JPS6276847U - - Google Patents

Info

Publication number
JPS6276847U
JPS6276847U JP16574185U JP16574185U JPS6276847U JP S6276847 U JPS6276847 U JP S6276847U JP 16574185 U JP16574185 U JP 16574185U JP 16574185 U JP16574185 U JP 16574185U JP S6276847 U JPS6276847 U JP S6276847U
Authority
JP
Japan
Prior art keywords
air
clean room
clean
fan
ceiling
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP16574185U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP16574185U priority Critical patent/JPS6276847U/ja
Publication of JPS6276847U publication Critical patent/JPS6276847U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Ventilation (AREA)
JP16574185U 1985-10-30 1985-10-30 Pending JPS6276847U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16574185U JPS6276847U (enrdf_load_stackoverflow) 1985-10-30 1985-10-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16574185U JPS6276847U (enrdf_load_stackoverflow) 1985-10-30 1985-10-30

Publications (1)

Publication Number Publication Date
JPS6276847U true JPS6276847U (enrdf_load_stackoverflow) 1987-05-16

Family

ID=31096054

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16574185U Pending JPS6276847U (enrdf_load_stackoverflow) 1985-10-30 1985-10-30

Country Status (1)

Country Link
JP (1) JPS6276847U (enrdf_load_stackoverflow)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS555878U (enrdf_load_stackoverflow) * 1978-06-29 1980-01-16

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS555878U (enrdf_load_stackoverflow) * 1978-06-29 1980-01-16

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