JPS627588B2 - - Google Patents
Info
- Publication number
- JPS627588B2 JPS627588B2 JP54027298A JP2729879A JPS627588B2 JP S627588 B2 JPS627588 B2 JP S627588B2 JP 54027298 A JP54027298 A JP 54027298A JP 2729879 A JP2729879 A JP 2729879A JP S627588 B2 JPS627588 B2 JP S627588B2
- Authority
- JP
- Japan
- Prior art keywords
- pattern
- inspected
- inspection
- image
- area
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000007689 inspection Methods 0.000 claims description 121
- 238000000034 method Methods 0.000 claims description 81
- 230000008569 process Effects 0.000 description 29
- 230000002950 deficient Effects 0.000 description 25
- 238000001514 detection method Methods 0.000 description 10
- 238000010586 diagram Methods 0.000 description 7
- 238000003672 processing method Methods 0.000 description 6
- 230000004907 flux Effects 0.000 description 4
- GNFTZDOKVXKIBK-UHFFFAOYSA-N 3-(2-methoxyethoxy)benzohydrazide Chemical compound COCCOC1=CC=CC(C(=O)NN)=C1 GNFTZDOKVXKIBK-UHFFFAOYSA-N 0.000 description 2
- FGUUSXIOTUKUDN-IBGZPJMESA-N C1(=CC=CC=C1)N1C2=C(NC([C@H](C1)NC=1OC(=NN=1)C1=CC=CC=C1)=O)C=CC=C2 Chemical compound C1(=CC=CC=C1)N1C2=C(NC([C@H](C1)NC=1OC(=NN=1)C1=CC=CC=C1)=O)C=CC=C2 FGUUSXIOTUKUDN-IBGZPJMESA-N 0.000 description 2
- YTAHJIFKAKIKAV-XNMGPUDCSA-N [(1R)-3-morpholin-4-yl-1-phenylpropyl] N-[(3S)-2-oxo-5-phenyl-1,3-dihydro-1,4-benzodiazepin-3-yl]carbamate Chemical compound O=C1[C@H](N=C(C2=C(N1)C=CC=C2)C1=CC=CC=C1)NC(O[C@H](CCN1CCOCC1)C1=CC=CC=C1)=O YTAHJIFKAKIKAV-XNMGPUDCSA-N 0.000 description 2
- 238000004590 computer program Methods 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 238000009825 accumulation Methods 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 230000006870 function Effects 0.000 description 1
- 230000007274 generation of a signal involved in cell-cell signaling Effects 0.000 description 1
- 230000008676 import Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000004806 packaging method and process Methods 0.000 description 1
- 238000013139 quantization Methods 0.000 description 1
- 230000003252 repetitive effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Character Input (AREA)
- Image Processing (AREA)
- Image Analysis (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2729879A JPS55119782A (en) | 1979-03-09 | 1979-03-09 | Pattern automatic inspection method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2729879A JPS55119782A (en) | 1979-03-09 | 1979-03-09 | Pattern automatic inspection method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS55119782A JPS55119782A (en) | 1980-09-13 |
| JPS627588B2 true JPS627588B2 (fr) | 1987-02-18 |
Family
ID=12217174
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2729879A Granted JPS55119782A (en) | 1979-03-09 | 1979-03-09 | Pattern automatic inspection method |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS55119782A (fr) |
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57111781A (en) * | 1980-12-29 | 1982-07-12 | Fujitsu Ltd | Pattern location detecting method |
| CA1193709A (fr) * | 1980-11-17 | 1985-09-17 | Gary G. Wagner | Appareil d'inspection programmable par l'operateur |
| JPS5827275A (ja) * | 1981-08-10 | 1983-02-17 | Toshiba Corp | パタ−ンメモリのアドレス制御方式 |
| JPS5827278A (ja) * | 1981-08-10 | 1983-02-17 | Toshiba Corp | 行捜索方式 |
| JPS60147881A (ja) * | 1984-01-11 | 1985-08-03 | Fuji Xerox Co Ltd | 画像情報蓄積方法および装置 |
| JPS63282576A (ja) * | 1987-05-14 | 1988-11-18 | Toppan Printing Co Ltd | パタ−ン検査装置 |
| US5060276A (en) * | 1989-05-31 | 1991-10-22 | At&T Bell Laboratories | Technique for object orientation detection using a feed-forward neural network |
| JP4631384B2 (ja) * | 2003-10-20 | 2011-02-16 | オムロン株式会社 | 印刷状態検査方法ならびに文字検査方法、およびこれらの方法を用いた検査装置 |
| TWI547431B (zh) * | 2004-06-09 | 2016-09-01 | 史密斯克萊美占公司 | 生產藥物之裝置及方法 |
-
1979
- 1979-03-09 JP JP2729879A patent/JPS55119782A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS55119782A (en) | 1980-09-13 |
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