JPS62876A - 半導体集積回路用試験装置 - Google Patents
半導体集積回路用試験装置Info
- Publication number
- JPS62876A JPS62876A JP60140767A JP14076785A JPS62876A JP S62876 A JPS62876 A JP S62876A JP 60140767 A JP60140767 A JP 60140767A JP 14076785 A JP14076785 A JP 14076785A JP S62876 A JPS62876 A JP S62876A
- Authority
- JP
- Japan
- Prior art keywords
- signal line
- switch means
- semiconductor integrated
- switch
- integrated circuit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000012360 testing method Methods 0.000 title claims abstract description 46
- 239000004065 semiconductor Substances 0.000 title claims description 42
- 239000000523 sample Substances 0.000 claims abstract description 11
- 238000005259 measurement Methods 0.000 abstract description 4
- 230000002159 abnormal effect Effects 0.000 abstract description 3
- 238000009792 diffusion process Methods 0.000 description 6
- 230000002950 deficient Effects 0.000 description 5
- 239000000758 substrate Substances 0.000 description 5
- 238000010586 diagram Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000000034 method Methods 0.000 description 2
- 238000009530 blood pressure measurement Methods 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 230000002747 voluntary effect Effects 0.000 description 1
Landscapes
- Testing Of Short-Circuits, Discontinuities, Leakage, Or Incorrect Line Connections (AREA)
- Testing Of Individual Semiconductor Devices (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP60140767A JPS62876A (ja) | 1985-06-27 | 1985-06-27 | 半導体集積回路用試験装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP60140767A JPS62876A (ja) | 1985-06-27 | 1985-06-27 | 半導体集積回路用試験装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS62876A true JPS62876A (ja) | 1987-01-06 |
JPH054034B2 JPH054034B2 (enrdf_load_stackoverflow) | 1993-01-19 |
Family
ID=15276270
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP60140767A Granted JPS62876A (ja) | 1985-06-27 | 1985-06-27 | 半導体集積回路用試験装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS62876A (enrdf_load_stackoverflow) |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5098282A (enrdf_load_stackoverflow) * | 1973-12-26 | 1975-08-05 | ||
JPS5694965U (enrdf_load_stackoverflow) * | 1979-12-21 | 1981-07-28 |
-
1985
- 1985-06-27 JP JP60140767A patent/JPS62876A/ja active Granted
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5098282A (enrdf_load_stackoverflow) * | 1973-12-26 | 1975-08-05 | ||
JPS5694965U (enrdf_load_stackoverflow) * | 1979-12-21 | 1981-07-28 |
Also Published As
Publication number | Publication date |
---|---|
JPH054034B2 (enrdf_load_stackoverflow) | 1993-01-19 |
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