JPS6288907U - - Google Patents

Info

Publication number
JPS6288907U
JPS6288907U JP18058685U JP18058685U JPS6288907U JP S6288907 U JPS6288907 U JP S6288907U JP 18058685 U JP18058685 U JP 18058685U JP 18058685 U JP18058685 U JP 18058685U JP S6288907 U JPS6288907 U JP S6288907U
Authority
JP
Japan
Prior art keywords
point
sample
sample image
calculation means
screen
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP18058685U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP18058685U priority Critical patent/JPS6288907U/ja
Publication of JPS6288907U publication Critical patent/JPS6288907U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
JP18058685U 1985-11-22 1985-11-22 Pending JPS6288907U (OSRAM)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18058685U JPS6288907U (OSRAM) 1985-11-22 1985-11-22

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18058685U JPS6288907U (OSRAM) 1985-11-22 1985-11-22

Publications (1)

Publication Number Publication Date
JPS6288907U true JPS6288907U (OSRAM) 1987-06-06

Family

ID=31124675

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18058685U Pending JPS6288907U (OSRAM) 1985-11-22 1985-11-22

Country Status (1)

Country Link
JP (1) JPS6288907U (OSRAM)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6414854A (en) * 1987-07-08 1989-01-19 Nikon Corp Electron microscope for length measurement
WO2002075246A1 (fr) * 2001-03-16 2002-09-26 Hitachi, Ltd. Procede de mesure des dimensions d'un motif

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53106163A (en) * 1977-02-28 1978-09-14 Toshiba Corp Electron beam meter
JPS5434673A (en) * 1977-08-23 1979-03-14 Hitachi Ltd Micro-distance measuring device for scan-type electronic microscope
JPS58187803A (ja) * 1982-08-26 1983-11-02 Fujitsu Ltd パタ−ン寸法測定装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53106163A (en) * 1977-02-28 1978-09-14 Toshiba Corp Electron beam meter
JPS5434673A (en) * 1977-08-23 1979-03-14 Hitachi Ltd Micro-distance measuring device for scan-type electronic microscope
JPS58187803A (ja) * 1982-08-26 1983-11-02 Fujitsu Ltd パタ−ン寸法測定装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6414854A (en) * 1987-07-08 1989-01-19 Nikon Corp Electron microscope for length measurement
WO2002075246A1 (fr) * 2001-03-16 2002-09-26 Hitachi, Ltd. Procede de mesure des dimensions d'un motif

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