keywords
- point
- sample
- sample image
- calculation means
- screen
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000005672 electromagnetic field Effects 0.000 claims 2
- 238000005259 measurement Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 238000010894 electron beam technology Methods 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
Landscapes
- Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP18058685U JPS6288907U (de) | 1985-11-22 | 1985-11-22 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP18058685U JPS6288907U (de) | 1985-11-22 | 1985-11-22 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6288907U true JPS6288907U (de) | 1987-06-06 |
Family
ID=31124675
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP18058685U Pending JPS6288907U (de) | 1985-11-22 | 1985-11-22 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6288907U (de) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6414854A (en) * | 1987-07-08 | 1989-01-19 | Nikon Corp | Electron microscope for length measurement |
WO2002075246A1 (fr) * | 2001-03-16 | 2002-09-26 | Hitachi, Ltd. | Procede de mesure des dimensions d'un motif |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS53106163A (en) * | 1977-02-28 | 1978-09-14 | Toshiba Corp | Electron beam meter |
JPS5434673A (en) * | 1977-08-23 | 1979-03-14 | Hitachi Ltd | Micro-distance measuring device for scan-type electronic microscope |
JPS58187803A (ja) * | 1982-08-26 | 1983-11-02 | Fujitsu Ltd | パタ−ン寸法測定装置 |
-
1985
- 1985-11-22 JP JP18058685U patent/JPS6288907U/ja active Pending
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS53106163A (en) * | 1977-02-28 | 1978-09-14 | Toshiba Corp | Electron beam meter |
JPS5434673A (en) * | 1977-08-23 | 1979-03-14 | Hitachi Ltd | Micro-distance measuring device for scan-type electronic microscope |
JPS58187803A (ja) * | 1982-08-26 | 1983-11-02 | Fujitsu Ltd | パタ−ン寸法測定装置 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6414854A (en) * | 1987-07-08 | 1989-01-19 | Nikon Corp | Electron microscope for length measurement |
WO2002075246A1 (fr) * | 2001-03-16 | 2002-09-26 | Hitachi, Ltd. | Procede de mesure des dimensions d'un motif |
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